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1. 发明公开

EP3337768A1 LAYERED GLASS STRUCTURES 审中-公开
公开(公告)号：EP3337768A1
公开(公告)日：2018-06-27
申请号：EP16757461.5
申请日：2016-08-18
申请人： Corning Incorporated
发明人： BUTLER, Douglas Llewellyn , DEJNEKA, Matthew John , HAWTOF, Daniel Warren , POWERS, Dale Robert , TANDON, Pushkar
IPC分类号： C03B19/14 , C03C17/02 , C03C17/34 , C03C23/00 , C03C13/04 , G02B6/132 , C03C27/10
CPC分类号： C03B19/1492 , B32B17/06 , C03B19/1453 , C03B19/1469 , C03B37/01446 , C03B37/01466 , C03B2201/02 , C03B2201/08 , C03B2201/30 , C03B2201/31 , C03B2201/32 , C03B2201/34 , C03B2201/36 , C03B2201/42 , C03B2203/12 , C03B2207/20 , C03C13/045 , C03C17/02 , C03C17/3417 , C03C23/0025 , C03C2201/02 , C03C2201/08 , C03C2201/31 , C03C2201/32 , C03C2201/34 , C03C2201/42 , C03C2203/40 , G02B6/00 , G02B6/132
摘要： Layered glass structures and fabrication methods are described. The methods include depositing soot on a dense glass substrate to form a composite structure and sintering the composite structure to form a layered glass structure. The dense glass substrate may be derived from an optical fiber preform that has been modified to include a planar surface. The composite structure may include one or more soot layers. The layered glass structure may be formed by combining multiple composite structures to form a stack, followed by sintering and fusing the stack. The layered glass structure may further be heated to softening and drawn to control linear dimensions. The layered glass structure or drawn layered glass structure may be configured as a planar waveguide.

2. 发明授权

EP2426091B1 Titania-doped quartz glass and making method 有权转让
标题翻译：掺杂二氧化钛的石英玻璃和制造方法
公开(公告)号：EP2426091B1
公开(公告)日：2017-11-29
申请号：EP11179625.6
申请日：2011-08-31
申请人： Shin-Etsu Chemical Co., Ltd.
发明人： Maida, Shigeru , Otsuka, Hisatoshi , Sekizawa, Osamu , Yanagisawa, Naoki
IPC分类号： C03B19/14 , C03C3/06 , C03C4/00
CPC分类号： C03C3/06 , C03B19/1423 , C03B19/1453 , C03B2201/23 , C03B2201/42 , C03B2207/06 , C03B2207/12 , C03B2207/20 , C03B2207/62 , C03B2207/64 , C03C4/0085 , C03C2201/21 , C03C2201/42
摘要： A titania-doped quartz glass suited as an EUV lithographic member is prepared by feeding a silicon-providing reactant gas and a titanium-providing reactant gas through a burner along with hydrogen and oxygen, subjecting the reactant gases to oxidation or flame hydrolysis to form synthetic silica-titania fine particles, depositing the particles on a rotating target, and concurrently melting and vitrifying the deposited particles to grow an ingot of titania-doped quartz glass. The target is retracted such that the growth front of the ingot may be spaced a distance of at least 250 mm from the burner tip.

3. 发明公开

EP3004001A1 VERDAMPFER UND VERFAHREN ZUR HERSTELLUNG VON SYNTHETISCHEM QUARZGLAS 有权
标题翻译：蒸发器及其制造方法合成石英玻璃
公开(公告)号：EP3004001A1
公开(公告)日：2016-04-13
申请号：EP14710805.4
申请日：2014-03-12
申请人： Heraeus Quarzglas GmbH & Co. KG
发明人： BADEKE, Klaus-Uwe , TROMMER, Martin
IPC分类号： C03B37/014 , B01B1/00 , C03B19/14
CPC分类号： C03C3/06 , B01B1/005 , B01J19/26 , B01J2219/24 , C01B33/12 , C03B19/1415 , C03B37/01413 , C03B2207/20 , C03B2207/32 , C03B2207/34 , C03B2207/85 , C03B2207/87
摘要： The invention relates to a method for producing fused quartz, in which (a) a suitable liquid starter material is evaporated by it being sprayed into a vertical evaporation chamber, (b) the vaporous starter material is oxidised to form SiO
2 , and (c) the SiO
2 is collected. The method is characterised in that the starter material to be evaporated is sprayed in at the base of the evaporation chamber and the vaporous starter material is removed at the head end of the evaporation chamber, said chamber being constructed such that components separated in the chamber accumulate at the base of the evaporator and are re-sprayed. The invention also relates to an evaporator for carrying out this method.

