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1. 发明公开

EP1913450A2 SCALABLE MOTION CONTROL SYSTEM 审中-公开
标题翻译：可扩展的运动控制系统
公开(公告)号：EP1913450A2
公开(公告)日：2008-04-23
申请号：EP06760684.8
申请日：2006-06-05
申请人： Brooks Automation, Inc.
发明人： HOSEK, Martin , BEALE, Stuart , BOTEV, Roumen , COADY, Matthew , HOFMEISER, Christopher , IVES, Mark , MOURA, Jairo , CAVENEY, Robert
IPC分类号： G05B19/18
CPC分类号： G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要： A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.

2. 发明公开

EP2980665A2 SCALABLE MOTION CONTROL SYSTEM 审中-公开
标题翻译： SKALIERBARES BEWEGUNGSSTEUERUNGSSYSTEM
公开(公告)号：EP2980665A2
公开(公告)日：2016-02-03
申请号：EP15182425.7
申请日：2006-06-05
申请人： Brooks Automation, Inc.
发明人： HOSEK, Martin , BEALE, Stuart , BOTEV, Roumen , COADY, Matthew , HOFMEISER, Christopher , IVES, Mark , CAVENEY, Robert T. , MOURA, Jairo
IPC分类号： G05B19/414 , G05B19/418
CPC分类号： G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要： A control system (100) for complex non linear machines including a clustered architecture comprising:
- a master controller (105), one or more cluster controllers (110) each defining a cluster, remote controllers (115, 150) and end effectors,
- a central control section including one or more first remote controllers, said first remote controllers being autonomous remote controllers (150) under direct control of the master controller and
- a distributed control section including said cluster controller (110) controlled by the master controller (105), wherein each of said cluster controllers controls the activities of one or more second remote controllers (115) in said cluster, each of the first and second remote controllers being utilized to drive one or more axes of end effectors of complex multi axis non linear machines,
wherein the master controller includes a processor configured to generate trajectories, run control algorithms and provide torque commands for implementation by the autonomous remote controller (150);
and wherein said master controller and at least said one or more cluster controllers are connected together to a communication network (120) of said control system and defines nodes of said network.
摘要翻译：一种用于复杂非线性机器的控制系统（100），包括：集群架构，包括：主控制器（105），每个定义集群的一个或多个集群控制器（110），远程控制器（115,150）和末端执行器，包括一个或多个第一遥控器的中央控制部分，所述第一遥控器是主控制器的直接控制下的自主遥控器（150）; - 包括由主控制器（105）控制的所述集群控制器（110）的分布式控制部分），其中每个所述集群控制器控制所述集群中的一个或多个第二遥控器（115）的活动，所述第一和第二遥控器中的每一个被用于驱动复数多轴非线性的末端执行器的一个或多个轴机器，其中所述主控制器包括被配置为产生轨迹，运行控制算法并提供用于由所述实施的转矩命令的处理器自主遥控器（150）; 并且其中所述主控制器和至少所述一个或多个集群控制器连接在一起到所述控制系统的通信网络（120）并且定义所述网络的节点。

3. 发明公开

EP2610694A3 Scalable motion control system 审中-公开
标题翻译：可伸缩的运动控制系统
公开(公告)号：EP2610694A3
公开(公告)日：2013-09-04
申请号：EP12158816.4
申请日：2006-06-05
申请人： Brooks Automation, Inc.
发明人： Hosek, Martin , Beale, Stuart , Botev, Roumen , Coady, Matthew , Hofmeiser, Christopher , Ives, Mark , Caveney, Robert T. , Moura, Jairo
IPC分类号： G05B19/414 , G05B19/418
CPC分类号： G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要： The invention concerns a control system including a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller and a distributed control section including a cluster controller controlled by the master controller, wherein the cluster controller controls the activities of one or more second remote controllers. The invention also concerns a method of operating an axis of a control system that includes generating a trajectory for the axis in terms of a position, velocity, and acceleration for each point of a plurality of points on the trajectory, and calculating an inverse dynamic model of the axis to determine a gain value and a feed forward term for each point. The invention is further directed to a method of synchronizing nodes on a network.

