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    • 6. 发明公开
    • OXIME DERIVATIVES AND THE USE THEREOF AS LATENT ACIDS
    • OREIMDERIVATE UND IHRE VERWENDUNG ALS LATENTESAÜRE
    • EP1320785A2
    • 2003-06-25
    • EP01985295.3
    • 2001-09-18
    • Ciba Specialty Chemicals Holding Inc.
    • YAMATO, HitoshiASAKURA, TOSHIKAGEMATSUMOTO, AkiraOHWA, Masaki
    • G03F7/004G03F7/038G03F7/039C07C309/63
    • G03F7/0392B33Y70/00G03F7/0045G03F7/0382
    • New oxime sulfonate compounds of formula (I, II, III, IV, V, VI and VII) wherein R1 is for example C1-C18 alkylsulfonyl, R2 is halogen or C1-C10 haloalkyl; R3 is for example unsubstituted or substituted phenylenedisulfonyl, diphenylenedisulfonyl, or oxydiphenylenedisulfonyl; Ar1 is for example a direct bond, C1-C12 alkylene; -O-C-bond or a O-Si-bond which cleaves upon the action of an acid; A1, A2, A3, A4, A5, A6, A7, A8, A9, A10, A11 and A12 are for example a direct bond, -O-, or S-, or are C1-C12 alkylene or phenylene unsubstituted or substituted; Y1 is C1-C12 alkylene which is for example subsituted by OR4, or SR7; Y2 is e.g. a trivalent radical of C1-C12 alkylene; Y3 is e.g. a tetravalent radical of C1-C12 alkylene; X is halogen; Ar'1 is for example C1-C12 alkyl which is unsubstituted or substituted; Ar'1 is for example phenylene; provided that at least one of the radicals Ar'1, Ar'1, is substituted by 1 to 3 groups of (VIII), (IX), (X), (XI), (XII) and/or (XIII); M+ is e.g. (XIV); L- is for example halogen; R¿15?, R16, R17 and R18 are e.g. hydrogen or phenyl; R19, R20, R21, R22 and R23 are e.g. phenyl; are especially suitable for the preparation of photoresists.
    • 式I,II,III,IV,V,VI和VII R 1的新的肟磺酸酯化合物是例如C 1 -C 18 >烷基磺酰基,R 2是卤素或C 1 -C 10卤代烷基; R 3是例如未取代的苯基二磺酰基,二苯基二磺酰基或氧基二苯基二磺酰基; Ar 1是例如直接键合的C 1 -C 12亚烷基; -O-C键或在酸的作用下切割的-O-Si键; A 1,N 2,A 3,A 4,A 5, A 6,A 7,A 8,A 9,A 10, A 11和A 12是例如直接键,-O-或-S-,或者是C 1 -C 3 > 12个亚烷基或亚苯基未取代或取代; Y 1是例如被OR 4取代的C 1 -C 12亚烷基或SR 7 ; Y 2是例如。 C 1 -C 12亚烷基的三价基团; Y 3是例如。 C 1 -C 12亚烷基的四价基团; X是卤素; Ar 1'是例如未取代或取代的C 1 -C 12烷基; Ar“1”是例如亚苯基; 条件是基团Ar 1',Ar“1'中的至少一个被1至3个例如卤素取代; R 15,R 16,R 17和R 18,例如, 氢或苯基; R 19,R 20,R 21,R 22,R 23和R 23分别为例如, 苯基; 特别适用于光刻胶的制备。