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1. 发明公开

EP3056859A1 BIAS AND SCALE-FACTOR ERROR MITIGATION IN A CORIOLIS VIBRATORY GYROSCOPE SYSTEM 有权
标题翻译： EOREM CORIOLIS-VIBRATIONSKREISELSYSTEM中的VORSPANNUNGS- UNDMASSSTABFEHLERABSCHWÄCHUNG
公开(公告)号：EP3056859A1
公开(公告)日：2016-08-17
申请号：EP16154922.5
申请日：2016-02-09
申请人： Northrop Grumman Systems Corporation
发明人： Stewart, Robert E. , Rozelle, David , Lee, Charles A.
IPC分类号： G01C19/5776
CPC分类号： G01C19/5677 , G01C19/5684 , G01C19/5691 , G01C19/5776 , G01C25/00
摘要： One embodiment of the invention includes a CVG system. A plurality of electrodes electrostatically force a resonator into a periodic motion based on a drive axis forcer signal applied to a first set of the plurality of electrodes and a sense axis force-rebalance signal applied to a second set of the plurality of electrodes, and provides a sense axis pickoff signal and a drive axis pickoff signal. A gyroscope controller generates the drive axis forcer signal based on the drive axis pickoff signal and calculates an angular rate of rotation about an input axis based on the sense axis force-rebalance signal. The gyroscope controller modulates a predetermined disturbance signal component onto the sense axis force-rebalance signal and to control a modulation phase of the sense axis force-rebalance signal based on detection of the predetermined disturbance signal component in the sense axis force-rebalance signal to substantially mitigate bias and scale-factor error.
摘要翻译：本发明的一个实施例包括CVG系统。多个电极基于施加到多个电极的第一组的驱动轴线信号和施加到多个电极的第二组的感测轴力 - 再平衡信号，将谐振器静电地强制为周期性运动，并且提供感测轴检测信号和驱动轴检测信号。陀螺仪控制器基于驱动轴检测信号产生驱动轴线检测信号，并基于感测轴力 - 再平衡信号计算围绕输入轴的角速度。陀螺仪控制器将预定的扰动信号分量调制到感测轴上的力 - 再平衡信号上，并且基于感测轴力 - 再平衡信号中的预定的扰动信号分量的检测来控制感测轴力平衡信号的调制相位，减轻偏差和比例因子误差。

2. 发明公开

EP1427987A1 VIBRATORY GYROSCOPIC RATE SENSOR 有权
标题翻译：振动陀螺仪传感器
公开(公告)号：EP1427987A1
公开(公告)日：2004-06-16
申请号：EP02755327.0
申请日：2002-09-06
申请人： BAE Systems PLC
发明人： FELL, Christopher Paul,Bae Systems Avionics , ELEY, Rebecka,Bae Systems Avionics , FOX, C.H.J.,Univ. of Nottingham S. of Mec. Eng , McWILLIAM, S.,Univ. of Nottingham S. of Mec. Eng
IPC分类号： G01C19/56
CPC分类号： G01C19/5677
摘要： A two axis gyroscope including a planar vibratory resonator (5) having a ring or hoop-like structure, carrier mode drive means (22) for causing the resonator (5) to vibrate in a cosnθ vibration mode, carrier mode pick-off means (23) for sensing movement of the resonator (5), x-axis and x-axis response mode pick-off means (25; 27) for detecting movement of the resonator in response to rotation about the x-axis and y-axis; x-axis and y-axis response mode drive means (24; 26) for nulling said motions and support means (9) for flexibly supporting the resonator (5) and for allowing the resonator to vibrate relative to the support means (9) in response to the drive means (22) and to applied rotation; wherein the support (9) means comprises only L legs, where, when L is even: L=2N/K, and where, when L is odd: L=N/K, where K is an integer, L > 2 and N is the carrier mode order.

3. 发明公开

EP1212584A2 HIGH Q ANGULAR RATE SENSING GYROSCOPE 审中-公开
标题翻译： ANGLE高速离心高品质
公开(公告)号：EP1212584A2
公开(公告)日：2002-06-12
申请号：EP00965039.1
申请日：2000-09-14
申请人： WATSON INDUSTRIES, INC.
发明人： WATSON, William, S.
IPC分类号： G01C19/00
CPC分类号： G01C19/567 , G01C19/5642 , G01C19/5677
摘要： A structure and arrangement for improving the accuracy and efficiency of an angular rate sensing gyroscope is herein disclosed. Voltage pick-off conductors are applied to an area of the surface of a resonating element of an angular rate sensing gyroscope that is subject to substantially zero stress when the gyroscope is rotationally stationary. Actuator conductors are similarly applied to a resonating element at a location bounded by areas of the resonating element subject to substantially uniform levels of stress when the gyroscope is rotationally stationary. A method for improving the voltage response of a piezoelectric resonating element is also disclosed.

