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    • 3. 发明公开
    • SURFACE-EMITTING LASER AND METHOD FOR MANUFACTURING THE SAME
    • VERFAHREN ZU SEINER HERSTELLUNG的OBERFLÄCHENEMITTIERENDER激光
    • EP2104192A1
    • 2009-09-23
    • EP07850824.9
    • 2007-12-18
    • International Business Machines Corporation
    • NAKAGAWA, Shigeru
    • H01S5/183
    • H01S5/1833B82Y20/00H01S5/18311H01S5/18316H01S5/18347H01S5/18363H01S5/2081H01S5/3432H01S2301/163
    • Disclosed is a surface emitting laser including a lower Bragg reflector, a resonator and an upper Bragg reflector. The lower Bragg reflector is provided on top of a semiconductor substrate, and includes a plurality of semiconductor layers. The resonator is provided on top of the lower Bragg reflector and includes an active layer, a lower semiconductor layer and an upper semiconductor layer. The lower semiconductor layer is provided under the active layer, and includes a first insulating layer having an aperture. The upper semiconductor layer is provided on top of the active layer, and includes a second insulating layer having an aperture. The upper Bragg reflector is provided on top of the resonator, and includes a plurality of semiconductor layers. In this surface emitting laser, the uppermost layer among the plurality of semiconductor layers in the lower Bragg reflector forms an air gap, which is larger than the aperture of the first insulating layer, while the lowermost layer among the plurality of semiconductor layers in the upper Bragg reflector forms an air gap, which is larger than the aperture of the second insulating layer.
    • 公开了一种包括下布拉格反射器,谐振器和上布拉格反射器的表面发射激光器。 下部布拉格反射器设置在半导体衬底的顶部,并且包括多个半导体层。 谐振器设置在下布拉格反射器的顶部,并且包括有源层,下半导体层和上半导体层。 下半导体层设置在有源层下方,并且包括具有孔径的第一绝缘层。 上半导体层设置在有源层的顶部,并且包括具有孔径的第二绝缘层。 上布拉格反射器设置在谐振器的顶部,并且包括多个半导体层。 在该表面发射激光器中,下布拉格反射器中的多个半导体层中的最上层形成比第一绝缘层的孔径大的气隙,而上部的多个半导体层中的最下层 布拉格反射器形成比第二绝缘层的孔径大的气隙。
    • 8. 发明公开
    • LASER WITH A SELECTIVELY CHANGED CURRENT CONFINING LAYER
    • 具有选择性改变的电流限制层的激光器
    • EP0985255A1
    • 2000-03-15
    • EP98911465.7
    • 1998-03-04
    • HONEYWELL INC.
    • GUENTER, James, K.JOHNSON, Ralph, H.
    • H01S3/085
    • H01S5/1833H01S5/0425H01S5/18311H01S5/2081
    • A laser structure is provided with two current confining layers of a material that is subject to oxidation in the presence of an oxidizing agent. The laser structure is shaped to expose edges of the current confining layers to permit the edges to be exposed to the oxidizing agent. The current confining layers are oxidized selectively to create electrically resistive material at the oxidized portions (100, 104) and electrically conductive material at the unoxidized portions (101, 105). The unoxidized portions (101, 105) of the layers are surrounded by the oxidized and electrically resistive portions in order to direct current from one electrical contact pad (14, 26) by passing through a preselected portion of an active region (20) of the laser. The laser structure can be a vertical cavity surface emitting laser. The device achieves the current confining and directing function without the need to use ion bombardment or implantation to provide the current confining structure within the body of the laser.
    • 激光器结构具有两个电流限制层,该两个电流限制层在氧化剂存在下经受氧化。 激光器结构被成形为暴露电流限制层的边缘以允许边缘暴露于氧化剂。 电流限制层被选择性地氧化以在氧化部分(100,104)产生电阻材料并在未氧化部分(101,105)产生导电材料。 这些层的未氧化部分(101,105)被氧化和电阻部分包围,以便通过穿过该电极的有源区(20)的预选部分而从一个电接触垫(14,26) 激光。 激光器结构可以是垂直腔表面发射激光器。 该装置不需要使用离子轰击或注入来提供激光器本体内的电流限制结构,就实现了电流限制和导向功能。