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1. 发明公开

EP4198476A1 STRAIN SENSOR AND STRAIN SENSOR ARRANGEMENT 无效
公开(公告)号：EP4198476A1
公开(公告)日：2023-06-21
申请号：EP21214671.6
申请日：2021-12-15
申请人： Sensirion AG
发明人： WINGER, Martin
IPC分类号： G01L1/16 , G01L5/167 , G01P15/09 , H01L41/08
摘要： A strain sensor, comprises a substrate (1) and a strain sensing layer (2) of polycrystalline piezoelectric material. The strain sensing layer (2) is supported by the substrate (1) and extends in a plane in parallel to a plane (x,y) of the substrate (1). The strain sensing layer (2) is arranged between a top electrode (3) and a bottom electrode (4), each extending in parallel to the plane (x,y) of the substrate (1). The strain sensing layer (2) has a thickness of equal to or less than 2 µm perpendicular to its plane extension and is linked with the substrate (1) to have strain (ST) in the plane (x,y) of the substrate (1) couple into the strain sensing layer (2) as in-plane strain (ST). The polycrystalline piezoelectric material of the strain sensing layer (2) is configured to convert the in-plane strain (ST) in the strain sensing layer (2) into an electric field (EF) perpendicular to the plane of the strain sensing layer (2), resulting in a difference of potential between the top electrode (3) and the bottom electrode (4) representing a strain signal.

2. 发明公开

EP4173022A1 MATERIAL DEPOSITION METHOD 审中-实审
公开(公告)号：EP4173022A1
公开(公告)日：2023-05-03
申请号：EP21735945.4
申请日：2021-06-25
申请人： Luxembourg Institute of Science and Technology (LIST)
发明人： GODARD, Nicolas , GLINSEK, Sebastjan , BLAZQUEZ MARTINEZ, Alfredo , DEFAY, Emmanuel
IPC分类号： H01L21/02 , H01L21/316 , H01L41/08 , H01L41/187 , H01L41/318 , H01L41/319 , C23C18/12

3. 发明授权

EP3926180B1 BEFESTIGUNGSANORDNUNG MIT EINEM BEFESTIGUNGSELEMENT MIT EINEM ELEKTROAKTIVEN POLYMERAKTUATOR 有权
公开(公告)号：EP3926180B1
公开(公告)日：2023-05-03
申请号：EP21176720.7
申请日：2021-05-28
发明人： Linde, Peter , Hegenbart, Matthias , Benthien, Hermann , Tölle, Lisa
IPC分类号： F16B5/00 , F16B1/04 , H01L41/09 , H01L41/08 , H01L41/193

4. 发明公开

EP4158699A1 THIN FILM ACTUATOR HAVING TRANSVERSELY ORIENTED STRUCTURAL STIFFENERS TO INCREASE ACTUATOR STROKE 审中-实审
公开(公告)号：EP4158699A1
公开(公告)日：2023-04-05
申请号：EP21724901.0
申请日：2021-04-21
申请人： Microsoft Technology Licensing, LLC
发明人： MUTIKAINEN, Risto Heikki , RIEKKINEN, Tommi , MATTILA, Marco , CHEKUROV, Nikolay
IPC分类号： H01L41/04 , H01L41/08

