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    • 1. 发明专利
    • Method for producing stamper of light transmission plate by half tone technique
    • 通过高音技术生产光传输板的保护器的方法
    • JP2005272912A
    • 2005-10-06
    • JP2004086349
    • 2004-03-24
    • ▲ぎょく▼徳科技股▲ふん▼有限公司Gyokutoku Kagi Kofun Yugenkoshi
    • CHEN IRENECHOU TIEN-YURI SHIKIO GENKOWU JO-WENYANG CHIH CHENHSU CHUAN-LUN
    • G02F1/13357C25D1/00G03F7/20
    • PROBLEM TO BE SOLVED: To provide a method for producing a stamper of a light transmission plate by a half tone technique.
      SOLUTION: The method includes steps where a substrate is coated with a photoresist film, an exposure developing stage is performed using a half tone mask, a part of the photoresist film is removed to form a plurality of photoresist patterns with each different height on the surface of the substrate, a flow stage is performed to make the photoresist patterns spherical and specular, the photoresist patterns are applied to form a metallic film with patterns in which the photoresist patterns are inverted at the lower surface on the substrate, the metallic film is removed from the substrate and the photoresist patterns, and a flattening stage is performed to flatten the upper surface of the metallic film, so as to be fitted to an insert mold.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 解决的问题:提供通过半色调技术制造透光板的压模的方法。 解决方案:该方法包括其中用光致抗蚀剂膜涂覆基板的步骤,使用半色调掩模进行曝光显影阶段,去除部分光致抗蚀剂膜以形成多个具有每个不同高度的光致抗蚀剂图案 在基板的表面上,进行流动台以使光致抗蚀剂图案呈球形和镜面,施加光致抗蚀剂图案以形成具有图案的金属膜,其中光致抗蚀剂图案在基板上的下表面处倒置,金属 从基板上除去膜,并且进行光致抗蚀剂图案,并且进行平坦化阶段以平坦化金属膜的上表面,以便嵌入到插入模具中。 版权所有(C)2006,JPO&NCIPI