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1. 发明专利

JP2011013028A Fluorescent x-ray analyzer and fluorescent x-ray analysis method 审中-公开
标题翻译：荧光X射线分析仪和荧光X射线分析方法
公开(公告)号：JP2011013028A
公开(公告)日：2011-01-20
申请号：JP2009155887
申请日：2009-06-30
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： KOMATANI SHINTARO , KUROZUMI TAKUJI , OSAWA SUMUTO
IPC分类号： G01N23/223
摘要： PROBLEM TO BE SOLVED: To provide a fluorescent X-ray analyzer utilizing a plurality of kinds of gases as gases for adjusting an atmosphere, and also to provide a fluorescent X-ray analyzing method.SOLUTION: In the fluorescent X-ray analyzer, the atmosphere in a measuring chamber (internal space) 31, through which the primary X rays from an X-ray tube (X-ray irradiation part) 51 and the fluorescent X rays detected by an X-ray detector (detection part) 52 pass, is set to a specific gas atmosphere before fluorescent X-ray analysis is performed. A helium pressure adjuster 21 and a nitrogen pressure adjuster 22 are provided on the way of piping 1 for supplying gas to the measuring chamber 31 in parallel. The respective pressure adjusters are adjusted to the pressure corresponding to the kind of the gas and, when the gas is supplied to the measuring chamber 31, the route of the gas is changed over by a changeover valve (route changing-over means) 26 so as to pass through the pressure adjuster corresponding to the kind of the gas. A plurality of kinds of gases are used as gases for adjusting the atmosphere while using almost all of the parts of the piping 1 in common.
摘要翻译：要解决的问题：提供利用多种气体作为调整气氛的气体的荧光X射线分析仪，并提供荧光X射线分析方法。解决方案：在荧光X射线分析仪中，来自X射线管（X射线照射部）51的主X射线和由X射线检测器（检测部））检测出的荧光X射线通过的测量室（内部空间）31中的气氛，在进行荧光X射线分析之前将其设定为特定的气体气氛。氦压力调节器21和氮气压力调节器22设置在管道1的路上，用于向测量室31并行供应气体。将各压力调节器调整为与气体种类相对应的压力，并且当向测量室31供给气体时，通过转换阀（路径切换装置）26将气体的路径切换以通过对应于气体种类的压力调节器。使用多种气体作为用于调节气氛的气体，同时使用管道1的几乎所有部分。

2. 发明专利

JP2004163235A X-ray analyzer 有权
公开(公告)号：JP2004163235A
公开(公告)日：2004-06-10
申请号：JP2002328828
申请日：2002-11-12
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： KOMATANI SHINTARO , OSAWA SUMUTO
IPC分类号： G01N23/223
摘要： PROBLEM TO BE SOLVED: To emit primary X-rays toward a lower one-portion of a sample to conduct X-ray analysis for the portion.
SOLUTION: The lower one-portion of the sample 10 is analyzed by the X-ray using an X-ray analyzer provided with a mounting table 3 having an X-ray transmission window 4 closed by a diaphragm transmitting the X-ray, and arranged with the sample 10 in an upper side of the X-ray transmission window 4, an X-ray source 2 arranged in a lower side of the table 3, an X-ray guide tube 5 for guiding the primary X-ray generated from the X-ray source 2 to the X-ray transmission window 4, a detecting means 7 arranged in the lower side of the table 3 to detect a secondary X-ray generated by irradiation of the primary X-ray to the sample 10 in the upper side of the X-ray transmission window 4, an image picking-up means 15 for imaging the sample 10 from the direction coaxial to an irradiation direction of the primary X-ray to the X-ray transmission window 4, and a display means 17 for displaying an image imaged by the image picking-up means 15.
COPYRIGHT: (C)2004,JPO

