专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明公开

EP1843388A1 SUBSTRATE SURFACE TREATING APPARATUS 审中-公开
标题翻译： SUBSTRATOBERFLÄCHEN-BEHANDLUNGSVORRICHTUNG
公开(公告)号：EP1843388A1
公开(公告)日：2007-10-10
申请号：EP05819956.3
申请日：2005-12-22
申请人： KABUSHIKI KAISHA WATANABE SHOKO
发明人： Umeda, Masaru c/o Kabushiki Kaisha Watanabe Shoko
IPC分类号： H01L21/205 , C23C16/44 , H01L21/304
CPC分类号： C23C16/4557 , C23C16/45565 , H01L21/67109
摘要： There is provided a substrate surface treating apparatus by which the temperature of a carrier gas can be increased high and thus treatment can be more uniformly performed. An upstream ring is connected to a heating medium inlet for applying a prescribed heating medium, and a downstream ring is connected to a heating medium outlet for ejecting the heating medium. A plurality of heat transmitting paths are connected to the upstream ring and the downstream ring by having flow directions of the adjacent heating medium reaching the downstream ring from the upstream ring are opposite, and a gas is used as the heating medium.
摘要翻译：提供了一种基板表面处理装置，通过该装置可以使载气的温度升高，从而可以更均匀地进行处理。上游环连接到用于施加规定加热介质的加热介质入口，并且下游环连接到用于喷射加热介质的加热介质出口。通过使相邻的加热介质从上游环到达下游环的流动方向相反，多个传热路径连接到上游环和下游环，并且使用气体作为加热介质。

2. 发明公开

EP1533835A1 VAPORIZER, VARIOUS APPARATUSES INCLUDING THE SAME AND METHOD OF VAPORIZATION 审中-公开
标题翻译： VERDAMPFER，VERSCHIEDENE，DIESEN ENTHALTENDE VORRICHTUNGEN UND VERDAMPFUNGSVERFAHREN
公开(公告)号：EP1533835A1
公开(公告)日：2005-05-25
申请号：EP03733161.8
申请日：2003-05-29
申请人： KABUSHIKI KAISHA WATANABE SHOKO , Toda, Masayuki
发明人： TODA, Masayuki , UMEDA, Masaru, KABUSHIKI KAISHA WATANABE SHOKO
IPC分类号： H01L21/205
CPC分类号： C23C16/40 , C23C16/4481 , C23C16/4486 , H01L21/6708
摘要： There is provided a vaporizer which can be used for a long period of time without being clogged and can supply a raw material stably to a reaction section. An object of the present invention is to provide a vaporizer which can supply a raw material adjusted to a stoichiometric ratio continuously and stably and has an effect of decreasing the quantity of residual carbon in a formed film, a disperser, a film forming apparatus, and a vaporizing method, and a dispersing method and a film forming method. The vaporizer for vaporizing a raw material solution contained in a carrier gas is characterized in that means for containing a solvent for the raw material solution in the carrier gas before containing the raw material solution is provided.
摘要翻译：提供了一种长时间使用而不被堵塞并可将原料稳定地供应到反应段的蒸发器。本发明的目的是提供一种蒸发器，其能够连续稳定地供给调整为化学计量比的原料，并且具有减少成形膜，分散器，成膜装置中的残留碳量的效果蒸发法，分散方法和成膜方法。用于汽化包含在载气中的原料溶液的蒸发器的特征在于，在包含原料溶液之前，提供了用于在载气中含有原料溶液的溶剂的装置。

