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1. 发明授权

EP0971000B1 ELECTRONIC/ELECTRIC COMPONENTS USED IN CLEAN ROOM AND SUBSTRATE TREATMENT APPARATUS 失效
标题翻译：电子/电器，其用在处理基材的洁净室和设备
公开(公告)号：EP0971000B1
公开(公告)日：2004-08-25
申请号：EP98910973.1
申请日：1998-03-25
申请人： Tokyo Electron Limited , Taisei Corporation
发明人： MATSUO, Takenobu , WAKABAYASHI, Tsuyoshi , SAITO, Misako , KOBAYASHI, Sadao , WAKAYAMA, Yoshihide , IMAFUKU, Masayuki
IPC分类号： C08L101/00 , C08K5/13 , C08K5/05 , H01L21/02
CPC分类号： C08K5/0075

2. 发明公开

EP0957514A1 INSTRUMENT AND MOUNTING EQUIPMENT USED IN CLEAN ROOM 失效
标题翻译： INTUMENT UND MONTAGE-AUSRÜSTUNGANGEWNDET IM REINRAUM
公开(公告)号：EP0957514A1
公开(公告)日：1999-11-17
申请号：EP97908518.0
申请日：1997-03-27
申请人： TOKYO ELECTRON LIMITED , TAISEI CORPORATION
发明人： SAITO, Misako , MATSUO, Takenobu , WAKABAYASHI, Tsuyoshi , KOBAYASHI, Sadao , WAKAYAMA, Yoshihide , IMAFUKU, Masayuki
IPC分类号： H01L21/68 , A43B3/00 , A41D13/02
CPC分类号： H01L21/67757 , A43B1/14 , A43B3/163 , H01L21/67 , H01L21/67366 , H01L21/67396
摘要： There are instruments used for handling a substrate in a clean room at room temperature and atmospheric pressure, which contain a resin base and at least one additive selected from the group consisting of a lubricant, a plasticizer, an anti-oxidizing agent and an antistatic agent, and the additives do not generate gaseous organic material compound under conditions of room temperature and atmospheric pressure.
摘要翻译：在室温和大气压下在洁净室内处理基材的仪器包含树脂基材和至少一种选自润滑剂，增塑剂，抗氧化剂和抗静电剂的添加剂，并且添加剂在室温和大气压条件下不产生气体有机材料化合物。

3. 发明公开

EP0971000A1 ELECTRONIC/ELECTRIC COMPONENTS USED IN CLEAN ROOM AND SUBSTRATE TREATMENT APPARATUS 失效
标题翻译：电子/电器，其用在处理基材的洁净室和设备
公开(公告)号：EP0971000A1
公开(公告)日：2000-01-12
申请号：EP98910973.1
申请日：1998-03-25
申请人： Tokyo Electron Limited , Taisei Corporation
发明人： MATSUO, Takenobu , WAKABAYASHI, Tsuyoshi , SAITO, Misako , KOBAYASHI, Sadao , WAKAYAMA, Yoshihide , IMAFUKU, Masayuki
IPC分类号： C08L101/00 , C08K5/13 , C08K5/05
CPC分类号： C08K5/0075
摘要： An electronic/electric part used in a clean room in which the atmosphere is controlled to process a substrate in a semiconductor device industry, which contains a resin base material and additives added to the resin base material. The additives contain one or more materials selected from the group consisting of an anti-electrostatic agent made of a nonionic compound of a molecular weight of 350 or higher, an anti-oxidizing agent made of a phenolic compound of a molecular weight of 300 or higher, a lubricant, a plasticizer, a fire retardant, and a water repellent. The additives hardly releases gaseous organic substances from the resin base material under a condition where the part is used.
摘要翻译：在洁净室中，其中所述气氛控制为处理基板在半导体器件行业，其中包含加入到树脂基体材料的树脂基体材料和添加剂中使用的电子/电气部件。所述添加剂包含选自抗静电剂组成的组中取得的350或更高的抗氧化剂，分子量的非离子性化合物中选择的一种或多种材料制成的300或更高的分子量的酚化合物的，润滑剂，增塑剂，阻燃剂和防水剂。添加剂几乎不释放气态有机物质从树脂基材，在使用零件的条件下。

4. 发明授权

EP2634580B1 Virus detection device and virus detection method 有权
标题翻译：病毒检测装置和病毒检测方法
公开(公告)号：EP2634580B1
公开(公告)日：2015-04-29
申请号：EP11835789.6
申请日：2011-10-14
申请人： Tokyo Electron Limited
发明人： TAMURA, Akitake , FUJIHARA, Kaoru , SAITO, Misako
IPC分类号： G01N33/569 , G01N15/06
CPC分类号： G01N33/56983 , G01N15/06 , G01N2015/0038 , G01N2015/0046 , G01N2015/0065 , G01N2015/0693 , G01N2333/09 , G01N2333/11