3. 发明专利

JP2004144478A X-ray analysis apparatus and method 有权
公开(公告)号：JP2004144478A
公开(公告)日：2004-05-20
申请号：JP2002257453
申请日：2002-09-03
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： OSAWA SUMUTO
IPC分类号： G01N23/223 , G21K1/02 , G21K1/06
CPC分类号： G01N23/223 , G01N2223/076
摘要： PROBLEM TO BE SOLVED: To provide an X-ray analysis apparatus for easily and precisely specifying an analysis position in a sample from an optical image without deteriorating a sensitivity and spatial resolution in a light element analysis. SOLUTION: In the X-ray analysis apparatus for irradiating a sample 12 with thinly narrowed X rays (a) from the upper portion by using an X-ray guide member 5, the X rays (a) from the X-ray guide member 5 are directly applied to the sample 12, and the optical image of the sample 12 is obtained in the coaxial direction of the X-ray guide member 5. COPYRIGHT: (C)2004,JPO

4. 发明专利

JP2004093512A X-ray analysis apparatus 有权
标题翻译： X射线分析装置
公开(公告)号：JP2004093512A
公开(公告)日：2004-03-25
申请号：JP2002258314
申请日：2002-09-03
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： OSAWA SUMUTO
IPC分类号： G01N23/223 , G21K1/06 , G21K5/02
摘要： PROBLEM TO BE SOLVED: To prevent a detecting means for detecting secondary X-rays generated from a sample, from detecting secondary X-rays outside of a detection object, generated from the interior of an X-ray tube.
SOLUTION: This X-ray analysis apparatus is provided with the X-ray tube 5 for guiding primary X-rays (a) generated from an X-ray source 2, and the detecting means 7 for detecting the secondary X-rays (b) generated by irradiating the sample 10 with the primary X-rays (a) from the X-ray tube 5. A plate body 20a for suppressing the secondary X-rays (b) generated from the interior of the X-ray tube 5 is provided between the X-ray tube 5 and the detecting means 7 to prevent the detecting means 7 from detecting the secondary X-rays outside of the detection object, generated from the interior of the X-ray tube 5.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：为了防止从X射线管内部检测从检测对象外部检测到的二次X射线，检测从样品产生的二次X射线的检测装置。解决方案：该X射线分析装置设置有用于引导从X射线源2产生的主X射线（a）的X射线管5和用于检测次X射线的检测装置7 （a）从X射线管5照射样品10而产生的（b）。6.一种用于抑制从X射线管内部产生的二次X射线（b）的板体20a， 5设置在X射线管5和检测装置7之间，以防止检测装置7检测从X射线管5的内部产生的检测对象外部的次X射线。
COPYRIGHT （C）2004，JPO

5. 发明专利

JP2004093510A Analysis result display method, x-ray analyzer, and computer program 有权
公开(公告)号：JP2004093510A
公开(公告)日：2004-03-25
申请号：JP2002258233
申请日：2002-09-03
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： NAGAO TOSHIHARU , OSAWA SUMUTO , KOMATANI SHINTARO , OHORI KENICHI
IPC分类号： G01N23/04
摘要： PROBLEM TO BE SOLVED: To provide an analysis result display method capable of improving the contrast of a transmission X-ray image.
SOLUTION: The number of pulses corresponding to the output level of the transmission X-ray outputted from a transmission X-ray detector 28 is counted by a counting means such as a multi-channel analyzer. In the counting means, number of pulses is counted for each output level, and the counted values are stored in a memory. An X-ray analyzer 1 extracts the counted values corresponding to the output level in a specified range among the counted values corresponding to the output level counted by the counting means. Based on the counted values corresponding to the extracted output level, the analyzer generates a transmission X-ray image and outputs the generated transmission X-ray image to a display device.
COPYRIGHT: (C)2004,JPO