4. 发明公开

EP2858957A4 BURNER MODULES, METHODS OF FORMING GLASS SHEETS, AND GLASS SHEETS FORMED THEREBY 有权
标题翻译：燃烧器模块，用于制造玻璃过程，从而生产的玻璃
公开(公告)号：EP2858957A4
公开(公告)日：2016-03-23
申请号：EP13796697
申请日：2013-05-29
申请人： CORNING INC
发明人： GEREMEW MULUWORK , HAWTOF DANIEL WARREN , NONI JR DOUGLAS MILES
IPC分类号： C03B5/235 , C03B5/08 , C03B18/02
CPC分类号： F23D14/583 , C03B19/1423 , C03B2207/02 , C03B2207/20 , C03B2207/34 , C03B2207/42 , F23D14/00 , F23D2900/21005 , Y10T428/24355
摘要： A burner module comprising a burner gas inlet block, a lower flow plate, an upper flow plate, a burner gas flow disperser, and a burner gas discharge block. The burner gas inlet block, the burner gas flow disperser, and the burner gas discharge block each comprising a plurality of channels separated by partitions. The partitions of the burner gas flow disperser and the burner gas discharge block comprising a knife edge. The upper flow plate and the lower flow plate each comprising a plurality of pressure holes in fluid communication with the plurality of channels. Additionally, the method of forming a glass sheet or ribbon using the disclosed burner module and a glass sheet or ribbon formed using the method.

5. 发明授权

EP2434217B1 Quartz glass burner 有权
标题翻译：石英玻璃刻录机
公开(公告)号：EP2434217B1
公开(公告)日：2014-06-25
申请号：EP11182582.4
申请日：2011-09-23
申请人： Shin-Etsu Chemical Co., Ltd.
发明人： Yoshida, Makoto
IPC分类号： F23D99/00 , C03B19/14 , C03B37/014
CPC分类号： C03B32/00 , C03B19/1423 , C03B37/0142 , C03B2207/12 , C03B2207/14 , C03B2207/20 , F23D91/02 , F23D2900/21005

6. 发明公开

EP2226302A3 Method for manufacturing optical fiber base material 有权
标题翻译：一种用于生产光学纤维基材的过程
公开(公告)号：EP2226302A3
公开(公告)日：2012-07-11
申请号：EP10002146.8
申请日：2010-03-03
申请人： Shin-Etsu Chemical Co., Ltd.
发明人： Yoshida, Makoto
IPC分类号： C03B37/014
CPC分类号： C03B37/0142 , C03B2207/06 , C03B2207/12 , C03B2207/20 , C03B2207/36 , Y02P40/57
摘要： A method for manufacturing an optical fiber base material includes producing glass fine particles through a hydrolysis of a glass material gas in a flame created by an oxidizing gas and a combustible gas. The method uses a burner including: a central gas discharge port that ejects a gas containing an oxidizing gas; a plurality of small-diameter gas discharge ports that are arranged in a concentric circle with the central gas discharge port so as to externally surround the central gas discharge port, where the plurality of small-diameter gas discharge ports eject a gas containing an oxidizing gas; a combustible gas discharge port that is concentrically arranged with the central gas discharge port so as to externally surround the central gas discharge port, where the combustible gas discharge port has the plurality of small-diameter gas discharge port arranged therein and the combustible gas discharge port ejects a combustible gas; and an oxidizing gas discharge port that is concentrically arranged with the central gas discharge port so as to externally surround the combustible gas discharge port, the oxidizing gas discharge port ejecting an oxidizing gas. Here, a relation of V 1 > V 2 > V 3 > V 4 is satisfied where V 1 denotes a gas flow speed at the central gas discharge port, V 2 denotes a gas flow speed at the plurality of small-diameter gas discharge ports, V 3 denotes a gas flow speed at the combustible-gas discharge port, and V 4 denotes a gas flow speed at the oxidizing gas discharge port.