4. 发明公开

EP3112804A4 VIBRATION-TYPE ANGULAR VELOCITY SENSOR 有权
公开(公告)号：EP3112804A4
公开(公告)日：2017-11-01
申请号：EP15755663
申请日：2015-02-12
申请人： SUMITOMO PRECISION PROD CO
发明人： MORIGUCHI TAKAFUMI
IPC分类号： G01C19/5677 , H01L29/84
CPC分类号： G01C19/5677
摘要： This vibration-type angular rate sensor corrects a sensor output from a secondary-side control circuit (3) by adding, to a closed control loop of the secondary-side control circuit, an offset value based on the output of a closed control loop of a primary-side control circuit (2) dependent on temperature.

5. 发明公开

EP2778608A3 XY-axis gyroscopes with electrode configuration for detecting quadrature errors and out-of-plane sense modes 审中-公开
标题翻译： XY轴陀螺仪具有用于检测正交误差的电极结构，和扫描模式从所述平面
公开(公告)号：EP2778608A3
公开(公告)日：2015-06-17
申请号：EP14157766.8
申请日：2014-03-05
申请人： Analog Devices, Inc.
发明人： Johari-Galle, Houri , Clark, William A.
IPC分类号： G01C19/5677
CPC分类号： G01C19/56 , G01C19/5677 , G01C19/5684 , G01C19/5698
摘要： Various embodiments include feedback circuits for tuning the drive modes of a shell-type gyroscope, while other embodiments include separate circuits for tuning the sense mode of a shell-type gyroscope to reduce or avoid quadrature errors. Still other embodiments include circuits to excite the sense modes (i.e., the out-of-plane modes) of a gyroscope without requiring the application of a rotation to the gyroscope, to ensure that the sense modes are aligned with the sense electrodes.

6. 发明公开

EP2696169A2 Force-rebalance coriolis vibratory gyroscope 有权转让
标题翻译：科里奥利振动陀螺仪力平衡
公开(公告)号：EP2696169A2
公开(公告)日：2014-02-12
申请号：EP13179489.3
申请日：2013-08-06
申请人： Innalabs Limited
发明人： Beitia, Jose , Okon, Isaak , Simonenko, Dmitri V , Renault, Alain
IPC分类号： G01C19/5684
CPC分类号： G01C19/5677 , G01C19/5691 , G01C25/00
摘要： An effective and precise method and system for compensation and measurement of a zero-bias in an axisymmetrical CVG (Coriolis Vibrating Gyroscope) is provided. Principal mode is driven according to an X-axis. Angular velocity is measured through Coriolis mode excitation along Y-axis. The sensitive axis of the gyroscope is reversed by 180 degrees by switching input and sense signals. Vibration is then driven along Y-axis and angular velocity is sensed along X-axis. On each position, after an arbitrary period of time, the gyroscope output is stored. Half-difference in outputs between two opposite position gives angular velocity and zero-bias effect is canceled. Half-sum in outputs between two opposite position gives the zero-bias error.

7. 发明授权

EP1427987B1 VIBRATORY GYROSCOPIC RATE SENSOR 有权
标题翻译： VIBRATIONSKREISELSENSOR
公开(公告)号：EP1427987B1
公开(公告)日：2012-04-04
申请号：EP02755327.0
申请日：2002-09-06
申请人： Atlantic Inertial Systems Limited
发明人： FELL, Christopher Paul , ELEY, Rebecka , FOX, Colin Henry John , McWILLIAM, Stewart
IPC分类号： G01C19/56
CPC分类号： G01C19/5677
摘要： A two axis gyroscope including a planar vibratory resonator (5) having a ring or hoop-like structure, carrier mode drive means (22) for causing the resonator (5) to vibrate in a cosnθ vibration mode, carrier mode pick-off means (23) for sensing movement of the resonator (5), x-axis and x-axis response mode pick-off means (25; 27) for detecting movement of the resonator in response to rotation about the x-axis and y-axis; x-axis and y-axis response mode drive means (24; 26) for nulling said motions and support means (9) for flexibly supporting the resonator (5) and for allowing the resonator to vibrate relative to the support means (9) in response to the drive means (22) and to applied rotation; wherein the support (9) means comprises only L legs, where, when L is even: L=2N/K, and where, when L is odd: L=N/K, where K is an integer, L > 2 and N is the carrier mode order.

