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1. 发明授权

EP3549704B1 POWER-DRIVEN TOOL 有权
公开(公告)号：EP3549704B1
公开(公告)日：2024-07-17
申请号：EP17876106.0
申请日：2017-10-27
IPC分类号： B23D59/02 , B23D47/12 , B23D45/04 , B24B21/18 , B27B5/20 , B25F5/00
CPC分类号： B23D45/04 , B23D47/12 , B24B21/18 , B27B5/20 , B25F5/008

2. 发明公开

EP2476512A1 Bandabblasvorrichtung 有权
公开(公告)号：EP2476512A1
公开(公告)日：2012-07-18
申请号：EP12151364.2
申请日：2012-01-17
申请人： Bütfering Schleiftechnik GmbH
发明人： Settele, Martin , Bettermann, Thomas
IPC分类号： B24B21/18 , B24B55/00 , B24B55/08
CPC分类号： B24B21/18 , B24B55/08
摘要： Bandabblasvorrichtung 1 für ein Schleifaggregat 2 mit einer Schleifeinrichtung 3 zum Bearbeiten eines Werkstücks 4, mit einer Düsenanordnung 8 umfassend eine Vielzahl von Düsen 12 zum Ausblasen von Luft, welche in Bezug auf deren Laufrichtung L quer über der Schleifeinrichtung 3 angeordnet ist und auf die Schleifeinrichtung 3 gerichtet ist, wobei die Düsenanordnung 8 zumindest eine Leitungseinrichtung umfasst, die Druckluft zu den Düsen 12 leitet. Ferner umfasst die Bandabblasvorrichtung eine Steuereinrichtung, die das Ausblasen der Druckluft aus der Düsenanordnung 8 steuert. Die Düsenanordnung 8 weist mehrere Düsenreihen 10 auf, von denen bevorzugt zumindest zwei zueinander versetzt sind, und die Steuereinrichtung ist eingerichtet, zumindest zwei Düsenreihen 10 unabhängig voneinander zu betreiben.
摘要翻译： Bandabblasvorrichtung 1用于砂光单元2的研磨装置3用于加工工件4，具有喷嘴装置8包括多个喷嘴12的吹送空气，这是横跨磨削装置3和研磨机3设置成相对于运行方向L 被引导，其中所述喷嘴组件8包括至少一个导管装置引导压缩空气到喷嘴12 此外，Bandabblasvorrichtung包括控制吹出从所述喷嘴组件的压缩空气的控制装置。8 喷嘴组件8具有多个喷嘴列10，其中优选至少两个彼此偏移的，并且所述控制装置被配置为独立地操作的喷嘴10的至少两行。

3. 发明授权

EP1990134B1 Bearbeitungsvorrichtung mit einem Schleifwerkzeug 失效
标题翻译：用研磨工具处理装置
公开(公告)号：EP1990134B1
公开(公告)日：2010-11-24
申请号：EP08008729.9
申请日：2008-05-09
申请人： Heesemann, Jürgen
发明人： Heesemann, Jürgen
IPC分类号： B24B21/18
CPC分类号： B24B21/18

4. 发明授权

EP1946888B1 Dispositif de stockage et de distribution de bandes travaillantes sans fin pour une installation robotisée 有权转让
标题翻译：对于一个机器人系统的环形传送带的存储和分发装置
公开(公告)号：EP1946888B1
公开(公告)日：2009-07-22
申请号：EP07291630.7
申请日：2007-12-27
申请人： SNECMA
发明人： L'Helgoualch, Carole Denise Marthe , Pereira, Paul Alexandre
IPC分类号： B24B21/18
CPC分类号： B24B21/18

5. 发明授权

EP1469971B1 GROOVED ROLLERS FOR A LINEAR CHEMICAL MECHANICAL PLANARIZATION SYSTEM 有权
标题翻译：槽辊轧线性CMP系统
公开(公告)号：EP1469971B1
公开(公告)日：2007-09-19
申请号：EP02792494.3
申请日：2002-12-20
申请人： LAM RESEARCH CORPORATION
发明人： CANGSHAN, Xu
IPC分类号： B24B7/22 , B24B21/04
CPC分类号： B24B37/26 , B24B21/04 , B24B21/18
摘要： In a linear chemical mechanical planarization (CMP) systems (114), a surface of each roller (160a), (160b) of a pair of rollers is disclosed which includes a first set of grooves (150a) covering a first portion of the surface of the roller where the first set of grooves (150a) has a first pitch that angles outwardly toward a first outer edge of the roller. The surface also includes a second set of grooves (150b) covering a second portion of the surface of the roller where the second set of grooves (150b) has a second pitch that angles outwardly toward a second outer edge of the roller with the second pitch angling away from the first pitch. The surface further includes a first set of lateral channels (202a) arranged along the first portion, and a second set of lateral channels (202b) arranged along the second portion. The first set of lateral channels (202a) crosses the first set of grooves (150a), and the second set of lateral channels (202b) crosses the second set of grooves (150b).

