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    • 1. 发明专利
    • Metal film production device and metal film production method
    • 金属膜生产设备和金属膜生产方法
    • JP2005187923A
    • 2005-07-14
    • JP2003434030
    • 2003-12-26
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • SATAKE KOJISHIGENAKA TOSHIAKITONEGAWA YUTAKASAKAMOTO HITOSHI
    • C23C16/14H01L21/285
    • PROBLEM TO BE SOLVED: To provide a metal film production device and a metal film production method for producing a metal film with a homogeneous and uniform film thickness.
      SOLUTION: In the method of forming a metal film using reaction between halogen free radicals and metal, between a part where halogen free radicals are formed and a substrate 3, the metallic member 10 to be etched is elongated to the inner wall of a chamber 1, thus both of the part where halogen free radicals are formed and the part of the substrate 3 are separated, and further, regarding the height in the vertical direction of the opening part in the member 10 to be etched, it is made low at the central part, and is made high at the peripheral part. In this way, the surface area with which halogen free radicals are contacted is controlled, thus, over the whole face in the surface of the substrate 3, the flow velocity ratio between the halogen free radicals and metal halide is made uniform, and the film quality and film thickness distribution of the finally formed metal film are made uniform.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种具有均匀且均匀的膜厚度的金属膜的制造方法和金属膜制造方法。 解决方案:在使用卤素自由基和金属之间的反应形成金属膜的方法中,在形成卤素自由基的部分和基底3之间,待蚀刻的金属构件10延伸到 因此,形成有卤素自由基的部分和基板3的一部分分离的室1,此外,关于要蚀刻的构件10中的开口部的垂直方向的高度, 在中心部分低,并在周边部分变高。 以这种方式,控制与卤素自由基接触的表面积,从而在基板3的表面的整个面上,使卤素自由基和金属卤化物之间的流速比均匀,并且膜 最终形成的金属膜的质量和膜厚分布均匀。 版权所有(C)2005,JPO&NCIPI
    • 4. 发明专利
    • Power generation system
    • 发电系统
    • JP2014190276A
    • 2014-10-06
    • JP2013067301
    • 2013-03-27
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • INOUE YUKIHIKOTONEGAWA YUTAKAFUKUDA NORIHIROKOZUKI NORITOFUJII ATSUSHI
    • F01K25/10
    • PROBLEM TO BE SOLVED: To provide a power generation system ensuring higher safety.SOLUTION: A power generation system for generating electric power in a Rankine cycle with an organic medium used as a working fluid, comprises: a heat exchanger causing heat exchange between a heat source and the working fluid and evaporating the working fluid to produce steam; a steam turbine to which the steam heated in the heat exchanger is supplied, and that rotates by the steam; a generator coupled to the steam turbine; a condenser cooling the steam passing through the steam turbine to change the working fluid to a liquid working fluid; a liquid supply pump pressurizing the working fluid supplied from the condenser and supplying the pressurized working fluid to the heat exchanger; a circulation path in which the working fluid and the steam circulate by connecting the heat exchanger, the steam turbine, the condenser, and the liquid supply pump; a temperature decreasing portion arranged in the circulation path, and decreasing a temperature of the working fluid supplied to the heat exchanger; a leakage detection portion detecting leakage of the working fluid; and a control device that actuates the temperature decreasing portion to decrease the temperature of the working fluid supplied to the heat exchanger if the leakage detection portion detects the leakage of the working fluid.
    • 要解决的问题:提供确保更高安全性的发电系统。解决方案:一种用于利用用作工作流体的有机介质在兰金循环中产生电力的发电系统,包括:热交换器,其在热 源和工作流体并蒸发工作流体以产生蒸汽; 蒸汽轮机,其中供应有在热交换器中加热的蒸汽,并且由蒸汽旋转; 耦合到所述汽轮机的发电机; 冷凝器冷却通过蒸汽轮机的蒸汽,以将工作流体改变为液体工作流体; 液体供应泵,对从冷凝器供应的工作流体加压并将加压的工作流体供应到热交换器; 工作流体和蒸汽通过连接热交换器,蒸汽轮机,冷凝器和液体供给泵而循环的循环路径; 布置在所述循环路径中的降温部,并且降低供给到所述热交换器的工作流体的温度; 泄漏检测部,检测工作流体的泄漏; 以及控制装置,如果泄漏检测部检测到工作流体的泄漏,则致动温度降低部分以降低供应到热交换器的工作流体的温度。
    • 7. 发明专利
    • Organic Rankine cycle system
    • 有机RANKINE循环系统
    • JP2014190277A
    • 2014-10-06
    • JP2013067302
    • 2013-03-27
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • INOUE YUKIHIKOTONEGAWA YUTAKAFUKUDA NORIHIROKOZUKI NORITOFUJII ATSUSHI
    • F01K25/10
    • Y02E10/34
    • PROBLEM TO BE SOLVED: To provide an organic Rankine cycle system capable of easily and safely handling a working fluid even if an organic medium is used.SOLUTION: An organic Rankine cycle system includes: a heat exchanger causing heat exchange between a heat source and a working fluid to heat the working fluid, the working fluid being a substance dissolved in a solvent; an expansion mechanism to which the working fluid heated in the heat exchanger is supplied, and that expands the working fluid; a condenser that cools the working fluid passing through the expansion mechanism to change the working fluid to a liquid working fluid; a liquid supply pump that pressurizes the working fluid supplied from the condenser, and that supplies the pressurized working fluid to the heat exchanger; a circulation path in which the working fluid and steam circulate by connecting the heat exchanger, the expansion mechanism, the condenser, and the liquid supply pump; a working-fluid supply mechanism connected to the circulation path, and supplying a liquid mixture that is a mixture of the working fluid and the solvent to the circulation path; a solvent trap arranged in the circulation path, and separating the working fluid from the solvent; a solvent collection mechanism collecting the solvent separated by the solvent trap; and a control device.
