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    • 3. 发明公开
    • MEMORY CELL AND NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE
    • 存储器单元和非易失性半导体存储器件
    • EP3232465A1
    • 2017-10-18
    • EP15851362.2
    • 2015-10-06
    • Floadia Corporation
    • SHINAGAWA YutakaTANIGUCHI YasuhiroKASAI HideoSAKURAI RyotaroKAWASHIMA YasuhikoTOYA TatsuroOKUYAMA Kosuke
    • H01L21/336G11C16/02G11C16/04H01L27/115H01L29/788H01L29/792
    • H01L29/788G11C11/34G11C16/0425G11C16/0433G11C16/08H01L27/115H01L28/00H01L29/792H01L45/04
    • A voltage applied to a bit line (BL1) or a voltage applied to a source line (SL) is reduced to a value that allows a first select gate structure (5) or a second select gate structure (6) to block electrical connection between the bit line (BL1) and a channel layer (CH) or between the source line (SL) and the channel layer (CH), irrespective of a charge storage gate voltage needed to inject charge into a charge storage layer (EC) by a quantum tunneling effect. In accordance with the reduction in voltage(s) applied to the bit line (BL1) and the source line (SL), thickness of a first select gate insulating film (30) of the first select gate structure (5) and thickness of a second select gate insulating film (33) of the second select gate structure (6) are reduced. High-speed operation is achieved correspondingly. In accordance with the reduction in voltage(s) applied to the bit line (BL1) and the source line (SL), thickness of a gate insulating film of a field effect transistor in a peripheral circuit that controls a memory cell is reduced. The area of the peripheral circuit is reduced correspondingly.
    • 施加到位线(BL1)的电压或施加到源极线(SL)的电压降低到允许第一选择栅极结构(5)或第二选择栅极结构(6)阻止 位线(BL1)和沟道层(CH)之间或源极线(SL)和沟道层(CH)之间的电荷存储栅极电压,而不考虑将电荷注入电荷存储层 量子隧道效应。 根据施加到位线(BL1)和源极线(SL)的电压的减少,第一选择栅极结构(5)的第一选择栅极绝缘膜(30)的厚度和 减少第二选择栅极结构(6)的第二选择栅极绝缘膜(33)。 高速运转也相应实现。 根据施加到位线(BL1)和源极线(SL)的电压的减少,控制存储器单元的外围电路中的场效应晶体管的栅极绝缘膜的厚度减小。 外围电路的面积相应减小。