6. 发明专利

JP2004079672A Semiconductor wafer identification device 审中-公开
公开(公告)号：JP2004079672A
公开(公告)日：2004-03-11
申请号：JP2002235728
申请日：2002-08-13
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： YADA TAKAAKI , OSAWA SUMUTO
IPC分类号： H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a semiconductor wafer identification device that is provided with a function of surely discriminating the presence/absence of copper mixed in semiconductor wafers.
SOLUTION: This semiconductor wafer identification device has X-ray shielding means 6, 11, and 12 which are arranged on a transportation line 2A through which semiconductor wafers 5 are transported to semiconductor manufacturing processes 3d and 3e, in which copper contamination becomes a problem, of a semiconductor production line 2 and shield X-rays Xa and Xb generated in the means 6, 11, and 12 so that the X-rays Xa and Xb may not leak out. This identification device also has roentgenizing means 7 which irradiate the wafers 5 with X-rays Xa in the shielding means 6, 11, and 12 and X-ray detecting means 8 which detect secondary X-rays Xb generated from the wafers 5 to make it possible to discriminate whether or not copper is contained in the wafers 5 by using the secondary X-rays Xb.
COPYRIGHT: (C)2004,JPO

7. 发明专利

JP2014130169A X-ray fluorescence analyzer 有权
标题翻译： X射线荧光分析仪
公开(公告)号：JP2014130169A
公开(公告)日：2014-07-10
申请号：JP2014081276
申请日：2014-04-10
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： OSAWA SUMUTO , KUROZUMI TAKUJI , KOMATANI SHINTARO
IPC分类号： G01N23/223
摘要： PROBLEM TO BE SOLVED: To provide an X-ray fluorescence analyzer that prevents occurrence of an error due to distortion of an X-ray transmission window provided at a sample cell and can analyze a flowing sample with high accuracy.SOLUTION: A support part 24 is provided in a protruding manner at the periphery of an opening 21c provided in a cell holder inner frame 21 of a cell holder 2. An annular ring shaped flat surface provided at a protruding end portion of the support part 24 comes into contact with an X-ray transmission window 54 provided inside an opening 52d at the bottom of a sample cell 5, so as to support the sample cell 5. Gas such as helium gas is filled in a housing 1 and a substantially sealed space surrounded by the X-ray transmission window 54 of the sample cell 5 and the support part 24 and an X-ray transmission window 23 of the cell holder 2, and gas such as helium gas is filled in a space from an X-ray tube 3 to the sample cell 5 and from the sample cell 5 to an X-ray detector 4. Thereafter, X-rays are radiated, and fluorescent X-rays are detected to analyze a sample.
摘要翻译：要解决的问题：提供一种X射线荧光分析仪，其能够防止由于样品池设置的X射线透射窗的畸变而产生误差，并能够高精度地分析流动的样品。解决方案：支撑部24 突出地设置在设置在电池座2的电池座内框架21中的开口21c的周边。设置在支撑部24的突出端部的环形平坦表面与X接触射线透射窗54设置在样品池5的底部的开口52d的内部，以便支撑样品池5.诸如氦气的气体填充在外壳1和被X射线包围的基本上密封的空间中将样品池5的透射窗口54和电池保持器2的支撑部24和X射线透过窗23以及诸如氦气的气体从X射线管3填充到样品池5 并从样品池5到X射线然后，照射X射线，并检测荧光X射线以分析样品。

8. 发明专利

JP2011099749A Concentration measuring method and x-ray fluorescence spectrometer 审中-公开
标题翻译：浓度测量方法和X射线荧光光谱仪
公开(公告)号：JP2011099749A
公开(公告)日：2011-05-19
申请号：JP2009254204
申请日：2009-11-05
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： OSAWA SUMUTO
IPC分类号： G01N23/223
CPC分类号： G01N23/223 , G01N2223/076
摘要： PROBLEM TO BE SOLVED: To provide a concentration measuring method capable of measuring the concentration of a measuring object in a sample using fluorescent X-ray analysis even when the composition of the sample is different, and to provide an x-ray fluorescence spectrometer. SOLUTION: Fluorescent X-ray analysis is performed with respect to the sample such as liquid fuel or the like containing a measuring object component such as sulfur or the like and the background due to scattered X rays and a system peak is subtracted from the intensity of the fluorescent X rays of the measuring object component calculated from the spectrum acquired by the fluorescent X-ray analysis to perform the correction of the change in the intensity of fluorescent X rays caused by the composition of the sample with respect to the intensity of fluorescent X rays from which the background is subtracted. A calibration curve showing the relationship of the value after the correction is performed with respect to the intensity of fluorescent X rays, from which the background is subtracted, with the measuring object component is predetermined, and the concentration of the measuring object component in the sample is calculated on the basis of the calibration curve. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：即使当样品的组成不同时，提供一种能够使用荧光X射线分析来测量样品中的测量对象的浓度的浓度测量方法，并且提供x射线荧光光谱仪。解决方案：对于含有诸如硫等的测量对象部件的液体燃料等样品和由于散射的X射线引起的背景和从系统峰值减去系统峰值的样品进行荧光X射线分析由通过荧光X射线分析获得的光谱计算出的测量对象成分的荧光X射线的强度，以进行由样品组成导致的荧光X射线的强度相对于强度的校正从其中减去背景的荧光X射线。对于测定对象成分，相对于减去了背景的荧光X射线的强度，校正后的值的关系的校准曲线被预先确定，并且样本中的测量对象成分的浓度是基于校准曲线计算的。版权所有（C）2011，JPO＆INPIT

