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    • 3. 发明公开
    • FOCUS MEASUREMENTS USING SCATTEROMETRY METROLOGY
    • FOKUSMESSUNGEN MIT SCATTEROMETRIE
    • EP3126893A1
    • 2017-02-08
    • EP15774184.4
    • 2015-03-30
    • Kla-Tencor Corporation
    • EL KODADI, MohammedAMIR, NurielVOLKOVICH, RoieLEVINSKI, VladimirFELER, YoelKANDEL, DanielGUTMAN, NadavPANDEV, StilianSANKO, Dzmitry
    • G02B15/14H04N7/18
    • G06F17/5081G01N21/4785G03F7/70641G03F7/70683G06F17/5072
    • Target designs and methods are provided, which relate to periodic structures having elements recurring with a first pitch in a first direction. The elements are periodic with a second pitch along a second direction that is perpendicular to the first direction and are characterized in the second direction by alternating, focus-sensitive and focus-insensitive patterns with the second pitch. In the produced targets, the first pitch may be about the device pitch and the second pitch may be several times larger. The first, focus-insensitive pattern may be produced to yield a first critical dimension and the second, focus-sensitive pattern may be produced to yield a second critical dimension that may be equal to the first critical dimension only when specified focus requirements are satisfied, or provide scatterometry measurements of zeroth as well as first diffraction orders, based on the longer pitch along the perpendicular direction.
    • 提供了目标设计和方法,其涉及具有在第一方向上以第一间距重复的元件的周期性结构。 这些元件沿着与第一方向垂直的第二方向具有第二间距周期性,并且通过具有第二间距的交替的聚焦敏感和对焦不敏感图案在第二方向上表征。 在所产生的目标中,第一节距可以是关于装置间距,并且第二节距可以是数倍大。 可以产生第一个不对焦模式,以产生第一关键尺寸,并且可以产生第二焦点敏感图案以产生仅当满足指定焦点要求时可以等于第一临界尺寸的第二临界尺寸, 或者基于沿着垂直方向的较长的间距来提供零和第一衍射级的散射测量。
    • 7. 发明公开
    • PARTICLE SUSPENSIONS USED AS LOW-CONTRAST STANDARDS FOR INSPECTION OF LIQUIDS
    • PARTIKELSUSPENSIONEN ALS KONTRASTARME标准ZUR UNTERSUCHUNG VONFLÜSSIGKEITEN
    • EP3019850A1
    • 2016-05-18
    • EP14823657.3
    • 2014-07-10
    • KLA-Tencor Corporation
    • KOLE, FranciscoCHRISTIAANSE, Johannes G.M.KIRK, Gregory L.CHOW, Winfred Tee
    • G01N15/14G01N21/00G01N21/01G01N21/17G01T7/00G01N33/48
    • G01N21/278G01N15/0227G01N15/06G01N15/0656G01N21/4785G01N2001/2893G01N2015/0065G01N2015/0294G01N2015/0687G01N2015/0693
    • In certain embodiments, a method for validating the human visual inspection process or an optical analysis instrument for use with biological particles may include inspecting a standard particle solution using the optical analysis instrument. The standard particle solution may include a known concentration of standard particles suspended in solution with the standard particles having a defined size and shape distribution. The standard particles may have a refractive index that is substantially similar to a refractive index of the biological particles. The method may include assessing a concentration of standard particles in the standard particle solution from the inspection. The method may include assessing a difference between the assessed concentration of standard particles and the known concentration of standard particles. The method may include modifying one or more parameters of the optical analysis instrument based on the assessed difference between the concentrations. The method may include assessing a detection efficiency of the optical analysis instrument.
    • 在某些实施例中,用于验证人类视觉检查过程的方法或与生物颗粒一起使用的光学分析仪器可以包括使用光学分析仪器检查标准颗粒溶液。 标准颗粒溶液可以包括悬浮在溶液中的已知浓度的标准颗粒,其中标准颗粒具有确定的尺寸和形状分布。 标准颗粒可以具有基本上类似于生物颗粒的折射率的折射率。 该方法可以包括从检查中评估标准颗粒溶液中的标准颗粒的浓度。 该方法可以包括评估所评估的标准颗粒浓度与标准颗粒的已知浓度之间的差异。 该方法可以包括基于所评估的浓度差异修改光学分析仪器的一个或多个参数。 该方法可以包括评估光学分析仪器的检测效率。