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    • 4. 发明公开
    • VACUUM PUMP
    • 真空泵
    • EP2715138A1
    • 2014-04-09
    • EP12791988.4
    • 2012-05-29
    • Ebara Corporation
    • KUDARA, SoichiNAGAYAMA, Masami
    • F04C25/02F04C18/18F04C23/00
    • F04C25/02F04C18/126F04C23/001F04C29/04F04C2220/30F04C2240/30F04C2280/02
    • A vacuum pump (10) has a pump casing (54) including pump chambers (50a-50f) held in fluid communication with each other and arrayed in a longitudinal direction thereof, an inlet port (52a) and an outlet port (52b), a rotational shaft (58) rotatably supported at opposite ends thereof and extending in the longitudinal direction of the pump casing (54), and rotors (60a-60f) housed in the pump chambers (50a-50f) and coupled to the rotational shaft (58). The pump casing (54) includes a first thermally conductive member (72) extending parallel to the rotational shafts (58) substantially the full length of the pump casing (54) in the longitudinal direction thereof, and a second thermally conductive member (74) positioned near an end of the first thermally conductive member (72) at the outlet port (52b) and extending in a transverse direction of the pump casing (54).
    • 真空泵10具有泵壳体54,入口端口52a和出口端口52b,该泵壳体54包括相互保持流体连通且沿其纵向排列的泵室50a-50f, 一个可旋转地支承在其相对两端并沿泵壳体纵向延伸的旋转轴;以及容纳在泵室中并与旋转轴连接的转子, 58)。 所述泵壳体(54)包括在所述泵壳体(54)的纵向方向上基本上整个长度地平行于所述转轴(58)延伸的第一导热构件(72),以及第二导热构件(74) ,其位于所述出口端口(52b)处的所述第一导热构件(72)的端部附近并且在所述泵壳体(54)的横向方向上延伸。