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    • 6. 发明公开
    • Method for making stable nitride-defined Schottky barrier diodes
    • Verfahren zur Herstellung stableer,eine Nitridschicht enthaltender Schottkydioden。
    • EP0036500A1
    • 1981-09-30
    • EP81101368.9
    • 1981-02-25
    • International Business Machines Corporation
    • Anantha, Narasipur GundappaBhatia, Harsaran Singh
    • H01L21/60H01L21/31H01L29/48H01L29/91
    • H01L29/66143H01L21/0337H01L29/872
    • Excessive leakage after initial forward stress, exhibited by subsequently reverse stressed nitride defined, Schottky barrier diodes is solved by the elimination of the «mouse hole» or undercut cavity in the oxide layer (3) beneath the nitride ring (4) defining the Schottky contact to the underlying silicon. The aforementioned cavity is filled by depositing chemical vapor deposited (CVD) oxide (7) onto the nitride layer (4), into the nitride ring (4) and the undercut oxide cavity beneath the ring (4) and onto the underlying silicon substrate (1) exposed through the nitride ring (4). The CVD oxide (7) is then reactively ion etched to remove it except along the vertical walls of the nitride ring (4) and the oxide cavity. The Schottky metal (9) is deposited on the silicon substrate (1) exposed by the reactive ion etching step.
    • 初始正应力之后的过度泄漏,通过随后的反向应力氮化物限定的肖特基势垒二极管表现出,通过消除氮化物环(4)下面的限定氧化物层(4)的氧化物层(3)中的“小孔”或底切腔 肖特基接触到底层硅。 通过将化学气相沉积(CVD)氧化物(7)沉积到氮化物层(4)上,在环(4)下方的氮化物环(4)和底切氧化物空腔中沉积到下面的硅衬底( 1)通过氮化物环(4)暴露。 然后将CVD氧化物(7)反应离子蚀刻除去,除了沿着氮化物环(4)和氧化物空腔的垂直壁。 肖特基金属(9)沉积在通过反应离子蚀刻步骤暴露的硅衬底(1)上。