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1. 发明授权

EP1814136B1 Pompage ionique d'un écran plat à micropointes 失效
标题翻译：离子泵与微粒平面屏幕的
公开(公告)号：EP1814136B1
公开(公告)日：2010-10-06
申请号：EP07102656.1
申请日：1998-06-26
申请人： Canon Kabushiki Kaisha
发明人： Mougin, Stéphane , Rivière-Cazaux, Lionel
IPC分类号： H01J41/18 , H01J29/94 , H01J7/16 , H01J9/39
CPC分类号： H01J41/18 , H01J7/16 , H01J9/39 , H01J29/94

2. 发明公开

EP3859765A1 SYSTEM AND METHOD FOR ENHANCED ION PUMP LIFESPAN 审中-公开
公开(公告)号：EP3859765A1
公开(公告)日：2021-08-04
申请号：EP21165387.8
申请日：2016-02-09
申请人： Hamilton Sundstrand Corporation
发明人： GARDNER, Ben D. , BURCHFIELD, David E.
IPC分类号： H01J41/18
摘要： Within an ion pump, accelerated ions leave the center portion of an anode tube (200; 300; 400; 500; 600; 610) due to the anode tube symmetry and the generally symmetrical electric fields present. The apparent symmetry within the anode tube (200 ... 610) may be altered by making the anode tube longitudinally segmented and applying independent voltages to each segment. The voltages on two adjacent segments may be time varying at different rates to achieve a rasterizing process. In various embodiments, one or more wire internal to the anode structure and having a time-varying electric potential may alter the trajectory of the ions leaving the anode tube (200 ... 610), as may the shape of the anode near the ends of the anode tube (200 ... 610).

3. 发明公开

EP3163599A1 LAMINATED ULTRA-HIGH VACUUM FORMING DEVICE 有权转让
标题翻译： LAMINIERTE ULTRAHOHE VAKUUMFORMVORICHHTUNG
公开(公告)号：EP3163599A1
公开(公告)日：2017-05-03
申请号：EP15814570
申请日：2015-04-21
申请人： NAT INST OF INFORMATION AND COMMUNICATION TECH
发明人： TANAKA SHUKICHI
IPC分类号： H01J41/18 , H01J41/20
CPC分类号： H01J41/12 , H01J41/18 , H01J41/20
摘要： Provided is an ultra-high vacuum forming device containing an ion pump having a compact size in the central axis direction. The ultra-high vacuum forming device (1) is provided with at least one ion pump (100). The ion pump (100) is provided with: a casing (110) having at least one opening (111, 112); a board-shaped electrode group (120) formed by means of a central opening (120a) being formed along a predetermined central axis (C) disposed within the casing (110), and a plurality of electrodes (121) being joined with spaces therebetween; a pair of board-shaped electrodes (131, 132) having a different polarity than that of the electrode group (120) and that are disposed at positions sandwiching both sides of the electrode group (120) within the casing (110); and a pair of board-shaped magnets (141, 142) disposed at positions sandwiching both sides of the pair of board-shaped electrodes (131, 132).
摘要翻译：本发明提供一种超高真空成型装置，该超高真空成型装置在中心轴方向上具有紧凑的尺寸的离子泵。超高真空成型装置（1）设有至少一个离子泵（100）。离子泵（100）具有：壳体（110），其具有至少一个开口（111,112）;壳体通过沿着布置在壳体（110）内的预定中心轴线（C）形成的中央开口（120a）形成的板状电极组（120）和多个电极（121），所述多个电极 ; 一对板状电极，其极性与所述电极组的极性不同，并设置在所述电极组的两侧夹持在所述壳体内的位置; 以及一对板状磁体（141,142），所述一对板状磁体设置在夹着所述一对板状电极（131,132）的两侧的位置处。