3. 发明公开

EP1363320A1 FERROELECTRIC THIN FILM, METAL THIN FILM OR OXIDE THIN FILM, AND METHOD AND APPARATUS FOR PREPARATION THEREOF, AND ELECTRIC OR ELECTRONIC DEVICE USING SAID THIN FILM 审中-公开
标题翻译： “FERRO ELECTRIC薄膜金属薄膜的氧化物薄膜和方法以及制造装置技术ITS和电气或电子元件WITH THIN FILM”
公开(公告)号：EP1363320A1
公开(公告)日：2003-11-19
申请号：EP02715794.0
申请日：2002-01-18
申请人： KABUSHIKI KAISHA WATANABE SHOKO , Toda, Masayuki
发明人： YAMOTO, Hisayoshi, WACOM ELECTRIC CO., LTD , TODA, Masayuki , FUKAGAWA, Mitsuru, WACOM ELECTRIC CO, LTD , UMEDA, Masaru, KABUSHIKI KAISHA WATANABE SHOKO , FUKAGAWA, Mitsuru, c/o WACOM ELECTRIC CO., LTD
IPC分类号： H01L21/316 , H01L21/31
CPC分类号： H01L27/11502 , C23C16/40 , C23C16/4486 , H01L21/31691 , H01L27/11507 , H01L28/55
摘要： The object of the present invention is to provide a ferroelectric thin film that has the best range of the composition where an excellent remanent polarization characteristic is obtained and, at the same time, has a bismuth type layered crystal structure with high reliability.
The ferroelectric thin film of the present invention is a ferroelectric thin film of layered crystal structure comprising at least-tantalum and oxygen (O) among carbon, Strontium (Sr), bismuth (Bi), tantalum (Ta), and niobium (Nb), characterized by assuming the composition formula to be SrBi y Ta 2 O 9±d or Sr x Bi y (Ta,Nb) 2 O 9±d (provided that, 0.90≦x
摘要翻译：本发明的目的是提供一种铁电薄膜确实具有这样优异的保持性偏振特性得到，并且同时，具有可靠性高的铋型层状晶体结构的组合物的最佳范围内。的本发明的强电介质薄膜是层状晶体结构的铁电薄膜，其含有碳中的至少 - 钽和氧（O），锶（Sr），铋（Bi），钽（Ta）和铌（Nb），通过假设组成式为SrBiyTa2O9 +/- d或SrxBiy（钽，铌）2O9 +/-ð表征（条件是，0.90

4. 发明公开

EP1018477A1 AIR STREAM TRANSFER APPARATUS 失效
标题翻译： LUFTSTROMÜBERTRAGUNGSVORRICHTUNG
公开(公告)号：EP1018477A1
公开(公告)日：2000-07-12
申请号：EP98917684.7
申请日：1998-04-24
申请人： KABUSHIKI KAISHA WATANABE SHOKO , Kabushiki Kaisha Tomco
发明人： YAGAI, Michio , TODA, Masayuki , UMEDA, Masaru, Kabushiki Kaisha Watanabe Shoko
IPC分类号： B65G51/00 , B65G51/02 , B65G51/03 , B65G45/10 , B65G49/07 , H01L21/68
CPC分类号： H01L21/67784
摘要： Air stream transfer apparatus capable of preventing particles in a transfer passage from adhering to an object to be processed and removing the particles.
The apparatus is characterized in that a transfer face and a transfer passage partition both constituting a transfer passage are made of an electroconductive material and each have a thin insulating layer on the surface; a planer dust collecting electrode is opposed to an object to be processed; means is provided for bringing the dust collecting electrode and the face to be cleared of dust close to each other while jetting air; and means is provide for applying voltages between the transfer face and the dust collecting electrode and between the transfer passage partition and the dust collecting electrode. Another apparatus is characterized in that a transfer face and a transfer passage partition both constituting a transfer passage are made of an electroconductive material and each has a thin insulating layer on the surface; means for transferring a pre-charged semiconductive plate-shaped body a float along the transfer passage is provided; and the semiconductive plate-shaped body is used as a dust collecting electrode.
摘要翻译：能够防止传送路径中的粒子附着于待处理物体并除去粒子的气流输送装置。该装置的特征在于，构成传送通道的传送面和传送通道隔板由导电材料制成，并且每个在表面上具有薄的绝缘层; 平板式集尘电极与待处理物体相对; 提供了用于使灰尘收集电极和被清除的灰尘彼此靠近的同时喷射空气的装置; 并且提供用于在转印面和集尘电极之间以及转印通道分隔件和集尘电极之间施加电压的装置。另一种装置的特征在于，构成传送通道的传送面和传送通道隔板由导电材料制成，并且每个在表面上具有薄的绝缘层; 提供了用于沿着传送通道传送预充电的半导体板状体浮子的装置; 并且半导体板状体用作集尘电极。