9. 发明专利

JP2004093511A X-ray analysis apparatus and computer program 有权
公开(公告)号：JP2004093511A
公开(公告)日：2004-03-25
申请号：JP2002258236
申请日：2002-09-03
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： OSAWA SUMUTO , KOMATANI SHINTARO , OHORI KENICHI
IPC分类号： G01N23/223 , G01N23/04
摘要： PROBLEM TO BE SOLVED: To provide an X-ray analysis apparatus and a computer program capable of performing phase separation including the interior of a sample.
SOLUTION: This X-ray analysis apparatus is provided with a sample stage 24 on which a sample 20 is placed; X-ray emitting means 12, 14 for irradiating the placed sample 20 with X-rays; a fluorescent X-ray detecting means 16 for detecting fluorescent X-rays generated by X-ray irradiation to the sample 20; a transmitted X-ray detecting means 22 for detecting transmitted X-rays transmitted through the sample 20; analysis means 40, 42 for analyzing the distribution of similar portions of the composition of the sample based on the detected fluorescent X-rays and transmitted X-rays; and a display means 44 for displaying the distribution of the similar portions of the composition of the sample 20.
COPYRIGHT: (C)2004,JPO

10. 发明专利

JP2003028815A X-ray analyzer and x-ray conduit used in the same 有权
标题翻译： X射线分析仪和X射线分析仪
公开(公告)号：JP2003028815A
公开(公告)日：2003-01-29
申请号：JP2001213928
申请日：2001-07-13
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： OSAWA SUMUTO , KOMATANI SHINTARO
IPC分类号： G01N23/223 , G01N23/02
摘要： PROBLEM TO BE SOLVED: To provide an X-ray analyzer which can quickly and correctly confirm an X-ray irradiation position or an irradiation area at a sample and can efficiently measure, and an X-ray conduit used in the same.
SOLUTION: In the X-ray analyzer which is constituted to irradiate X-rays (a) from an X-ray source 4 to the sample 2 by reducing X-rays, there are set between the X-ray source 4 and the sample 2, a visible light mirror 9 which passes the X-rays (a) and reflects a visible light e, and the X-ray conduit 10 where a visible light guide part 15 for passing the visible light e is formed to the periphery of an X-ray guide part 14 for guiding the X-rays (a). The irradiation position or the area of the X-rays (a) to the sample 2 can be confirmed on the basis of an optical image 24 of the sample obtained through the visible light guide part 15 and the visible light mirror 9 when the sample 2 is irradiated with a visible light d.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供一种可以快速且正确地确认样品的X射线照射位置或照射区域并能够有效测量的X射线分析仪，以及其中使用的X射线导管。解决方案：在通过X射线照射X射线（a）从X射线源4向样品2照射的X射线分析装置中，设置X射线源4和样本2之间，通过X射线（a）并反射可见光e的可见光反射镜9和X射线管10，其中可见光导向部分15用于使可见光e通过X的周边用于引导X射线（a）的射线引导部14。可以基于通过可见光导向部15获得的样品的光学图像24和可见光反射镜9来确认X射线（a）到样品2的照射位置或面积，用可见光d照射。

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