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1. 发明公开

EP1679733A3 X-ray microscopic inspection apparatus 审中-公开
标题翻译：透视显微检查装置
公开(公告)号：EP1679733A3
公开(公告)日：2007-04-04
申请号：EP06001612.8
申请日：2004-01-23
申请人： Tohken Co., Ltd.
发明人： Yada, Keiji , Kai, Hiromi , Saito, Yasuki
IPC分类号： G21K7/00 , H01J35/14 , G01N23/04 , H01J37/063
CPC分类号： H01J35/14 , G01N23/04 , G21K7/00 , H01J2237/2807
摘要： X-ray microscopic inspection apparatus for non-destructive inspection, using a microfocus X-ray source. The apparatus includes a magnetic superposition lens (1d) wherein a magnetic generating portion is disposed in the vicinity of an electron generating portion of an electron gun (1a), and wherein a magnetic field is superposed by an electric field formed by said electron gun at least from the electron generating portion to an anode as a component element of electron accelerating means; and a scan coil (4) for freely swinging an electron probe formed via said magnetic superposition lens on a surface of said target for X-ray generation.

2. 发明公开

EP1557864A1 X-ray microscopic inspection apparatus 审中-公开
标题翻译： RöntgenmikroskopischerInspektionsapparat
公开(公告)号：EP1557864A1
公开(公告)日：2005-07-27
申请号：EP04001489.6
申请日：2004-01-23
申请人： Tohken Co., Ltd.
发明人： Yada, Keiji , Kai, Hiromi , Saito, Yasushi
IPC分类号： H01J35/14 , G21K7/00 , G01N23/04 , H01J37/063
CPC分类号： H01J35/14 , G01N23/04 , G21K7/00 , H01J2237/2807
摘要： X-ray microscopic inspection apparatus using a microfocus X-ray source. The apparatus includes a magnetic superposition lens (1d) having a magnetic field generating portion disposed in the vicinity of an electron generating portion of an electron gun; reflected electron detecting means having a detecting portion disposed above the target (3) for X-ray generation, electron image generating means for performing imaging of a target surface utilizing the signals from the reflected electron detecting means for alignment including focus adjustment to the target for X-ray generation and astigmatism correction. Further, the apparatus is equipped with functions such as a CT function , an electron axis alignment function, elemental analysis function, and a target switching function.
摘要翻译：使用微焦点X射线源的X射线显微镜检查装置。该装置包括具有设置在电子枪的电子产生部分附近的磁场产生部分的磁性叠加透镜（1d）反射电子检测装置，具有设置在用于X射线产生的目标（3）上方的检测部分，电子图像产生装置，利用来自反射电子检测装置的信号进行目标表面的成像，包括焦点调节到目标 X射线产生和散光校正。此外，该装置配备有诸如CT功能，电子轴对准功能，元素分析功能和目标切换功能的功能。

3. 发明公开

EP1679733A2 X-ray microscopic inspection apparatus 审中-公开
标题翻译： RöntgenmikroskopischerInspektionsapparat
公开(公告)号：EP1679733A2
公开(公告)日：2006-07-12
申请号：EP06001612.8
申请日：2004-01-23
申请人： Tohken Co., Ltd.
发明人： Yada, Keiji , Kai, Hiromi , Saito, Yasuki
IPC分类号： H01J35/14 , G21K7/00 , G01N23/04 , H01J37/063
CPC分类号： H01J35/14 , G01N23/04 , G21K7/00 , H01J2237/2807
摘要： To provide an X-ray microscopic inspection apparatus capable of performing non-destructive inspection with high resolving power within a very short period, and having advantageous functions such as a high precision electron probe control function, a CT function, an elemental analysis function, and a target switching function. The apparatus includes a magnetic superposition lens wherein a magnetic generating portion is disposed in the vicinity of an electron generating portion of an electron gun, and wherein a magnetic field is superposed by an electric field formed by said electron gun at least from the electron generating portion to an anode as a component element of electron accelerating means; and a scan coil for freely swinging an electron probe formed via said magnetic superposition lens on a surface of said target for X-ray generation.
摘要翻译：用于非破坏性检查的X射线显微镜检查装置，使用微焦点X射线源。该装置包括磁性重叠透镜（1d），其中磁性发生部分设置在电子枪（1a）的电子产生部分附近，并且其中磁场由所述电子枪形成的电场叠加在最少从电子产生部分到作为电子加速装置的组成元件的阳极; 以及扫描线圈（4），用于将所述磁性叠加透镜形成的电子探针自由摆动在所述用于X射线产生的靶的表面上。

4. 发明公开

EP1557865A1 Microfocus x-ray tube for microscopic inspection apparatus 审中-公开
标题翻译： Mikrofokus-Röntgenröhrefürein Inspektionsmikroskop
公开(公告)号：EP1557865A1
公开(公告)日：2005-07-27
申请号：EP04001490.4
申请日：2004-01-23
申请人： Tohken Co., Ltd.
发明人： Yada, Keiji , Kai, Hiromi , Saito, Yasushi
IPC分类号： H01J35/14 , H01J35/06 , H01J35/12 , H01J35/18 , G21K7/00
CPC分类号： H01J35/18 , G21K7/00 , H01J35/06 , H01J35/12 , H01J35/14 , H01J2235/087 , H01J2235/1204 , H01J2235/186 , H01J2237/2807
摘要： An X-ray microscopic inspection apparatus with high resolving power equal to or better than 0.1 µm requiring only short exposure time. The X-ray microscopic inspection apparatus comprises X-ray generating means generating X-rays by impinging electrons on a target (3), a magnetic superposition lens having a magnetic field generating portion disposed in the vicinity of an electron generating portion of an electron gun (1). Further, the apparatus includes a liquid metal electron source using liquid metal or a thermal field emission electron source anda target with a heat sink comprising thin CVD diamond plate.
摘要翻译：具有等于或优于0.1μm的高分辨能力的X射线显微镜检查装置，其仅需要短的曝光时间。 X射线显微镜检查装置包括通过在靶（3）上照射电子而产生X射线的X射线产生装置，具有设置在电子枪的电子产生部分附近的磁场产生部分的磁性叠加透镜（1）。此外，该装置包括使用液体金属或热场发射电子源的液体金属电子源和具有包含薄CVD金刚石板的散热器的靶。

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