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    • 1. 发明公开
    • METHOD FOR PRODUCING ELECTRONIC DEVICE
    • EP4350742A1
    • 2024-04-10
    • EP22811405.4
    • 2022-05-27
    • Mitsui Chemicals Tohcello, Inc.
    • YASUI, HirotoKURIHARA, HiroyoshiKINOSHITA, Jin
    • H01L21/301C09J7/38
    • A method for manufacturing an electronic device, the method at least including a step (A) of preparing a structure which includes a wafer including a circuit forming surface, and an adhesive film bonded to the circuit forming surface side of the wafer, a step (B) of back-grinding a surface of the wafer on a side opposite to the circuit forming surface side; and a step (C) of removing the adhesive film from the wafer after the adhesive film is irradiated with an ultraviolet ray. Here, the adhesive film includes a base material layer, and an ultraviolet curable adhesive resin layer provided on one surface side of the base material layer using an ultraviolet curable adhesive resin material. In addition, a loss tangent tanδ at -5°C of a cured film of the ultraviolet curable adhesive resin material, which is measured as described in the following [Procedure], is 0.25 to 0.85. [Pressure] (i) A film having a film thickness of 0.2 mm is formed using the ultraviolet curable adhesive resin material, the film is irradiated with an ultraviolet ray having a main wavelength of 365 nm at an irradiation intensity of 100 W/cm 2 with an ultraviolet ray amount of 1080 mJ/cm 2 using a high-pressure mercury lamp in an environment at 25°C for ultraviolet curing, and a cured film is obtained. (ii) A dynamic viscoelasticity of the cured film is measured at a frequency of 1 Hz and a temperature of -50°C to 200°C in a tensile mode.