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    • 7. 发明公开
    • HARD FILM, HARD FILM FORMED BODY, AND ROLLING BEARING
    • HARTSCHICHT,AUS DER HARTSCHICHT GEFORMTERKÖRPERUNDWÄLZLAGER
    • EP2759620A1
    • 2014-07-30
    • EP12833570.0
    • 2012-09-21
    • NTN Corporation
    • TSUTSUI, HideyukiOOHIRA, KouyaNAKANISHI, Masaki
    • C23C14/06F16C33/58
    • F16C33/62C23C14/024C23C14/027C23C14/0605C23C14/3464C23C28/324C23C28/341C23C28/343C23C28/347C23C28/36F16C33/32F16C33/34F16C33/565F16C33/64F16C33/6603F16C2202/04F16C2204/44F16C2204/66F16C2206/04F16C2206/58F16C2206/82F16C2223/14F16C2223/30Y10T428/2495Y10T428/30
    • The present invention provides a hard film which has high wear resistance and excellent peeling resistance and can be prevented from peeling off a base material over a long period of time and a hard film formed body on which the hard film is formed. A hard film (8) has a structure composed of a first mixed layer (8a), consisting mainly of Cr and WC, which is formed directly on a raceway surface (2a) of an inner ring (2) (base material) of a rolling bearing, a second mixed layer (8b), consisting mainly of WC and DLC, which is formed on the first mixed layer (8a), and a surface layer (8c), consisting mainly of DLC, which is formed on the second mixed layer (8b). In the first mixed layer (8a), a content rate of the Cr becomes continuously or stepwise lower and that of the DLC becomes continuously or stepwise higher from a side of the base material toward a side of the second mixed layer (8b). In the second mixed layer (8b), a content rate of the WC becomes continuously or stepwise lower and that of the DLC becomes continuously or stepwise higher from a side of the first mixed layer (8a) toward a side of the surface layer (8c). A content of hydrogen in the second mixed layer (8b) is set to 10 to 45 atomic percent.
    • 本发明提供一种具有高耐磨性和优异的耐剥离性并且可以防止长时间剥离基材的硬膜和形成有硬膜的硬质成膜体。 硬膜(8)具有由主要由Cr和WC组成的第一混合层(8a)构成的结构,其直接形成在内环(2)(基材)的滚道表面(2a)上 滚动轴承,形成在第一混合层(8a)上的主要由WC和DLC组成的第二混合层(8b)和主要由DLC组成的表面层(8c),其形成在第二混合层 层(8b)。 在第一混合层(8a)中,Cr的含量率连续或逐步降低,并且DLC的含量率从基材侧朝向第二混合层(8b)的一侧连续或逐步增加。 在第二混合层(8b)中,WC的含量率连续或逐步降低,并且DLC的含量率从第一混合层(8a)的一侧向表面层(8c)的侧面连续或逐步增加 )。 第二混合层(8b)中的氢含量为10〜45原子%。