4. 发明公开

EP3057121A1 SYSTEM AND METHOD FOR ENHANCED ION PUMP LIFESPAN 有权转让
标题翻译：系统VERFAHRENFÜRVERBESSERTE IONENPUMPENLEBENSDAUER
公开(公告)号：EP3057121A1
公开(公告)日：2016-08-17
申请号：EP16154860.7
申请日：2016-02-09
申请人： Hamilton Sundstrand Corporation
发明人： GARDNER, Ben D. , BURCHFIELD, David E.
IPC分类号： H01J41/18
CPC分类号： H01J41/12 , H01J41/18
摘要： Within an ion pump, accelerated ions leave the center portion of an anode tube (200; 300; 400; 500; 600; 610) due to the anode tube symmetry and the generally symmetrical electric fields present. The apparent symmetry within the anode tube (200 ... 610) may be altered by making the anode tube longitudinally segmented and applying independent voltages to each segment. The voltages on two adjacent segments may be time varying at different rates to achieve a rasterizing process. In various embodiments, one or more wire internal to the anode structure and having a time-varying electric potential may alter the trajectory of the ions leaving the anode tube (200 ... 610), as may the shape of the anode near the ends of the anode tube (200 ... 610).
摘要翻译：在离子泵内，加速离子离开阳极管的中心部分（200; 300; 400; 500; 600; 610），这是由于阳极管的对称性和大致对称的电场存在。阳极管（200 ... 610）中的表观对称性可以通过使阳极管纵向分割并且对每个段施加独立电压而改变。两个相邻段上的电压可以以不同的速率随时间变化以实现光栅化处理。在各种实施例中，阳极结构内部并且具有时变电位的一个或多个导线可以改变离开阳极管（200 ... 610）的离子的轨迹，如靠近端部的阳极形状的阳极管（200 ... 610）。

5. 发明公开

EP2911182A1 Thin film edge field emitter based micro ion pump 审中-公开
标题翻译： Mikroionenpumpe basierend auf einemDünnschichtkantenfeldsender
公开(公告)号：EP2911182A1
公开(公告)日：2015-08-26
申请号：EP15154765.0
申请日：2015-02-11
申请人： Honeywell International Inc.
发明人： Tin, Steven
IPC分类号： H01J41/18 , H01J41/20
CPC分类号： F04B37/14 , F04B19/006 , F04B35/04 , H01J41/18 , H01J41/20 , H05K13/0023 , Y10T29/49117
摘要： A micro-ion pump is provided. The micro-ion pump includes a plurality of thin-film-edge field emitters, a first gate electrode, a second gate electrode, and a high voltage anode. The plurality of thin-film-edge field emitters is in a first X-Z plane. The plurality of thin-film-edge field emitters has a respective plurality of end faces with a high aspect ratio in at least one Y-Z plane. The first gate electrode is in a second X-Z plane offset from the first X-Z plane. The second gate electrode is positioned in a third X-Z plane offset from the first X-Z plane. The high voltage anode is in a fourth X-Z plane offset from the plurality of thin-film-edge field emitters in the first X-Z plane. The second gate electrode is between the high voltage anode and the plurality of thin-film-edge field emitters.
摘要翻译：提供微型离子泵。微型离子泵包括多个薄膜边缘场致发射体，第一栅电极，第二栅电极和高压阳极。多个薄膜边缘场发射器处于第一X-Z平面。多个薄膜边缘场致发射体具有在至少一个Y-Z平面中具有高纵横比的相应多个端面。第一栅电极处于与第一X-Z平面偏移的第二X-Z平面。第二栅电极位于从第一X-Z平面偏移的第三X-Z平面中。高压阳极处于与第一X-Z平面中的多个薄膜边缘场致发射体偏移的第四X-Z平面。第二栅电极位于高压阳极和多个薄膜边缘场发射器之间。

6. 发明公开

EP0893817A1 Pompage ionique d'un écran plat à micropointes 失效
标题翻译： Ionenpumpen eines flachen Mikrospitzen-Schirms
公开(公告)号：EP0893817A1
公开(公告)日：1999-01-27
申请号：EP98410073.5
申请日：1998-06-26
申请人： Pixtech S.A.
发明人： Mougin, Stéphane , Rivière-Cazaux, Lionel
IPC分类号： H01J41/18 , H01J29/94 , H01J31/12
CPC分类号： H01J41/18 , H01J7/16 , H01J9/39 , H01J29/94
摘要： L'invention concerne un écran plat à micropointes comportant une cathode (1) pourvue de zones actives de micropointes (2) d'émission électronique ; une anode (5) cathodoluminescente pourvue, au moins en regard desdites zones actives de micropointes, de zones actives d'éléments luminophores (16) ; une grille principale (3) d'extraction d'électrons émis par les micropointes actives (2) en direction des éléments luminophores (16) ; et, côté cathode (1), au moins une zone sacrificielle de micropointes (2') propre à être adressée, hors de périodes de fonctionnement de l'écran et indépendamment desdites zones actives.
摘要翻译：屏幕包括具有电子发射点（2）的阴极（1）和具有与发射点对应的孔（4）的光栅（3）。阴极与玻璃基板（6）上的光发光表面的阳极相对放置。发射点沿着以列组织的导体（7）沉积。光栅具有垂直于列方向的行。在光栅和阴极之间提供绝缘层。在阳极和阴极之间设置有由间隔物隔开的抽真空空间（11）。电子电路（12）控制阴极和阳极，