5. 发明公开

EP1005076A1 FLOATING APPARATUS OF SUBSTRATE 失效
标题翻译： SUBSTRATSCHWIMMVORRICHTUNG
公开(公告)号：EP1005076A1
公开(公告)日：2000-05-31
申请号：EP98907223.6
申请日：1998-03-13
申请人： KABUSHIKI KAISHA WATANABE SHOKO , Toda, Masayuki
发明人： TODA, Masayuki , UMEDA, Masaru, K. Kaisha Watanabe Shoko , KANNO, Yoichi , OHMI, Tadahiro
IPC分类号： H01L21/68 , B23Q3/08
CPC分类号： H01L21/6838
摘要： It is an object of the present invention to provide a substrate body floating apparatus which insures a stable floating state of a substrate body with less vibration of a rotation axis or a surface thereof and a heater and a film-forming apparatus capable of forming a homogeneous film without losing cleanliness of a surface of a substrate body and with small temperature gradation on a surface of a substrate body as well as small density gradation of a raw material used for forming a film on a substrate body in a wide area.
The substrate body floating apparatus according to the present invention has a floating unit for floating and rotating a disk-shaped substrate body by blowing an air flow to a rear surface of the substrate body, said floating unit comprising a group of fine pores for floating the substrate body, a group of fine pores for fixing the substrate body at a center of the apparatus, a group of fine pores for rotating the substrate body at a center of the apparatus, and a group of auxiliary fine pores for suppressing vibration of the substrate body when the substrate body is rotated at a high speed. Also the substrate body floating type of heater and film-forming apparatus have the floating unit described above respectively.
摘要翻译：本发明的目的是提供一种基板体浮动装置，其确保基板主体的稳定的浮动状态，其具有较少的旋转轴线或其表面的振动，以及加热器和能够形成均匀的膜形成装置薄膜，而不损害基板表面的清洁度，并且在基板主体的表面上具有较小的温度梯度，以及在广泛区域中用于在基板主体上形成薄膜的原料的小密度等级。根据本发明的基板体浮置装置具有浮动单元，用于通过向基板主体的后表面吹送空气流来浮动和旋转盘形基板主体，所述浮动单元包括一组用于浮动的基板基板主体，用于将基板固定在设备的中心的一组细孔，用于使基板主体在设备的中心旋转的一组细孔和一组用于抑制基板的振动的辅助细孔当基板主体高速旋转时，基板体浮动式的加热器和成膜装置也分别具有上述浮动单元。

6. 发明授权

EP0557523B1 DEVICE FOR CARRYING THIN PLATE-LIKE SUBSTRATE 失效
标题翻译：安排呈薄板形式传输SUBSTRATES
公开(公告)号：EP0557523B1
公开(公告)日：1997-08-20
申请号：EP91918908.4
申请日：1991-10-28
申请人： KABUSHIKI KAISHA WATANABE SHOKO
发明人： TODA, Masayuki, 7-139, Higashi 2-chome , ONODA, Takashi, Yamagata University Kogakubu , OHMI, Tadahiro, 1-17-301, Komegabukuro 2-chome , UMEDA, Masaru, Kabushiki-Kaisha Watanabe Shoko , KANNO, Yoichi, Kabushiki-Kaisha Motoyama
IPC分类号： H01L21/68
CPC分类号： H01L21/67787 , B65G51/03 , H01L21/67784 , Y10S414/135 , Y10S414/136
摘要： A device for carrying a thin plate-like substrate such as a semiconductor wafer and controlling its position by floating it with an inert gas of low impurity concentration. A transferring unit and a controlling unit are respectively provided with gas nozzles for floating a thin plate-like substrate and with a gas exhausting and circulating system, and a plurality of them are in combination with each other in a sealing state. The controlling unit, further, has a vacuum suction hole at its controlling center, and is provided with nozzles for controlling the thin plate-like substrate in its radial and cirumferential direction respectively and with nozzles for stopping the thin plate-like substrate or sending out it to the next unit too. On the bottom face of a control space, grooves extending from the vacuum suction hole are formed for improving the positional accuracy of stopping the thin plate-like substrate, and they are closed on the insides of their circumferential parts when the center of the thin plate-like substrate has coincided with the controlling center of the controlling unit.