7. 发明公开

EP2426091A1 Titania-doped quartz glass and making method 有权转让
标题翻译：掺杂二氧化钛的石英玻璃和制造方法
公开(公告)号：EP2426091A1
公开(公告)日：2012-03-07
申请号：EP11179625.6
申请日：2011-08-31
申请人： Shin-Etsu Chemical Co., Ltd.
发明人： Maida, Shigeru , Otsuka, Hisatoshi , Sekizawa, Osamu , Yanagisawa, Naoki
IPC分类号： C03B19/14 , C03C3/06 , C03C4/00
CPC分类号： C03C3/06 , C03B19/1423 , C03B19/1453 , C03B2201/23 , C03B2201/42 , C03B2207/06 , C03B2207/12 , C03B2207/20 , C03B2207/62 , C03B2207/64 , C03C4/0085 , C03C2201/21 , C03C2201/42
摘要： A titania-doped quartz glass suited as an EUV lithographic member is prepared by feeding a silicon-providing reactant gas and a titanium-providing reactant gas through a burner along with hydrogen and oxygen, subjecting the reactant gases to oxidation or flame hydrolysis to form synthetic silica-titania fine particles, depositing the particles on a rotating target, and concurrently melting and vitrifying the deposited particles to grow an ingot of titania-doped quartz glass. The target is retracted such that the growth front of the ingot may be spaced a distance of at least 250 mm from the burner tip.
摘要翻译：通过将提供硅的反应物气体和提供钛的反应物气体与氢气和氧气一起通过燃烧器进料，使反应物气体氧化或火焰水解以形成合成的二氧化硅 - 二氧化钛细颗粒，将颗粒沉积在旋转靶上，同时熔化和玻璃化沉积的颗粒以生长掺杂二氧化钛的石英玻璃块。目标物被收回，使得锭的生长前沿可以与燃烧器尖端间隔至少250mm的距离。

8. 发明公开

EP2402293A1 PROCESS FOR PRODUCING POROUS QUARTZ GLASS OBJECT, AND OPTICAL MEMBER FOR EUV LITHOGRAPHY 审中-公开
标题翻译：方法生产用于EUV光刻的多孔QUARZGLAS点和光学元件
公开(公告)号：EP2402293A1
公开(公告)日：2012-01-04
申请号：EP10746232.7
申请日：2010-02-24
申请人： Asahi Glass Company, Limited
发明人： MITSUMORI Takahiro , IWAHASHI Yasutomi , KOIKE Akio
IPC分类号： C03B8/04 , C03B20/00 , C03C3/06 , G03F1/16 , G03F7/20 , H01L21/027
CPC分类号： C03B19/1423 , C03B2201/42 , C03B2207/06 , C03B2207/20 , C03C3/06 , C03C2201/42 , C03C2203/44
摘要： The present invention relates to a process for producing a porous quartz glass body containing hydrolyzing a metal dopant precursor and an SiO 2 precursor in a flame of a burner to form glass fine particles, and depositing and growing the formed glass fine particles on a base material, in which the burner has at least two nozzles, and in which a mixed gas containing (A) a metal dopant precursor gas, (B) an SiO 2 precursor gas, (C) one gas of H 2 and O 2 , and (D) one or more gases selected from the group consisting of a rare gas, N 2 , CO 2 , a hydrogen halide and H 2 O, with a proportion of the gas (D) being from 5 to 70 mol%; and (E) the other gas of H 2 and O 2 of (C), are fed into different nozzles of the burner from each other.
摘要翻译：本发明涉及一种用于在基材上制造多孔石英玻璃体含在燃烧器以形成玻璃微粒的火焰水解的金属掺杂剂前体和SiO 2前体，以及沉积和生长所形成的玻璃微粒，其中，所述燃烧器具有至少两个喷嘴，并且其中在SiO 2的前体气体，（C）的H 2和O 2一种气体，并混合气体含有（A）的金属掺杂剂前体气体，（B）（ D）一种或选自稀有气体，N 2，CO 2，卤化氢和H 2 O，与为5〜70摩尔％的气体（D）的比例选择多种气体; 和（e）的H 2和（C）的O 2的其它气体被送入从海誓山盟燃烧器的不同喷嘴。

