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    • 7. 发明公开
    • COLLIMATOR FOR USE IN SUBSTRATE PROCESSING CHAMBERS
    • KOLLIMATORFÜRSUBSTRATVERARBEITUNGSKAMMERN
    • EP3140851A1
    • 2017-03-15
    • EP15862359.5
    • 2015-11-20
    • Applied Materials, Inc.
    • RIKER, Martin Lee
    • H01L21/203
    • H01J37/34C23C14/046H01J37/3408H01J37/3447
    • Embodiments of collimators for use in substrate processing chambers are provided herein. In some embodiments, a collimator includes: a body having a central region, a peripheral region, and a transitional region disposed between the central and peripheral regions; a first plurality of apertures in the central region having a first aspect ratio; a second plurality of apertures in the peripheral region having a second aspect ratio less than the first aspect ratio; and a third plurality of apertures in the transitional region, wherein the third plurality of apertures are cut so the transitional region forms a conical shape surrounding the central region.
    • 本文提供了用于基板处理室的准直器的实施例。 在一些实施例中,准直器包括:具有中心区域,周边区域和设置在中心区域和外围区域之间的过渡区域的主体; 所述中心区域中的第一多个孔具有第一纵横比; 所述周边区域中具有小于所述第一纵横比的第二纵横比的第二多个孔; 以及所述过渡区域中的第三多个孔,其中所述第三多个孔被切割,使得所述过渡区域形成围绕所述中心区域的圆锥形状。