7. 发明授权

EP1361610B1 VAPORIZER AND DEPOSITION DEVICE USING THE SAME 有权
标题翻译：蒸发器和BESCHICTUNGSVORRICHTUNG与蒸发器
公开(公告)号：EP1361610B1
公开(公告)日：2011-11-30
申请号：EP02715811.2
申请日：2002-01-18
申请人： KABUSHIKI KAISHA WATANABE SHOKO , Toda, Masayuki
发明人： Toda, Masayuki , Kusuhara, Masaki c/o KABUSHIKI KAISHA WATANABE SHOKO , UMEDA, Masaru c/o KABUSHIKI KAISHA WATANABE SHOKO , FUKAGAWA, Mitsuru, c/o WACOM ELECTRIC CO., LTD
IPC分类号： H01L23/31 , C23C16/40 , B01B1/00 , B01F3/04 , B01D1/16
CPC分类号： H01L27/11502 , B01B1/005 , B01D3/346 , B01F3/04021 , B01F5/0646 , B01F5/0653 , B01F5/0656 , B01F5/0671 , B01F5/0676 , C23C16/40 , C23C16/409 , C23C16/4486 , H01L21/31691 , H01L27/11507 , H01L28/55 , Y10S261/65
摘要： A carburetor usable for long period without causing a clogging and capable of stably feeding raw material to a reaction part, comprising a diffusion part (8) having a gas passage (2) formed inside a diffusion part body (1), a gas inlet (4) for leading pressurized carrier gas (3) into the gas passage (2), a means (6) for feeding raw material solution (5) into the carrier gas passing through the gas passage (2), a gas outlet (7) for feeding the carrier gas including the diffused raw material solution (5) to a vaporization part (22), and a means (18) for cooling the carrier gas flowing through the inside of the gas passage (2), and a radiation prevention part (102) having a vaporization tube (20) connected to the reaction part of a device and the gas outlet (7) of the diffusion part (8), a heater (21) for heating the vaporization tube (20), a vaporization part (22) for heating and vaporizing the carrier gas having raw material solution distributed therein, and a small hole (101) provided on the outside of the gas outlet (7).

8. 发明公开

EP1770032A1 LEVITATION TRANSPORTATION DEVICE AND LEVITATION TRANSPORTATION METHOD 审中-公开
标题翻译： SCHWEBETRANSPORTVORRICHTUNG UND SCHWEBETSPORTVERFAHREN
公开(公告)号：EP1770032A1
公开(公告)日：2007-04-04
申请号：EP05753450.5
申请日：2005-06-22
申请人： KABUSHIKI KAISHA WATANABE SHOKO , Toda, Masayuki
发明人： TODA, Masayuki , UMEDA, Masaru, KABUSHIKI KAISHA WATANABE SHOKO
IPC分类号： B65G51/03 , B65G47/28 , B65G49/07 , H01L21/68
CPC分类号： B65G51/03 , B65G47/24 , H01L21/67784
摘要： A levitation transportation device capable of adjustment when an object being transported is displaced from the center of a transportation path, A levitation transportation device having a transportation path forming a transportation router for an object to be transported, a plurality of jetting nozzles for transporting the object in a levitated manner along the transportation path, one or more detection sections for detecting the direction of the transportation of the object being transported in the transportation path and a control section for independently controlling the plurality of jetting nozzles based on a detection result by the detection sections.
摘要翻译：一种能够在被输送物体从输送路径的中心偏移时能够进行调节的悬浮输送装置，具有形成用于被输送物体的输送路线器的输送路径的悬浮输送装置，用于输送被检体的多个喷射喷嘴沿着传送路径以悬浮方式，一个或多个检测部分，用于检测传送路径中被传送物体的传送方向;以及控制部分，用于根据检测结果独立地控制多个喷嘴部分。