7. 发明公开

EP4357860A1 PLASMA SOURCE, AND ATOMIC CLOCK EMPLOYING SAID PLASMA SOURCE 审中-实审
公开(公告)号：EP4357860A1
公开(公告)日：2024-04-24
申请号：EP22824599.9
申请日：2022-03-24
申请人： National Institute of Advanced Industrial Science and Technology
发明人： KURASHIMA, Yuuichi , MOTOMURA, Taisei , YANAGIMACHI, Shinya , TAKAGI, Hideki , HIGURASHI, Eiji , MATSUMAE, Takashi
IPC分类号： G04F5/14 , H01J41/18 , H05H1/24
CPC分类号： H01J41/18 , H05H1/24 , G04F5/14
摘要： A small plasma source that enables highly efficient discharge in an ultra-high vacuum state includes a first magnet, a second magnet arranged so that a second magnetic pole faces the first magnetic pole of the first magnet, a third magnet having the second magnetic pole directed in the same direction as the first magnetic pole of the first magnet and arranged to surround the first magnet, a fourth magnet having the first magnetic pole different from the second magnetic pole facing the second magnetic pole of the third magnet and arranged to surround the second magnet, a first electrode provided on sides of the first magnetic pole of the first magnet and the second magnetic pole of the third magnet, a second electrode facing the first electrode and provided on sides of the second magnetic pole of the second magnet and the first magnetic pole of the fourth magnet, and a third electrode arranged between the first electrode and the second electrode. A value obtained by dividing a shorter distance between a distance between the first magnet and the second magnet and a distance between the third magnet and the fourth magnet by an average value of thicknesses of the first to fourth magnets is 1 or more and 10 or less.

8. 发明授权

EP3057121B1 SYSTEM AND METHOD FOR ENHANCED ION PUMP LIFESPAN 有权转让
公开(公告)号：EP3057121B1
公开(公告)日：2021-04-28
申请号：EP16154860.7
申请日：2016-02-09
发明人： GARDNER, Ben D. , BURCHFIELD, David E.
IPC分类号： H01J41/18

9. 发明授权

EP3163599B1 LAMINATED ULTRA-HIGH VACUUM FORMING DEVICE 有权转让
公开(公告)号：EP3163599B1
公开(公告)日：2020-12-09
申请号：EP15814570.6
申请日：2015-04-21
申请人： National Institute of Information and Communications Technology
发明人： TANAKA, Shukichi
IPC分类号： H01J41/18 , H01J41/20 , H01J41/12

10. 发明公开

EP3163599A4 LAMINATED ULTRA-HIGH VACUUM FORMING DEVICE 有权转让
公开(公告)号：EP3163599A4
公开(公告)日：2018-02-21
申请号：EP15814570
申请日：2015-04-21
申请人： NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATION TECH
发明人： TANAKA SHUKICHI
IPC分类号： H01J41/18 , H01J41/12 , H01J41/20
CPC分类号： H01J41/12 , H01J41/18 , H01J41/20
摘要： Provided is an ultra-high vacuum forming device containing an ion pump having a compact size in the central axis direction. The ultra-high vacuum forming device (1) is provided with at least one ion pump (100). The ion pump (100) is provided with: a casing (110) having at least one opening (111, 112); a board-shaped electrode group (120) formed by means of a central opening (120a) being formed along a predetermined central axis (C) disposed within the casing (110), and a plurality of electrodes (121) being joined with spaces therebetween; a pair of board-shaped electrodes (131, 132) having a different polarity than that of the electrode group (120) and that are disposed at positions sandwiching both sides of the electrode group (120) within the casing (110); and a pair of board-shaped magnets (141, 142) disposed at positions sandwiching both sides of the pair of board-shaped electrodes (131, 132).

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