4. 发明公开

EP2980665A3 SCALABLE MOTION CONTROL SYSTEM 审中-公开
标题翻译：可扩展的运动控制系统
公开(公告)号：EP2980665A3
公开(公告)日：2016-04-20
申请号：EP15182425.7
申请日：2006-06-05
申请人： Brooks Automation, Inc.
发明人： HOSEK, Martin , BEALE, Stuart , BOTEV, Roumen , COADY, Matthew , HOFMEISER, Christopher , IVES, Mark , CAVENEY, Robert T. , MOURA, Jairo
IPC分类号： G05B19/414 , G05B19/418
CPC分类号： G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要： A control system (100) for complex non linear machines including a clustered architecture comprising:
- a master controller (105), one or more cluster controllers (110) each defining a cluster, remote controllers (115, 150) and end effectors,
- a central control section including one or more first remote controllers, said first remote controllers being autonomous remote controllers (150) under direct control of the master controller and
- a distributed control section including said cluster controller (110) controlled by the master controller (105), wherein each of said cluster controllers controls the activities of one or more second remote controllers (115) in said cluster, each of the first and second remote controllers being utilized to drive one or more axes of end effectors of complex multi axis non linear machines,
wherein the master controller includes a processor configured to generate trajectories, run control algorithms and provide torque commands for implementation by the autonomous remote controller (150);
and wherein said master controller and at least said one or more cluster controllers are connected together to a communication network (120) of said control system and defines nodes of said network.

5. 发明公开

EP2610694A2 Scalable motion control system 审中-公开
标题翻译： Skalierbares Bewegungssteuerungssystem
公开(公告)号：EP2610694A2
公开(公告)日：2013-07-03
申请号：EP12158816.4
申请日：2006-06-05
申请人： Brooks Automation, Inc.
发明人： Hosek, Martin , Beale, Stuart , Botev, Roumen , Coady, Matthew , Hofmeiser, Christopher , Ives, Mark , Caveney, Robert T. , Moura, Jairo
IPC分类号： G05B19/414
CPC分类号： G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18
摘要： The invention concerns a control system including a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller and a distributed control section including a cluster controller controlled by the master controller, wherein the cluster controller controls the activities of one or more second remote controllers. The invention also concerns a method of operating an axis of a control system that includes generating a trajectory for the axis in terms of a position, velocity, and acceleration for each point of a plurality of points on the trajectory, and calculating an inverse dynamic model of the axis to determine a gain value and a feed forward term for each point. The invention is further directed to a method of synchronizing nodes on a network.
摘要翻译：本发明涉及包括具有主控制器的集群架构的控制系统，包括主控制器的直接控制下的一个或多个第一遥控器的中央控制部分和包括由主控制器控制的集群控制器的分布式控制部分，其中，集群控制器控制一个或多个第二遥控器的活动。本发明还涉及一种操作控制系统的轴的方法，该方法包括根据轨迹上的多个点的每个点的位置，速度和加速度生成轴的轨迹，以及计算反向动力学模型以确定每个点的增益值和前馈项。本发明还涉及一种在网络上同步节点的方法。

6. 发明公开

EP1913450A4 SCALABLE MOTION CONTROL SYSTEM 审中-公开
标题翻译：可扩展的运动控制系统
公开(公告)号：EP1913450A4
公开(公告)日：2010-03-31
申请号：EP06760684
申请日：2006-06-05
申请人： BROOKS AUTOMATION INC
发明人： HOSEK MARTIN , BEALE STUART , BOTEV ROUMEN , COADY MATTHEW , HOFMEISER CHRISTOPHER , IVES MARK , MOURA JAIRO , CAVENEY ROBERT
IPC分类号： G05B19/418
CPC分类号： G05B19/4185 , G05B19/4148 , G05B2219/31207 , G05B2219/33277 , Y02P90/18

7. 发明授权

EP0740241B1 Control system for semiconductor spray process tools 失效
标题翻译：为工具控制系统Halbleitersprühbehandlung
公开(公告)号：EP0740241B1
公开(公告)日：2002-08-28
申请号：EP96302799.0
申请日：1996-04-22
申请人： ADVANCED MICRO DEVICES INC.
发明人： Seaton, Jay J. , Allen, Michael , Landis, Donald , Lee, Patrick , Linzy, David , Luca, Susan B.
IPC分类号： G05B19/418
CPC分类号： G05B19/41865 , G05B2219/31145 , G05B2219/31151 , G05B2219/31207 , G05B2219/31288 , G05B2219/31402 , G05B2219/31443 , G05B2219/32095 , G05B2219/32404 , G05B2219/32412 , G05B2219/36116 , G05B2219/45026 , Y02P90/14 , Y02P90/18 , Y02P90/185 , Y02P90/20 , Y02P90/86