5. 发明公开

EP4068401A1 PIEZOELECTRIC DEVICE 有权
公开(公告)号：EP4068401A1
公开(公告)日：2022-10-05
申请号：EP22165157.3
申请日：2022-03-29
申请人： Seiko Epson Corporation
发明人： KOIKE, Harunobu , NAKAYAMA, Masao , SHIMIZU, Toshihiro , YAMAZAKI, Yasushi , TONOMURA, Osamu , SAWASAKI, Tatsuo , NISHI, Chihiro
IPC分类号： H01L41/08 , H01L41/09 , H01L41/187 , B41J2/14 , B41J2/16 , H01L41/318
摘要： A substrate having a recessed portion, a diaphragm (50), and a piezoelectric actuator (300) are provided, in which the substrate, the diaphragm (50), and the piezoelectric actuator (300) are laminated in this order in a first direction, the diaphragm (50) includes a first layer (51) containing silicon as a constituent element, a second layer (52) disposed between the first layer (51) and the piezoelectric actuator (300), and containing any one or both of at least one metal element selected from the group made of chromium, titanium, aluminum, tantalum, hafnium, and iridium, and silicon nitride, as a constituent element, and a third layer (53) disposed between the second layer (52) and the piezoelectric actuator (300) and containing zirconium as a constituent element, and a fourth layer (200) containing any one or both of at least one metal element selected from the group made of chromium, titanium, aluminum, tantalum, hafnium, and iridium, and silicon nitride, as a constituent element is provided on the third layer (53) on a piezoelectric actuator (300) side.

6. 发明公开

EP4045188A1 APPARATUS AND METHOD FOR REAL TIME MEASURING OF RHEOLOGICAL PROPERTIES OF A FLUID 审中-实审
公开(公告)号：EP4045188A1
公开(公告)日：2022-08-24
申请号：EP20877284.8
申请日：2020-10-16
申请人： Qatch Technologies
发明人： PARLAK, Zehra
IPC分类号： B01L3/00 , H01L41/08 , H01L41/083

7. 发明公开

EP3977526A2 OPTICAL ACTUATOR 审中-公开
公开(公告)号：EP3977526A2
公开(公告)日：2022-04-06
申请号：EP20747227.5
申请日：2020-06-03
申请人： Fischer, Gregory Scott , Carvalho, Paulo Alberto , Zhao, Zhanyue , Nycz, Christopher Julius
发明人： Fischer, Gregory Scott , Carvalho, Paulo Alberto , Zhao, Zhanyue , Nycz, Christopher Julius
IPC分类号： H01L41/04 , H01L41/08 , H01L41/187 , H02N2/02 , H02N2/10

8. 发明公开

EP3966539A1 SUBSTRATES COMPRISING NANOWIRES 有权
公开(公告)号：EP3966539A1
公开(公告)日：2022-03-16
申请号：EP20726523.2
申请日：2020-05-07
申请人： Wootzano Limited
发明人： SYED, Atif , MASTROPAOLO, Enrico , BECKWITH, Mark James
IPC分类号： G01L1/16 , G01L1/18 , G01L1/20 , G01L5/22 , B82Y15/00 , B82Y40/00 , G01N33/00 , B32B7/12 , B82Y30/00 , B32B27/12 , H01L41/08 , H01L41/113

9. 发明授权

EP3633088B1 ANTIBACTERIAL ELECTRIC-CHARGE GENERATION YARN, METHOD FOR MANUFACTURING ANTIBACTERIAL ELECTRIC-CHARGE GENERATION YARN, AND ANTIBACTERIAL CLOTH 有权
公开(公告)号：EP3633088B1
公开(公告)日：2022-03-16
申请号：EP18809090.6
申请日：2018-05-23
发明人： KANEMATSU, Shunsuke , TODO, Ryo , ONO, Yuhei , YAMAMOTO, Tomoyoshi , ANDO, Masamichi , ISHINO, Satoshi
IPC分类号： D02G3/02 , D02G3/26 , D02G3/44 , A41D31/30 , H01L41/08

10. 发明授权

EP3413464B1 COMPOSITE SUBSTRATE AND METHOD FOR PRODUCING COMPOSITE SUBSTRATE 有权
公开(公告)号：EP3413464B1
公开(公告)日：2021-11-17
申请号：EP17747144.8
申请日：2017-01-06
发明人： AKIYAMA Shoji , TANNO Masayuki
IPC分类号： H03H9/02 , H03H3/08 , H03H9/25 , H01L41/312 , H01L41/08

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