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    • 9. 发明公开
    • Cleaning apparatus, measurement method and calibration method
    • Kalibrationsverfahren
    • EP2589951A1
    • 2013-05-08
    • EP12180106.2
    • 2012-08-10
    • Siltronic AG
    • Haibara, TeruoMori, YoshihiroKubo, EtsukoUchibe, Masashi
    • G01N21/27G01N21/70G01N21/71B08B3/12G01H9/00G01N29/24
    • G01N21/274G01N21/70G01N21/71G01N29/2418G01N2021/8416
    • Subject: To provide a cleaning apparatus capable of cleaning substrates effectively and stably, a method for calibrating a device for measuring the concentration of a dissolved gas used in the cleaning apparatus, and a measurement method for measuring the concentration of a dissolved gas.
      Solving Means: A calibration method according to this invention is a calibration method for calibrating a measurement device for measuring a concentration of a gas dissolved in a liquid. In the calibration method, a step (S10) of varying the concentration of the gas dissolved in the liquid, and predetermining, as a reference concentration, a concentration of the gas at which an intensity of luminescence produced when the liquid is irradiated with ultrasonic waves shows a peak, is conducted. Next, a step (S20) of measuring a concentration of the gas in the liquid with the measurement device to be calibrated when the intensity of the luminescence shows a peak by irradiating the liquid with ultrasonic waves while varying the concentration of the gas in the liquid, to determine a measured value of the concentration of the gas, is conducted. A step (S30) of calibrating the measurement device to be calibrated based on the measured value and the reference concentration is conducted.
    • 题目:提供能够有效且稳定地清洗基板的清洗装置,用于校准用于测量清洁装置中使用的溶解气体的浓度的装置的方法和测量溶解气体的浓度的测量方法。 解决方法:根据本发明的校准方法是用于校准用于测量溶解在液体中的气体的浓度的测量装置的校准方法。 在校准方法中,改变溶解在液体中的气体的浓度的步骤(S10),并且预先确定当用超声波照射液体时产生的发光强度作为参考浓度的浓度 显示峰值,进行。 接下来,在通过用超声波照射液体而发光的强度显示出峰值的同时,改变液体中的气体浓度的同时,测量待校准的测量装置的液体中的气体浓度的步骤(S20) ,以确定气体浓度的测量值。 进行基于测量值和参考浓度来校准要校准的测量装置的步骤(S30)。