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    • 4. 发明授权
    • VERFAHREN UND VORRICHTUNG ZUM ENTSALZEN VON MEERWASSER
    • 方法和设备海水淡化
    • EP0779829B1
    • 1998-12-23
    • EP95932662.0
    • 1995-09-04
    • HOISS, Jakob
    • HOISS, Jakob
    • B01D3/00B01D1/30B01D1/00B01D1/12C02F1/04
    • B01D1/007B01D1/0047B01D1/12B01D1/305B01D3/007C02F1/045Y02A20/128
    • The invention concerns a process for desalinating sea water, wherein the sea water is evaporated and condensed within a primary system (13) and a secondary medium (14), preferably untreated water, is evaporated and condensed within a self-enclosed secondary system which contains a condenser (66) and is spatially separate from the primary system. The sea water is evaporated as a result of being heated by contact with the secondary medium, which is previously heated to a greater degree at excess pressure in the condenser (66), the secondary medium being evaporated by condensation of the sea water vapour in the secondary system (11). The sea water vapour is passed through a cyclone. The entire flow of sea water fed to the primary system is divided into a first partial flow (23) and a second partial flow (24) which are at least approximately the same size. The first partial flow is heated to a temperature close to boiling temperature in the primary system in a first heat exchanger (28) through which hot water distillate flows at the primary system outlet, and the second partial flow is heated to this temperature in a second heat exchanger (38) through which the drawn-off hot sludge flows. The ratio of the total amount of sea water supplied per unit of time relative to the amount of sludge per unit of time (concentration factor CF) is between a value which is greater than 1 and less than 2. A process of this type is suitable for the thermal desalination of sea water, high-quality, sterilized water distillate being produced in an energy-saving manner with, simultaneously, a low concentration of the sea water to be evaporated.
    • 8. 发明公开
    • SYSTEM FOR SUPPLYING ULTRAPURE WATER AND METHOD OF WASHING SUBSTRATE, AND SYSTEM FOR PRODUCING ULTRAPURE WATER AND METHOD OF PRODUCING ULTRAPURE WATER
    • SYSTEM FOR纯水超,方法清洗于产生超纯水基板和系统和方法的供应。
    • EP0615790A1
    • 1994-09-21
    • EP92922998.7
    • 1992-11-09
    • OHMI, Tadahiro
    • OHMI, Tadahiro
    • B08B3/00H01L21/00C02F1/04
    • H01L21/67057B08B3/02B08B2230/01C02F1/045H01L21/6704Y10S210/90
    • An object of the present invention is to provide a method of washing a substrate, wherein even traces of impurities in minute and high-aspect-ratio trenches or holes can be washed and removed free from contamination by washing solution and a system and a method for producing ultrapure water, capable of producing ultrasuper pure water for use in the washing. The present invention is characterized in that, at the intermediate portions of a piping (7) for supplying a predetermined ultrapure water to a use point, there are provided: a first steam generating means (1) for heating a first ultrapure water for conversion into a first steam; a steam heating means (3) for further heating the first steam for conversion into a second steam higher in temperature than the first steam; and a cooling means (5) for cooling the second steam for conversion into a second ultrapure water.
    • 本发明的一个目的是提供一种清洗一基片,worin即使在分钟和高纵横比的沟槽或孔的杂质的迹线的方法,可以洗涤,洗涤溶液的系统和一种方法无污染物去除 生产超纯水,能生产的超超纯净水在清洗使用。 本发明是在供给规定超纯水至使用点为特征的,在管道(7)的中间部,设置有:第一蒸汽发生装置(1)用于加热第一超纯水以转换成 第一蒸汽; 蒸汽加热装置(3),用于在温度比所述第一蒸汽进一步加热所述第一蒸汽用于转换成一个第二蒸汽更高; 和冷却装置(5),用于冷却用于转换的第二蒸汽进入第二超纯水。