5. 发明公开

EP2634580A1 VIRUS DETECTION DEVICE AND VIRUS DETECTION METHOD 有权
标题翻译： Virusnachweisvorrichtung und Virusnachweisverfahren
公开(公告)号：EP2634580A1
公开(公告)日：2013-09-04
申请号：EP11835789.6
申请日：2011-10-14
申请人： Tokyo Electron Limited
发明人： TAMURA, Akitake , FUJIHARA, Kaoru , SAITO, Misako
IPC分类号： G01N33/569 , G01N33/533 , G01N37/00
CPC分类号： G01N33/56983 , G01N15/06 , G01N2015/0038 , G01N2015/0046 , G01N2015/0065 , G01N2015/0693 , G01N2333/09 , G01N2333/11
摘要： A virus in the atmosphere can be precisely detected on a real time basis. At a main pipeline 8, a dust removing unit 1, an atomization unit 4, a fluorescence measuring unit 5 in which a laser beam is irradiated, and a suction pump 7 are arranged in this order, and a suctioned air current is generated in the main pipeline 8 through the suction pump 7. Meanwhile, a diffusion unit 3 includes a liquid flow path 35 and a gas flow path 34 formed in parallel to the liquid flow path, and an atmosphere and an aqueous solution containing a fluorescent antibody F pass through the gas flow path 34 and the liquid flow path 35, respectively. The aqueous solution is flown into the atomization unit 4 through a guide passage 40 branched from a branch part that is formed at an outlet side of the flow paths 34 and 35 and discharges the gas and the aqueous solution after separating the gas and the aqueous solution. A mist group is flown into the fluorescence measuring unit 5. Since a fluorescence intensity of the mist M when the virus V exists is higher than a fluorescence intensity when no virus V exists, the virus V can be detected by monitoring the fluorescence intensity.
摘要翻译：可以在实时的基础上精确检测大气中的病毒。在主管8处，依次布置有除尘单元1，雾化单元4，照射激光的荧光测量单元5和抽吸泵7，并且在该管道8中产生吸入的气流主管道8通过抽吸泵7.同时，扩散单元3包括液体流动通道35和与液体流动通道平行形成的气体流路34，并且含有荧光抗体F的气氛和水溶液通过气体流路34和液体流路35。水溶液通过从形成在流路34,35的出口侧的分支部分分支的引导通道40流入雾化单元4，并在气体和水溶液分离后排出气体和水溶液。雾组被流入荧光测定单元5.由于存在病毒V时的雾M的荧光强度高于不存在病毒V时的荧光强度，因此可以通过监视荧光强度来检测病毒V.

6. 发明公开

EP2423349A1 VAPOR DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD 审中-公开
标题翻译： DAMPFABLAGERUNGSVORRICHTUNG UND DAMPFABLAGERUNGSVERFAHREN
公开(公告)号：EP2423349A1
公开(公告)日：2012-02-29
申请号：EP10767084.6
申请日：2010-04-21
申请人： Tokyo Electron Limited
发明人： ONO, Yuji , EDURA, Tomohiko , HAYASHI, Teruyuki , TAMURA, Akitake , SAITO, Misako , KUWADA, Hirotaka , OTSUKI, Shimon
IPC分类号： C23C14/24 , H01L51/50 , H05B33/10
CPC分类号： C23C14/12 , C23C14/228 , C23C14/246
摘要： There is provided a vapor deposition apparatus and a vapor deposition method capable of efficiently sublimating/melting a granular organic material with high mobility. The vapor deposition apparatus for forming a thin film on a substrate by vapor deposition includes a depressurizable material supply apparatus configured to supply a material gas, and a film forming apparatus configured to form a thin film on the substrate. The material supply apparatus includes a quantity control unit configured to control a quantity of a material, and a material gas generating unit configured to vaporize the material supplied from the quantity control unit.
摘要翻译：提供了能够高度迁移率地有效地升华/熔化颗粒状有机材料的气相沉积设备和气相沉积方法。用于通过气相沉积在基板上形成薄膜的气相沉积装置包括构造成供给材料气体的可降压材料供给装置和被配置为在基板上形成薄膜的成膜装置。所述材料供给装置包括：配置为控制材料量的量控制单元，以及构成为使从所述量控制单元供给的材料蒸发的原料气体生成单元。

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