9. 发明公开

EP2208715A2 Method of producing synthetic quartz glass for excimer laser 有权
标题翻译： Verfahren zur Herstellung von synthetischem QuarzglasfürExcimer-Laser
公开(公告)号：EP2208715A2
公开(公告)日：2010-07-21
申请号：EP10250087.3
申请日：2010-01-19
申请人： Shin-Etsu Chemical Co., Ltd.
发明人： Maida, Shigeru c/oSpecilty Chical Research Center , Otsuka, Hisatou c/oSpecilty Chical Research Center
IPC分类号： C03B19/14
CPC分类号： C03B19/1453 , C03B19/1469 , C03B2201/075 , C03B2201/21 , C03B2207/20 , Y02P40/57
摘要： Disclosed is a method of producing a synthetic quartz glass for excimer laser by depositing on a target silica particulates obtained by subjecting a silica raw material to vapor-phase hydrolysis or oxidative decomposition in an oxyhydrogen flame in a vacuum sintering furnace to form a porous silica base material, vitrifying the porous silica base material, and subjecting the vitrified material to hot forming, an annealing treatment and a hydrogen doping treatment, wherein the vitrification of the porous silica base material includes: (a) a step of holding a vacuum pressure at or below 20.0 Pa in a temperature range from 400°C, inclusive, to 900°C, exclusive; (b) a step of holding a vacuum pressure at or below 10.0 Pa in a temperature range from 900°C, inclusive, to 1100°C, exclusive; and (c) a step of holding a vacuum pressure at or below 3.0 Pa in a temperature range from 1100°C to a transparent-vitrification temperature.
摘要翻译：公开了一种通过在真空烧结炉中在氧氢火焰中使二氧化硅原料进行气相水解或氧化分解而获得的目标二氧化硅微粒上沉积以制备准分子激光的合成石英玻璃的方法，以形成多孔二氧化硅基质材料，使多孔二氧化硅基材玻璃化，并对玻璃化物进行热成型，退火处理和氢掺杂处理，其中多孔二氧化硅基材的玻璃化包括：（a）将真空压力保持在或低于20.0Pa，温度范围为400℃以上，900℃以下; （b）在900℃以上至1100℃的温度范围内保持真空压力为10.0Pa以下的工序; 和（c）在1100℃至透明玻璃化温度的温度范围内保持真空压力等于或低于3.0Pa的步骤。

10. 发明公开

EP2098489A1 Method of fabricating an optical fiber preform and a burner therefor 审中-公开
标题翻译：一种用于生产预成型件的光学纤维和燃烧器的过程
公开(公告)号：EP2098489A1
公开(公告)日：2009-09-09
申请号：EP09002895.2
申请日：2009-02-27
申请人： Shin-Etsu Chemical Co., Ltd.
发明人： Yoshida, Makoto
IPC分类号： C03B37/014
CPC分类号： C03B37/01815 , C03B37/0142 , C03B37/018 , C03B2207/06 , C03B2207/20 , Y02P40/57
摘要： A method of fabricating an optical fiber preform, capable of depositing glass particles with high deposition rate without reducing deposition efficiency and fabricating an optical fiber preform having little bubbles using a burner having a simple structure, is provided. In the invention, a mixed gas of a glass raw material gas with a combustion assisting gas is ejected from an annular nozzle of a burner having a coaxially multiple tube structure, and a burnable gas is ejected from an inner nozzle located inside the annular nozzle. Alternatively, a mixed gas of a glass raw material gas with a burnable gas may be ejected from an annular nozzle, and a combustion assisting gas is ejected from an inner nozzle located inside the annular nozzle. In each case of the above, the burnable gas and the combustion assisting gas, respectively, are ejected from outer nozzles located outside the annular nozzle.
摘要翻译：制造上的光纤预制件，其能够沉积具有高沉积速率的玻璃颗粒不降低的沉积效率，并具有使用具有简单结构的燃烧器气泡少的光纤母材的制造的方法，提供了一种。在本发明中，玻璃原料气体与燃烧辅助气体的混合气体从在具有同轴多管结构的燃烧器的环形设计喷嘴喷出，以及一个可燃气体从位于环形设计喷嘴内的帧内喷嘴喷出。可替代地，具有可燃气体的玻璃原料气体的混合气体可以从环形设计的喷嘴喷出，以及一个燃烧辅助气体从位于环形设计喷嘴内的帧内喷嘴喷出。在上文中，可燃气体和助燃辅助气体的每种情况下，分别由位于环形设计喷嘴外部外喷嘴喷出。

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