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    • 8. 发明专利
    • PRODUCTION OF THIN FILM MAGNETIC HEAD
    • JPS6414710A
    • 1989-01-18
    • JP17002387
    • 1987-07-08
    • MITSUBISHI ELECTRIC CORP
    • NAGAO EIICHIODERA SUSUMUSATO TETSUO
    • G11B5/31
    • PURPOSE:To reduce the film thickness of a drawing electrode and to reduce manufacturing cost by piercing a protection film formed on drawing conductive film patterned on a substrate to form the drawing electrode. CONSTITUTION:After patterning the drawing conductive film 12 on the substrate 11 by electrolytic plating method, the surface protection film 17 is formed by sputtering, a photoresist film 14 is formed on the film 17 so that the film 17 on the conductive film 12 is exposed and a taper-like hole is pierced on the film 17 by chemical etching so that the conductive film 12 is exposed. After removing the film 14, a ground metallic film 13 is formed as a plating ground film. Then, the film 14 is pattered so that the conductive film 12 is exposed, a metallic electrode film 19 to be the drawing electrode is formed on the exposed part of the film 13 by using the film 14 as a mask, and then the films 14, 13 are removed. Consequently, the film thickness of the protection film 17 can be reduced and the manufacturing cost can be also reduced.