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    • 6. 发明公开
    • METHODS OF FORMING SOLAR CELLS
    • 形成太阳能电池的方法
    • EP2912694A1
    • 2015-09-02
    • EP13848914.1
    • 2013-10-24
    • Tetrasun, Inc.
    • CRAFTS, Douglas, E.SCHULTZ-WITTMANN, OliverTURNER, Adrian, B.Ong, Qin Yang
    • H01L31/04H01L31/0236H01L31/18
    • H01L31/18H01L31/02008H01L31/02168H01L31/022425H01L31/02363Y02E10/50
    • Methods of fabricating conductive patterns over a solar cell structure are provided, in which a patterned resist layer is provided over an anti-reflective coating layer formed over a solar cell structure. The patterned resist layer is used to etch the exposed portion of the anti-reflective coating, and a metal seed layer is provided over the resist layer and the exposed portion of the solar cell structure's surface. The metal seed layer is selectively removed from over the patterned resist layer without removal from the exposed portion of the surface of the solar cell structure. Different thermal conductivities of the patterned resist layer and the solar cell structure's surface facilitate the selective removal of the seed layer from over the resist layer. Also provided are methods of facilitating simultaneous fabrication of conductive patterns over a plurality of solar cell structures using one or more frame structures.
    • 提供了在太阳能电池结构上制造导电图案的方法,其中在太阳能电池结构上形成的抗反射涂层上提供图案化的抗蚀剂层。 使用图案化的抗蚀剂层来蚀刻抗反射涂层的暴露部分,并且在抗蚀剂层和太阳能电池结构的表面的暴露部分上提供金属种子层。 从图案化的抗蚀剂层上选择性地去除金属种子层,而不从太阳能电池结构的表面的暴露部分移除。 图案化的抗蚀剂层和太阳能电池结构表面的不同导热性有助于选择性地从抗蚀剂层上去除籽晶层。 还提供了促进使用一个或多个框架结构在多个太阳能电池结构上同时制造导电图案的方法。