9. 发明公开

EP1608005A1 VAPORIZER, FILM FORMING APPARATUS INCLUDING THE SAME, METHOD OF VAPORIZATION AND METHOD OF FORMING FILM 审中-公开
标题翻译： VERDAMPFER，FILMERZEUGUNGSVORRICHTUNG DAMIT，VERDAMPFUNGSVERFAHREN UND FILMBILDUNGSVERFAHREN
公开(公告)号：EP1608005A1
公开(公告)日：2005-12-21
申请号：EP04718432.0
申请日：2004-03-08
申请人： KABUSHIKI KAISHA WATANABE SHOKO
发明人： YAMOTO, Hisayoshi, c/o Wacom Electric Co., Ltd , AKUTO, Kazuya, c/o Wacom Electric Co., Ltd. , NAGAOKA, Ken, c/o Wacom Electric Co., Ltd. , KOBAYASHI, Hitoshi, c/o Wacom Electric Co., Ltd. , SHOJI, Masafumi, c/o Wacom Electric Co., Ltd. , FUKAGAWA, Mitsuru, c/o Wacom Electric Co., Ltd.
IPC分类号： H01L21/205 , H01L21/31 , C23C16/448
CPC分类号： C23C16/448
摘要： It is aimed at providing a vaporization apparatus and a vaporization method capable of keeping track of a progressive condition of clogging of the apparatus. It is also aimed at providing a vaporization apparatus and a vaporization method capable of eliminating clogging prior to occurrence of complete clogging, without disassembling the apparatus. It provides a vaporization apparatus for introducing a carrier gas from one end of a gas passage and for feeding, the carrier gas including a material solution, from the other end of the gas passage to a vaporization part to thereby vaporize the material solution, characterized in that a mass flow controller (MFC) is provided at the one end of the gas passage, and means for detecting a pressure within the gas passage is provided. The vaporization apparatus is characterized in that the same is provided with means for introducing a chemical solution capable of dissolving therein matters deposited or sticked to the inside of the gas passage, into the gas passage.
摘要翻译：其目的在于提供能够跟踪装置堵塞的进行状态的蒸发装置和蒸发方法。还旨在提供一种能够在发生完全堵塞之前消除堵塞而不拆卸设备的蒸发装置和蒸发方法。它提供了一种用于从气体通道的一端引入载气并用于将包括材料溶液的载气从气体通道的另一端引入蒸发部分从而汽化该材料溶液的蒸发装置，其特征在于，在气体通道的一端设置质量流量控制器（MFC），并且提供用于检测气体通道内的压力的装置。蒸发装置的特征在于，具有将能够溶解在气体通道内侧的物质溶解在气体通路内的化学溶液的装置。

10. 发明公开

EP0747931A3 Sheet-like base carrying method 失效
标题翻译： Methode zum Transportieren von Substraten mitplattenförmigerGrundlage
公开(公告)号：EP0747931A3
公开(公告)日：1997-05-02
申请号：EP96113991.2
申请日：1991-10-28
申请人： KABUSHIKI KAISHA WATANABE SHOKO
发明人： Toda, Masayuki , Onoda, Takashi, c/o Yamagata University Kogakubu , Ohmi, Tadahiro , Umeda, Masaru Kabushiki-Kaisha Watanabe Shoko 2-16 , Kanno, Yoichi Kabushiki-Kaisha, Motoyama
IPC分类号： H01L21/00
CPC分类号： H01L21/67787 , B65G51/03 , H01L21/67784 , Y10S414/135 , Y10S414/136
摘要： A sheet-like base carrying method for carrying a sheet-like base with a sheet-like base carrying device in which a plurality of transfer units having a transfer space to allow the sheet-like base to advance linearly and a plurality of control units having a control space to control the movement of the sheet-like base, are combined in an airtight condition, said sheet-like base carrying method is characterized in that a current of inert gas, the impurity concentration of which is not more than several ppb, is used when the sheet-like base is carried with the sheet-like base carrying device.
摘要翻译：用于承载诸如半导体晶片的薄板状基板的装置，并通过使用低杂质浓度的惰性气体漂浮来控制其位置。传送单元和控制单元分别设置有用于浮动薄板状基板和排气循环系统的气体喷嘴，并且多个它们在密封状态下彼此组合。另外，控制单元在其控制中心具有真空吸引孔，并且设置有用于分别在其径向和圆周方向上控制薄板状基板的喷嘴和用于停止薄板状基板的喷嘴或发出它也到下一个单位。在控制空间的底面，形成有从真空吸引孔延伸出的槽，用于提高停止薄板状基板的位置精度，并且当薄板的中心部分在其周向部分的内侧封闭时样基板与控制单元的控制中心一致。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式