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    • 1. 发明公开
    • METHOD FOR PRODUCING ORGANIC ACID ESTER-BASED LIQUID, AND METHOD FOR PRODUCING RESIST SOLVENT FOR MANUFACTURING ELECTRONIC COMPONENTS OR RINSE AGENT FOR MANUFACTURING ELECTRONIC COMPONENTS
    • 生产基于有机酸酯的液体的方法,以及生产用于制造电子元件或用于制造电子元件的冲洗剂的抗蚀剂溶剂的方法
    • EP3321735A1
    • 2018-05-16
    • EP16824257.6
    • 2016-06-28
    • Musashino Chemical Laboratory, Ltd.
    • TSUKIDA MasakazuTAKADA Hitoshi
    • G03F7/004B01J31/08B01J35/10G03F7/32H01L21/027
    • B01J31/08B01J35/10G03F7/004G03F7/32H01L21/027
    • Objects are to provide a method for manufacturing electronic parts precisely with less defective products and with good yield, and to provide a method which can provide more excellent resist liquid and rinsing liquid, particularly in each step of manufacturing electronic parts using a liquid, and the above objects have been solved by a process for producing an organic acid ester-type liquid which is a process for removing an organic peroxide contained in an organic acid ester-type liquid which is a solvent of the resist for producing electronic parts or an organic acid ester-type liquid which is a rinsing liquid for producing electronic parts, which comprises contacting the organic acid ester-type liquid with a platinum group metal catalyst to remove the organic peroxide in the organic acid ester-type liquid, and a resist solvent for producing electronic parts or a rinsing liquid for producing electronic parts which comprises an organic acid ester-type liquid in which an organic peroxide contained therein has been removed by using the producing process and a peroxide value (POV) thereof is 2 mmoL/kg or less.
    • 本发明的目的在于提供一种精密地制造电子部件的方法,其缺陷产品少且成品率良好,并且提供一种能够提供更优异的抗蚀剂液体和冲洗液体的方法,特别是在使用液体制造电子部件的每个步骤中, 上述目的已经通过用于生产有机酸酯型液体的方法来解决,所述有机酸酯型液体是用于除去作为用于制造电子部件或有机酸的抗蚀剂的溶剂的有机酸酯型液体中包含的有机过氧化物的方法 作为用于生产电子部件的冲洗液的酯型液体,其包括使有机酸酯型液体与铂族金属催化剂接触以除去有机酸酯型液体中的有机过氧化物,以及用于生产抗蚀剂溶剂 电子部件或用于生产电子部件的冲洗液,其包含其中有机过氧化物的有机酸酯型液体 通过使用该生产过程已经去除了其中的过氧化值(POV)为2mmoL / kg或更小。