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    • 9. 发明公开
    • AN APPARATUS AND PROCESS FOR EDGE-DEFINED, FILM-FED CRYSTAL GROWTH.
    • VORRICHTUNG UND VERFAHRENFÜRKANTENBESTIMMTES SCHMELZFILMBESCHICKTES KRISTALLZIEHEN。
    • EP0309540A4
    • 1989-07-18
    • EP88903514
    • 1988-03-07
    • MOBIL SOLAR ENERGY CORP
    • HARVEY DAVID S
    • C30B15/00C30B15/34H01L21/208
    • C30B15/34C30B15/00C30B29/66
    • An apparatus and process are disclosed for growing tubular crystalline bodies according to the Edge defined, Film-Fed Growth (EFG) process, wherein the apparatus has at least one exterior passage (240) and at least one interior passage formed (245) in its crucible die assembly (200) and associated parts, whereby gases introduced into at least one exterior passage (725) will be delivered to the zone located outside the growing crystalline body (900) (i.e. the ''exterior'' zone) adjacent to the growth face on the die member (215), and gases introduced into the at least one interior passage (720) will be delivered to the zone located inside of the hollow crystalline body (i.e. the ''interior'' zone) adjacent to the growth face on the die member, whereby the atmosphere in each of the zones may be separately controlled.
    • 公开了一种装置和方法,用于根据边缘定义的膜供料生长(EFG)工艺生长管状结晶体,其中所述装置具有至少一个外部通道(240)和至少一个形成在其中的内部通道(245) 坩埚模头组件(200)和相关部件,由此引入至少一个外部通道(725)的气体将被输送到位于生长结晶体(900)外部的区域(即,“外部”区域) (215)上的生长面,并且引入到至少一个内部通道(720)中的气体将被输送到位于与生长相邻的中空结晶体(即“内部”区域)内部的区域 面对模具构件,由此可以分别控制每个区域中的气氛。