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    • 10. 发明专利
    • METHOD FOR PACKAGING OPTICAL FIBER ONTO SUBSTRATE
    • JPH0627333A
    • 1994-02-04
    • JP20304492
    • 1992-07-07
    • FURUKAWA ELECTRIC CO LTD
    • YAMAMOTO ICHIROAMANO TOSHIAKINISHIBASHI ATSUSHI
    • G02B6/00
    • PURPOSE:To package an optical fiber onto a substrate with the same assembly procedures as to assembling electric circuits with high reliability by fixing the optical fiber into the disposing groove formed on the substrate. CONSTITUTION:Only the optical fiber disposing part on the semiconductor substrate 1 consisting of Si is exposed and the V-groove 2 is formed by dry etching the exposed part. In succession, only the electric circuit parts, i.e., the shoulder parts of the V-groove are exposed and Al patterns 3 are formed by vapor deposition with an electron beam on the exposed parts. Ti layers 4 as barrier layers for preventing solder galling are formed thereon by the vapor deposition with the electron beam. Further, Pb and Sn are alternately formed in laminar layers thereon by the vapor deposition with the electron beam and thereafter, the substrate is heated to a prescribed temp. to form solder bumps 5. The optical fiber 7 formed with an coating layer 6 by electroless plating is then disposed in the V-groove 2 and a bonding tool 8 is pressed thereto from above and is heated, by which the optical fiber 7 is soldered an packaged onto the substrate 1.