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    • 10. 发明公开
    • PIEZOELECTRIC ELEMENT AND ACTUATOR
    • EP4346358A1
    • 2024-04-03
    • EP23192851.6
    • 2023-08-23
    • FUJIFILM Corporation
    • KOBAYASHI, HiroyukiNAKAMURA, SeigoSUGIMOTO, ShinyaSASAKI, Tsutomu
    • H10N30/00H10N30/853H10N30/50
    • A piezoelectric element includes a substrate; and a first electrode, a first piezoelectric film, a second electrode, a second piezoelectric film, and a third electrode which are provided on the substrate in this order, in which both the first piezoelectric film and the second piezoelectric film have spontaneous polarizations aligned in a film thickness direction and directions of the spontaneous polarizations are the same, and in a case where in a hysteresis curve of one piezoelectric film, a coercive voltage on a positive side is denoted by VcF + , a coercive voltage on a negative side is denoted by Vcf, an absolute value |Vcf + - Vcf - | of a difference between both coercive voltages is denoted by ΔVcf, and the larger of an absolute value of the coercive voltage Vcf + and an absolute value of the coercive voltage Vcf is denoted by Vcf, and in a hysteresis curve of the other piezoelectric film, a coercive voltage on a positive side is denoted by Vcr + , a coercive voltage on a negative side is denoted by Vcr - , an absolute value |Vcr + - Vcr - | of a difference between both coercive voltages is denoted by ΔVcr, and the larger of an absolute value of the coercive voltage Vcr + and an absolute value of the coercive voltage Vcr - is denoted by Vcr, ΔVcr