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    • 9. 发明公开
    • COVER-CARRYING THIN SHEET STORAGE CONTAINER
    • DUNNWANDIGERLAGERUNGSBEHÄLTERAUSGERÜSTETMIT EINEM DECKEL
    • EP0972716A1
    • 2000-01-19
    • EP97926240.9
    • 1997-06-13
    • KAKIZAKI MANUFACTURING CO., LTD.
    • HYOBU, Yukihiro, Kakizaki Manufacturing Co., Ltd
    • B65D43/02B65D55/02B65D85/38B65D85/90H01L21/68
    • H01L21/67373H01L21/67376
    • The present invention provides a lid-mounted thin-plate housing container 1 having a container body 2 for housing and supporting a plurality of silicon wafers 4, and a lid 3 detachably mounted to the container body 2 for sealing the interior thereof. There is provided a magnetic force operating unit 11 for operating magnetic force generated between the container body 2 and the lid 3. The magnetic force operating unit 11 includes magnets 8 and 22 at positions which lie in the container body 2 and the lid and correspond to each other, and driving means 23 for moving the magnet 22. When the magnet 22 is aligned with the magnet 8 by the driving means, the magnets 22 and 8 attract each other to secure the lid 3 to the container body 2. When the magnet 22 is displaced from the magnet 8, the lid 3 having been secured is released, so that the lid 3 can be easily removed. In the lid 3, there is provided a seal 14 having a tongue portion 14A. The tongue portion 14A reliably seals the interior without raising the internal pressure. The magnets may be replaced by a coil 52 and a magnetic member.
    • 本发明提供一种具有容纳主体2的容器主体2的盖安装薄板容纳容器1,该容器主体2用于容纳和支撑多个硅晶片4,以及可拆卸地安装到容器主体2上用于密封其内部的盖3。 设置有用于操作在容器主体2和盖3之间产生的磁力的磁力操作单元11.磁力操作单元11在位于容器主体2和盖子中的位置处包括磁体8和22,并且对应于 以及用于移动磁体22的驱动装置23.当磁体22通过驱动装置与磁体8对准时,磁体22和8相互吸引,将盖3固定在容器本体2上。当磁体 22从磁体8移位,已经固定的盖3被释放,从而可以容易地移除盖3。 在盖3中,设置有具有舌部14A的密封件14。 舌部14A在不升高内压的情况下可靠地密封内部。 磁体可以由线圈52和磁性构件代替。