    • 要解决的问题:提供即使使用有机介质也能够容易且安全地处理工作流体的有机朗肯循环系统。解决方案:有机朗肯循环系统包括:热交换器,其引起热源和 工作流体加热工作流体,工作流体是溶解在溶剂中的物质; 供给在热交换器中加热的工作流体的膨胀机构,使工作流体膨胀; 冷凝器,其冷却通过所述膨胀机构的工作流体,以将所述工作流体改变为液体工作流体; 液体供应泵,其对从冷凝器供应的工作流体加压,并将加压的工作流体供应到热交换器; 循环路径,工作流体和蒸汽通过连接热交换器,膨胀机构,冷凝器和液体供给泵而循环; 连接到所述循环路径的工作流体供给机构,并且将作为所述工作流体和所述溶剂的混合物的液体混合物供给到所述循环路径; 布置在循环路径中的溶剂阱,并将工作流体与溶剂分离; 收集由溶剂阱分离的溶剂的溶剂收集机构; 和控制装置。
    • 10. 发明专利
    • Method for producing metallic film and apparatus for producing metallic film
    • 用于制造金属膜的方法和用于生产金属膜的装置
    • JP2003328128A
    • 2003-11-19
    • JP2002229413
    • 2002-08-07
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • SAKAMOTO HITOSHITONEGAWA YUTAKAKOSHIRO YASUMASAOGURA KENOBA YOSHIYUKINISHIMORI TOSHIHIKOHACHIMAN NAOKI
    • C23C16/08C23C16/14C23C16/50C23C16/505H01L21/285
    • PROBLEM TO BE SOLVED: To provide an apparatus for producing a metallic film by which film deposition reaction can be promoted in the production of a metallic film by which a film deposition rate is accelerated, inexpensive raw materials can be used, and impurities in a film can be reduced as possible. SOLUTION: The temperatures of a steel sheet member 7 and a substrate 3 and a temperature difference therebetween are controlled in accordance with the prescribed ones, so that the copper sheet member 7 is subjected to etching with gaseous Cl 2 plasma in a chamber 1 to form a precursor of a Cu component and gaseous Cl 2 . The Cu component in the precursor is precipitated over the substrate 3, so that film deposition of Cu is carried out. In this case, Cl* is formed in an excitation chamber 25 of a passage 24 communicating with the inside of the chamber 1 and circulating the gaseous Cl 2 . The Cl* is fed into the chamber 1, so that the gaseous Cl 2 is discharged from the precursor adsorbed on the substrate 3 to promote the film deposition reaction of the Cu film. COPYRIGHT: (C)2004,JPO
    • 解决的问题:提供一种用于制造金属膜的装置,通过该金属膜的制造,可以促进在成膜速度加快的金属膜的制造中进行成膜反应,可以使用廉价的原料,并且可以使用杂质 在电影中可以尽可能地减少。 解决方案:根据规定的方式控制钢板构件7和基板3的温度及其温度差,使得铜板构件7用气态Cl 2进行蚀刻, / SB>等离子体,以形成Cu组分的前体和气态Cl 2 SBB。 前体中的Cu成分沉积在基板3上,从而进行Cu的沉积。 在这种情况下,Cl *形成在通道24的激发室25中,该通道24与室1的内部连通并使气态Cl 2 SBB循环。 将Cl *送入室1中,从而吸附在基板3上的前体排出气态Cl 2 SB以促进Cu膜的膜沉积反应。 版权所有(C)2004,JPO