8. 发明授权

EP2191232B8 IMPROVEMENTS IN OR RELATING TO ANGULAR VELOCITY SENSORS 有权
标题翻译：与之相关的改进与角度速度传感器
公开(公告)号：EP2191232B8
公开(公告)日：2012-02-08
申请号：EP08788768.3
申请日：2008-09-08
申请人： Atlantic Inertial Systems Limited
发明人： MALVERN, Alan, Richard , FELL, Christopher, Paul , KAZER, Andrew , TOWNSEND, Kevin
IPC分类号： G01C19/56
CPC分类号： G01C19/5677
摘要： A gyroscope has a ring (70) and a primary drive transducer (72) for oscillating the ring (70) substantially at the resonant frequency in a primary mode. A primary control loop receives primary pick-off signals from the primary pick-off transducer (74) and provides primary drive signals 116 to the primary drive transducer (72) so as to maintain resonant oscillation of the ring (70). The primary control loop includes a demodulator (78) determining the amplitude of the fundamental frequency of the primary pick-off signals and a demodulator (82) determining the amplitude of the second harmonic frequency of the primary pick-off signals and a drive signal generator (100, 106, 110 and 114) producing the primary drive signals (116) with an amplitude that is dependent on a ratio of the amplitude of the second harmonic frequency of the primary pick-off signal over the amplitude of the fundamental frequency of the primary pick-off signal as derived by a divider (100).

9. 发明授权

EP1116038B1 FORMATION OF A BRIDGE IN A MICRO-DEVICE 有权
标题翻译：法来制造桥微型器件的
公开(公告)号：EP1116038B1
公开(公告)日：2011-05-04
申请号：EP99946321.9
申请日：1999-09-13
申请人： QinetiQ Limited
发明人： MCNIE, Mark, Edward
IPC分类号： G01P1/00
CPC分类号： G01C19/5677 , B81B2203/0109 , B81B2207/07 , B81C1/00095 , G01C19/5712 , G01P15/0802
摘要： A method of micro-machining comprising providing a primary region of at least a first material (AA, BB, 56) which contacts a second material (8, 50, 52, 60, 62) at at least one end portion thereof, the method comprising providing an infill material (34, 36, 38) on to the second material, patterning and etching said infill material to form a hole (40, 42) through the infill material to the second material, depositing the first material on to said infill material so that the at least one portion of the first material contacts the second material through the hole. The method can be used to provide a track bridging suspended portions of micro-machined structures, for example the portion referenced (24). Also, a method of narrowing and sealing top portions of channels cut into a wafer is disclosed.

10. 发明公开

EP2191232A1 IMPROVEMENTS IN OR RELATING TO ANGULAR VELOCITY SENSORS 有权
标题翻译：与之相关的改进与角度速度传感器
公开(公告)号：EP2191232A1
公开(公告)日：2010-06-02
申请号：EP08788768.3
申请日：2008-09-08
申请人： Atlantic Inertial Systems Limited
发明人： MALVERN, Alan, Richard , FELL, Christopher, Paul , KAZER, Andrew , TOWNSEND, Kevin
IPC分类号： G01C19/56
CPC分类号： G01C19/5677
摘要： A gyroscope has a ring (70) and a primary drive transducer (72) for oscillating the ring (70) substantially at the resonant frequency in a primary mode. A primary control loop receives primary pick-off signals from the primary pick-off transducer (74) and provides primary drive signals 116 to the primary drive transducer (72) so as to maintain resonant oscillation of the ring (70). The primary control loop includes a demodulator (78) determining the amplitude of the fundamental frequency of the primary pick-off signals and a demodulator (82) determining the amplitude of the second harmonic frequency of the primary pick-off signals and a drive signal generator (100, 106, 110 and 114) producing the primary drive signals (116) with an amplitude that is dependent on a ratio of the amplitude of the second harmonic frequency of the primary pick-off signal over the amplitude of the fundamental frequency of the primary pick-off signal as derived by a divider (100).

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