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    • 9. 发明公开
    • Package structure of photoelectronic device and fabricating method thereof
    • 组件,其具有一个发光装置及其制造方法
    • EP2053667A2
    • 2009-04-29
    • EP08167507.6
    • 2008-10-24
    • Advanced Optoelectronic Technology Inc.
    • Tseng, Wen LiangChen, Lung HsinTsang, Jian Shihn
    • H01L33/00
    • H01L33/486H01L31/0203H01L33/60H01L33/62H01L33/641H01L2224/48091H01L2924/10253H01L2924/1461H01L2924/00014H01L2924/00
    • A package structure for photoelectronic devices (31A) comprises a silicon substrate (11), a first insulating layer (21A,21B), a reflective layer (22A,22B), a second insulating layer (23A,23B), a first conductive layer (121,122), a second conductive layer (131,132) and a die (31A). The silicon substrate (11) has a first surface (111) and a second surface (112), wherein the first surface (111) is opposed to the second surface (112). The first surface (111) has a reflective opening (16), and the second surface (112) has at least two electrode via holes (17,18) connected to the reflective opening (16) and a recess (19) disposed outside the electrode via holes (17,18). The first insulating layer (21A,21B) overlays the first surface (111), the second surface (112) and the recesses (19). The reflective layer (22A,22B) is disposed on the reflective opening (16). The second insulating layer (23A,23B) is disposed on the reflective layer (22A,22B). The first conductive layer (121,122) is disposed on the surface of the second insulating layer (23A,23B). The second conductive layer (131,132) is disposed on the surface of the second surface (112) and inside the electrode via holes (17,18). The die (31A) is fixed inside the reflective opening (16) and electrically connected to the first conductive layer (121,122).
    • 用于光电子器件的封装结构(31A)包括硅衬底(11),一个第一绝缘层(21A,21B),反射层(22A,22B),第二绝缘层(23A,23B),第一导电层 (121122),第二导电层(131,132)和一个是(31A)。 硅衬底(11)具有第一表面(111)和第二表面(112)worin所述第一表面(111)相对着的第二表面(112)。 所述第一表面(111)具有反射开口(16)和第二表面(112)具有至少两个通孔连接到所述反射开口(16)和凹部(19)的外部所设置的电极(17,18) 通孔电极(17,18)。 第一绝缘层(21A,21B)覆盖第一表面(111),所述第二表面(112)和凹部(19)。 反射层(22A,22B)被设置在反射开口(16)。 第二绝缘层(23A,23B)被设置在反射层(22A,22B)上。 所述第一导电层(121,122)被设置在第二绝缘层(23A,23B)的表面上。 第二导电层(131,132)被设置在第二表面(112)的表面上和通孔电极(17,18)的内部。 模具(31A)被固定在反射开口(16)和电连接到所述第一导电层(121,122)的内部。