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    • 8. 发明公开
    • OPTO-ELECTRO-MECHANICAL DEVICE OR FILTER, PROCESS FOR MAKING, AND SENSORS MADE THEREFROM
    • OPTO机电设备或过滤器,方法及其在传感器应用
    • EP0702802A1
    • 1996-03-27
    • EP94917480.0
    • 1994-05-25
    • HONEYWELL INC.
    • GUCKEL, HenryZOOK, James, D.BURNS, David, W.
    • G01D21G01J1G01J5G01K7G01K11G01L9G01P15G02B26H01L31
    • H01L31/00G01J5/44G01L9/002G01P15/093G01P15/097G01P2015/0828G02B26/001G02B26/0833
    • This invention relates to devices and their applications which employ a resonant semiconductor member whose vibratory motion is coupled to the radiant energy cast onto a photovoltaic energy conversion device. It also relates to such devices whose vibratory behaviour is otherwise affected and which affect can be read optically. Optical methods are used to drive the microbeam, sense the microbeam vibrations and, if certain conditions are met, produce self-oscillation with no intervening electro-optical components, thus eliminating the need for piezoresistors, drive electrodes, electrical contacts and any metallurgy for electrical interconnection. A resonant microstructure member of one electrical type (p or n) is formed over a wafer, this member extending substantially or fully over a cavity or other space in the wafer. At a location in a wall or floor of the cavity is a region of opposite type (p or n) material. The interface between the two types is a p-n junction and is the best known form of a photovoltaic structure. The flexible member and the opposite type region should be substantially in the path of the driving radiant energy. The devices of this invention act as opto-electro-mechanically coupled photodiodes-causing the flexible member to be attracted electrostatically to the opposite type region by the incident driving light. The close proximity of the flexible member to the substrate or to an integrated cover or top cap forms a Fabry-Perot interferometer capable of producing large intensity modulations of the reflected light with small displacements of the member. A preferred form would have the vibratory member located within an evacuated capsule. The top cap would seal the member off on one side, and the wafer on which it was mounted or formed would seal the other. Applications as pressure sensor, accelerometer, acoustic ranger apparatus and temperature sensitive apparatus.
    • 9. 发明公开
    • LAMINATED HETEROSTRUCTURE DEVICE, APPARATUS COMPRISING THE SAME, AND METHOD OF OPERATING A LAMINATED HETEROSTRUCTURE DEVICE
    • EP3407121A1
    • 2018-11-28
    • EP17172204.4
    • 2017-05-22
    • Vestel Elektronik Sanayi ve Ticaret A.S.Ozyegin Universitesi
    • GÜLBAHAR, BurhanMEMISOGLU, Gorkem
    • G02F1/015B82Y30/00H01L51/00H01L31/00H01L29/16
    • G02F1/015B82Y30/00G02F2202/36G02F2203/02H01L29/16H01L31/00H01L51/00
    • The present invention provides a device at least comprising a laminated heterostructure (10) and a data modulating and energy harvesting control unit (6) electrically connected to the laminated heterostructure. The laminated heterostructure (10) comprises a graphene layer (2) and a dielectric-metal compound layer (4). The dielectric-metal compound layer (4) may, for example, comprise doped silicon or doped aluminium. The control unit (6) is configured to alter the relative proportions in which the laminated heterostructure (10) can reflect and absorb incident radiation by altering the optoelectronic properties of the laminated heterostructure, and to select whether the laminated heterostructure (10) transmits data by optical modulation of incident radiation, harvests energy from incident radiation, reflects incident radiation, or a combination of all three. Thus, the invention also provides a method of operating a device comprising a laminated heterostructure (10) of a graphene layer (2) and a dielectric-metal compound layer (4). The control unit (6) may set the relative proportions in which the laminated heterostructure (10) can reflect and absorb incident radiation to be different at different wavelengths, and to absorb or reflect substantially all of the incident radiation in a particular waveband. Furthermore, the invention provides an apparatus comprising a plurality of devices, each comprising such a laminated heterostructure (10), which can be arranged in a cellular pattern on a surface (12), such as by inkjet printing or by being integrated into a flexible membrane. The surface may, for example, be a wall of a building or an outer surface of a domestic appliance or of an electronic device. Thus the apparatus is able to provide the surface of whatever object it is applied to with a "smart" coating, the optoelectronic properties of which can be altered as desired to give the surface a variety of different functions.