会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明公开
    • Methods and systems for sensing and rectifying pellet shaped articles for subsequent processing
    • 为进一步处理检测和校正颗粒状物体的系统和方法
    • EP0904900A2
    • 1999-03-31
    • EP98118445.0
    • 1998-09-30
    • ACKLEY MACHINE CORP.
    • Ackley Michael, E.
    • B25J9/16
    • G01N21/9508B25J9/1679G05B2219/39508G05B2219/40564G05B2219/50151
    • A dispenser (10) dispenses pellet shaped articles (1, 7) onto a conveyer (12, 40). The conveyer conveys the pellet shaped articles past a video sensor (14, 42, 52, 22) that senses any pellet shaped articles needing rotation or manipulation so that they are uniformly oriented. The sensor provides a signal to a manipulation device (16, 44, 52, 24) which manipulates certain pellet shaped articles so that all of the articles are uniformly oriented. The conveyer transports the pellet shaped articles to a first pellet shaped article modifying device (18, 46) that, for example, prints indicia on the pellet shaped articles. A rectifying drum (20, 48) reorients all of the pellet shaped articles in order for printing to be performed on a reverse side. A second sensor (50, 22) and a second manipulation device (52) may also be provided. An inspection system (400) to determine whether a pellet shaped article is defective after a performed modification can also be provided.
    • 的分配器(10)分配粒料成型制品(1,7)到传送带(12,40)。 传送器传送过去视频传感器(14,42,52,22)的颗粒状物体那样需要任何粒料成型制品的感官或旋转操作,从而GDP是可以被均匀取向。 该传感器提供的信号到一个操纵装置(16,44,52,24),其操纵某些粒料成型制品所以做了所有的物品的均匀取向。 输送机输送颗粒状物体至第一颗粒状物品修改设备(18,46),对于实施例,在颗粒状物体的打印标记。 的整流筒(20,48)重新定位所有的颗粒状物体,以便为要在背面进行印刷。 因此可以提供第二传感器(50,22)和第二操纵装置(52)。 被提供给检测系统(400),以确定是否矿的粒料状物品之后执行的变形例也可以是有缺陷的。
    • 4. 发明公开
    • LASER WORK STATION GUIDANCE SYSTEM CALIBRATION.
    • 激光工作站指导系统校准。
    • EP0626896A4
    • 1994-12-14
    • EP93906012
    • 1993-02-17
    • TRUMPF INC.
    • KILIAN, FRIEDRICHBOLTON, STEPHEN, R.TROIANI, JOSEPH, J.
    • B23K26/02B23K26/00B23K26/03B23K26/04B23K26/08G05B19/408
    • B23K26/0853B23K26/04G05B19/4083G05B2219/36503G05B2219/49114G05B2219/50151
    • A laser work station has a base member, a laser head (18) mounted on a laser head support carried on the base member for movement of the laser head relative to the base member, so that it is movable thereon in X, Y and Z axes. A guidance system effects precision movement of the laser head in the X, Y and Z axes to move the beam about a workpiece. The workstation also includes an optical sensor assembly (120) comprising a light source (182), and light sensor (184) about the light source (182) to detect light reflected from the surface of the workpiece (38). The sensor assembly (120) is operable to detect reference formulations on the workpiece (38) as it is moved thereabout. The computer control (28) indexes the sensor assembly (120) to a preselected position relative to the approximate position of a reference formation on the workpiece (38) and moves it in a predetermined path from the preselected position to sense passage of the beam over the edge of the reference formation, and the work station uses data obtained from such sensing of the passage of the beam over the edge of the reference formation to adjust the coordinates of the guidance system to reflect the actual position of the workpiece.
    • 激光工作站具有基座部件,激光头安装在承载在基座部件上的激光头支撑件上,用于使激光头相对于基座部件移动,使其能够在X,Y和Z轴上移动。 引导系统使激光头在X,Y和Z轴上的精确运动使得光束围绕工件移动,并且包括光源的光学传感器组件和围绕光源的光传感器以检测从光源的表面反射的光 工件。 传感器组件可操作以在工件移动时检测工件上的参考配方。 计算机控制器将传感器组件相对于工件上的参考地层的大致位置指定到预定位置,并且将其从预选位置预定的路径移动,以检测光束在参考地层的边缘上的通过,以及 工作站使用从这种感测获得的数据通过参考点的边缘上的光束的通过来调整引导系统的坐标以反映工件的实际位置。
    • 9. 发明公开
    • System and method for automated positioning of a substrate in a processing chamber
    • 系统和Verfahrenfürautomatische定位在einem Prozessraum的底层。
    • EP0597637A1
    • 1994-05-18
    • EP93308849.4
    • 1993-11-05
    • APPLIED MATERIALS, INC.
    • Shmookler, SimonWeinberg, Andrew G.McGrath, Martin J.
    • H01L21/00
    • H01L21/67259G05B2219/36405G05B2219/37283G05B2219/37608G05B2219/45031G05B2219/49299G05B2219/50151H01L21/681
    • The disclosure relates to a processing apparatus having a central transfer chamber (2); a plurality of peripheral chambers (3a, 3b) positioned around the periphery of said central transfer chamber; and a micro-processor controlled wafer transfer robot (4) disposed in said transfer chamber and having a wafer support (4a) for loading, moving and unloading wafer to and from said peripheral chambers. The wafer support is moved within said central transfer chamber generally along an arcuate path between the peripheral chambers. Reference signals are generated indicative of the position of a wafer support reference point (4c) by a sensor array (6, 8) having at least two sensors mounted along an axis generally transverse to the arcuate path which are triggered by the leading and trailing edges of the moving wafer as it passes to develop corresponding wafer position signals from which a wafer position reference point can be determined. The micro-processor (12) receiving wafer support reference signals and wafer position signals, calculates the location of the wafer relative to the wafer support, and controls movement of the the wafer support to a corresponding offset position relative to a preselected location (65a, 65b) in a peripheral chamber so as to position the wafer accurately at the preselected location in one of the peripheral chambers (3a, 3b).
    • 本公开涉及一种具有中央传送室(2)的处理设备; 位于所述中央传送室的周围的多个周边室(3a,3b); 以及设置在所述传送室中的微处理器控制的晶片传送机器人(4),并且具有用于将晶片装载到所述外围室中并从所述外围室移出和移出晶片支撑件(4a)。 晶片支撑件通常沿着周边室之间的弧形路径在所述中央传送室内移动。 通过传感器阵列(6,8)产生指示晶片支撑参考点(4c)的位置的参考信号,传感器阵列(6,8)具有沿着大致横向于弧形路径的轴线安装的至少两个传感器,传感器阵列由前缘和后缘 移动的晶片通过以形成相应的晶片位置信号,从晶片位置信号可以确定晶片位置参考点。 接收晶片支撑参考信号和晶片位置信号的微处理器(12)计算晶片相对于晶片支撑件的位置,并且控制晶片支撑件相对于预选位置(65a, 65b),以便将晶​​片准确地定位在一个外围室(3a,3b)中的预选位置。