6. 发明授权

EP1105252B1 WERKZEUGTRÄGER 有权
标题翻译：刀架
公开(公告)号：EP1105252B1
公开(公告)日：2007-02-14
申请号：EP00943868.0
申请日：2000-06-23
申请人： Gerd Eisenblätter GmbH
发明人： EISENBLÄTTER, Gerd
IPC分类号： B24D9/04 , B24D9/08 , B24D13/20 , B24D18/00
CPC分类号： B24D9/003 , B24B21/18 , B24D9/04 , B24D13/02 , B24D13/04
摘要： The invention relates to a fiber-reinforced rotationally symmetrical tool holder (7), a production method and a grinding tool. The tool holder (7) can be detachably connected to a rotational drive mechanism and has a tool support surface (9) for receiving a grinding, roughing and/or polishing element (5). The tool holder (7) and the grinding tool (5) are provided with a fiber reinforcement consisting at least partially of natural fibers (31).

7. 发明公开

EP1052059A3 Method for chemical mechanical planarization 审中-公开
标题翻译：一种用于化学机械平面化方法
公开(公告)号：EP1052059A3
公开(公告)日：2001-01-24
申请号：EP00303703.3
申请日：2000-05-03
申请人： Applied Materials, Inc.
发明人： Tietz, James T. , Li, Shijian , Birang, Manoocher , White, John M. , Rosenberg, Lawrence M. , Scales, Martin , Emami, Ramin
IPC分类号： B24B37/04 , B24B21/04 , B24B21/18
CPC分类号： B24B37/16 , B24B1/04 , B24B21/04 , B24B21/18 , B24B37/12 , B24B37/20 , B24B49/14 , B24B55/02 , B24B57/02 , H01L21/30625
摘要： A semiconductor substrate processing system for polishing a substrate that generally includes a platen (10,12) and a web (1104) of polishing material disposed thereon. Embodiments of the system include a disposable cartridge (1002) for housing the web of polishing material, a shield member (256) disposed proximate the web for preventing contamination of the unused portion of the web, a fluid delivery system (184,186) for fixing and freeing the web from the platen, apparatus (1402) for controlling the lateral movement of the web, and an apparatus (304,306) for providing more linear feet of polishing material per height of a roll.

8. 发明公开

EP1052061A2 System for chemical mechanical planarization 审中-公开
标题翻译：用于化学机械Planarizieren的装置
公开(公告)号：EP1052061A2
公开(公告)日：2000-11-15
申请号：EP00303716.5
申请日：2000-05-03
申请人： Applied Materials, Inc.
发明人： Tietz, James T. , Li, Shijian , Birang, Manoocher , White, John M. , Rosenberg, Lawrence M. , Scales, Martin , Emami, Ramin
IPC分类号： B24B37/04 , B24B49/14 , H01L21/306
CPC分类号： B24B57/02 , B24B21/04 , B24B21/18 , B24B37/12 , B24B49/14 , B24B55/02 , H01L21/30625
摘要： A semiconductor substrate processing system for polishing a substrate includes a platen (23) and a web (252) of polishing material disposed thereon. The system include a first fluid delivery arm (154) and a second fluid delivery arm (156) respectively adapted to dispose a first and a second polishing fluid on the polishing material. A sensor (226) produces a signal indicative of the temperature of the polishing process. An analyzer for determining a polishing metric from a polishing fluid disposed on the polishing material. A method for processing comprises the steps of sensing an indicia of a polishing metric, and regulating a rate of material removal. The step of regulating the rate of material removal may comprise steps such as changing the temperature of a fluid circulated and changing the chemistry of the polishing fluids. The step of sensing the indicia may include analyzing the effluent and sensing temperature.

9. 发明授权

EP0573826B1 Motorgetriebener Handbandschleifer 失效
公开(公告)号：EP0573826B1
公开(公告)日：1997-01-02
申请号：EP93108152.5
申请日：1993-05-19
申请人： ROBERT BOSCH GMBH
发明人： Wünsch, Steffen, Dipl.-Ing. , Stierle, Peter , Kemmner, Claus, Dipl.-Ing. , Braunbach, Karl-Heinz, Dipl.-Ing. , Boeck, Cornelius , Färber, Herbert , Fuchs, Rudolf
IPC分类号： B24B23/06 , B24B21/18
CPC分类号： B24B23/06 , B24B21/18

10. 发明授权

EP0614727B1 Automatic belt-inserter device 失效
标题翻译：自动带插入装置
公开(公告)号：EP0614727B1
公开(公告)日：1996-05-22
申请号：EP93110253.7
申请日：1993-06-28
申请人： COSTA LEVIGATRICI SPA
发明人： Bau', Eligio , Costa, Luciano
IPC分类号： B24B57/00 , B24B21/18
CPC分类号： B24B21/18

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