8. 发明公开

EP0740241A3 Control system for semiconductor spray process tools 失效
标题翻译：为工具控制系统Halbleitersprühbehandlung
公开(公告)号：EP0740241A3
公开(公告)日：1998-08-12
申请号：EP96302799
申请日：1996-04-22
申请人： ADVANCED MICRO DEVICES INC
发明人： SEATON JAY J , ALLEN MICHAEL , LANDIS DONALD , LEE PATRICK , LINZY DAVID , LUCA SUSAN B
IPC分类号： H01L21/306 , G05B19/418 , G05B23/02 , H01L21/02 , H01L21/304
CPC分类号： G05B19/41865 , G05B2219/31145 , G05B2219/31151 , G05B2219/31207 , G05B2219/31288 , G05B2219/31402 , G05B2219/31443 , G05B2219/32095 , G05B2219/32404 , G05B2219/32412 , G05B2219/36116 , G05B2219/45026 , Y02P90/14 , Y02P90/18 , Y02P90/185 , Y02P90/20 , Y02P90/86
摘要： Method and apparatus for providing integrated monitoring, control and diagnostics functions for semiconductor spray processors is disclosed. In a preferred embodiment, a spray processor host system of the present invention comprises a plurality of PC-class computers interconnected via a network link. Each of a first subset of the spray processor host system computers comprises a supervisor computer connected to one of a plurality of spray process tools, which in the preferred embodiment comprise Mercury® MP processors. The supervisor computers provide ongoing information exchange with the processors and maintain up-to-date status information. Each supervisor computer maintains an event log of processor operations and operator actions, as well as data capture files for storing process variables captured by the supervisor computer. Each of a second subset of the spray processor host system computers comprises an engineer computer for providing the system operator with a command driven interface to the spray processor host system. Each engineer computer can monitor a plurality of supervisor computers and used to enable such functions as recipe directory editing, recipe downloading, event log searching, data capture file data graphing and processor status viewing. A third subset of the spray processor host system computers comprises a bridge computer for providing a communications link between the supervisor computers and a upstream host computer outside the spray processor host system, for example, a lot scheduling or material flow control computer.

9. 发明公开

EP0740241A2 Control system for semiconductor spray process tools 失效
标题翻译： SteerersystemfürWerkzeuge zurHalbleitersprühbehandlung
公开(公告)号：EP0740241A2
公开(公告)日：1996-10-30
申请号：EP96302799.0
申请日：1996-04-22
申请人： ADVANCED MICRO DEVICES INC.
发明人： Seaton, Jay J. , Allen, Michael , Landis, Donald , Lee, Patrick , Linzy, David , Luca, Susan B.
IPC分类号： G05B19/418
CPC分类号： G05B19/41865 , G05B2219/31145 , G05B2219/31151 , G05B2219/31207 , G05B2219/31288 , G05B2219/31402 , G05B2219/31443 , G05B2219/32095 , G05B2219/32404 , G05B2219/32412 , G05B2219/36116 , G05B2219/45026 , Y02P90/14 , Y02P90/18 , Y02P90/185 , Y02P90/20 , Y02P90/86
摘要： Method and apparatus for providing integrated monitoring, control and diagnostics functions for semiconductor spray processors is disclosed. In a preferred embodiment, a spray processor host system of the present invention comprises a plurality of PC-class computers interconnected via a network link. Each of a first subset of the spray processor host system computers comprises a supervisor computer connected to one of a plurality of spray process tools, which in the preferred embodiment comprise Mercury® MP processors. The supervisor computers provide ongoing information exchange with the processors and maintain up-to-date status information. Each supervisor computer maintains an event log of processor operations and operator actions, as well as data capture files for storing process variables captured by the supervisor computer. Each of a second subset of the spray processor host system computers comprises an engineer computer for providing the system operator with a command driven interface to the spray processor host system. Each engineer computer can monitor a plurality of supervisor computers and used to enable such functions as recipe directory editing, recipe downloading, event log searching, data capture file data graphing and processor status viewing. A third subset of the spray processor host system computers comprises a bridge computer for providing a communications link between the supervisor computers and a upstream host computer outside the spray processor host system, for example, a lot scheduling or material flow control computer.
摘要翻译：公开了用于为半导体喷雾处理器提供综合监控，控制和诊断功能的方法和设备。在优选实施例中，本发明的喷雾处理器主机系统包括通过网络链路互连的多个PC级计算机。喷雾处理器主机系统计算机的第一子集中的每一个包括连接到多个喷雾处理工具中的一个的管理计算机，在优选实施例中，该处理工具包括Mercury TM MP处理器。主管计算机与处理器进行持续的信息交换并维护最新的状态信息。每个主管计算机维护处理器操作和操作员动作的事件日志，以及用于存储由主管计算机捕获的过程变量的数据捕获文件。喷雾处理器主机系统计算机的第二子集中的每一个包括工程计算机，用于向系统操作者提供与喷雾处理器主机系统的命令驱动接口。每个工程师计算机可以监视多个管理计算机，并用于启用诸如食谱目录编辑，食谱下载，事件日志搜索，数据捕获文件数据图形和处理器状态查看之类的功能。喷雾处理器主机系统计算机的第三子集包括桥接计算机，用于在主管计算机和喷雾处理器主机系统之外的上游主机之间提供通信链路，例如批量调度或物料流控制计算机。

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