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1. 发明公开

EP4350313A1 STRAIN RESISTANCE FILM, PHYSICAL QUANTITY SENSOR, AND METHOD FOR MANUFACTURING THE STRAIN RESISTANCE FILM 审中-实审
公开(公告)号：EP4350313A1
公开(公告)日：2024-04-10
申请号：EP23201170.0
申请日：2023-10-02
申请人： TDK Corporation
发明人： NAWAOKA, Kohei , UNNO, Ken , SASAHARA, Tetsuya , KOBAYASHI, Masanori , HATA, Tetsuo
IPC分类号： G01L1/22 , C23C14/06 , G01B7/16 , H01C17/075
摘要： A strain resistance film containing a composition represented by Cr 100-x-y-z Al x N y O z , satisfying 5 ≤ x ≤ 50, 0.1 ≤ y ≤20, 0.1 ≤ z ≤ 17, and y+z ≤ 25.

2. 发明公开

EP4209764A1 PRESSURE SENSOR 审中-实审
公开(公告)号：EP4209764A1
公开(公告)日：2023-07-12
申请号：EP21864441.7
申请日：2021-09-03
申请人： TDK Corporation
发明人： SASAHARA, Tetsuya , UNNO, Ken , KOBAYASHI, Masanori , NAWAOKA, Kohei
IPC分类号： G01L9/04
摘要： [Problem] To provide a pressure sensor which reduces the influence that temperature distribution on a membrane has on pressure detection values. [Solution] Provided is a pressure sensor including: a membrane in which distortion corresponding to pressure occurs; at least two first resistors disposed apart from each other on a first circumference of said membrane, on which positive distortion characteristics are observed when pressure is applied; and at least two second resistors disposed apart from each other on a second circumference of said membrane, on which negative distortion characteristics are observed when pressure is applied. A Wheatstone bridge that includes the at least two first resistors and the at least two second resistors is formed; and at least either the number of first resistors disposed on the first circumference or the number of second resistors disposed on the second circumference is three or more.

3. 发明公开

EP4235131A1 METAL MEMBER WITH INSULATING FILM, PHYSICAL QUANTITY SENSOR, AND PRESSURE SENSOR 审中-实审
公开(公告)号：EP4235131A1
公开(公告)日：2023-08-30
申请号：EP23156868.4
申请日：2023-02-15
申请人： TDK Corporation
发明人： KOBAYASHI, Masanori , UNNO, Ken , SASAHARA, Tetsuya , NAWAOKA, Kohei
IPC分类号： G01L9/00
摘要： A metal member with insulating film includes a metal member, an insulating film, and a reinforcement portion. The metal member includes a film formation surface and a connection surface facing in a different direction from the film formation surface and connecting to the film formation surface. The insulating film covers at least a part of the film formation surface and the connection surface over a connection position between the film formation surface and the connection surface. The reinforcement portion is formed along a periphery of the insulating film at the connection position and covers at least a part of the periphery of the insulating film from an opposite side to the metal member.

4. 发明公开

EP4109065A1 PRESSURE SENSOR 审中-实审
公开(公告)号：EP4109065A1
公开(公告)日：2022-12-28
申请号：EP21756421.0
申请日：2021-02-15
申请人： TDK Corporation
发明人： KOBAYASHI, Masanori , UNNO, Ken , SASAHARA, Tetsuya , NAWAOKA, Kohei
IPC分类号： G01L9/04
摘要： [Problem] To provide a pressure sensor that has a plurality of detection parts in a lamination direction, and moreover has improved detection accuracy. [Solution] A pressure sensor 10 has a membrane 22 in which deformation corresponding to pressure occurs, a first gauge layer 40 which is formed on the membrane 22, an intermediate insulation layer 50 which is formed on the first gauge layer 40, and a second gauge layer 60 which is formed on the intermediate insulation layer 50. The first gauge layer 40 and the second gauge layer 60 respectively include a first detection part 42 and a second detection part 62 which detect the deformation of the membrane. The distance from the surface of the membrane 22 to the second detection part 62 is no more than 30 µm.

5. 发明公开

EP4303554A1 STACKED ELECTRODE, ELECTRODE-EQUIPPED STRAIN RESISTANCE FILM, AND PRESSURE SENSOR 审中-实审
公开(公告)号：EP4303554A1
公开(公告)日：2024-01-10
申请号：EP22763144.7
申请日：2022-02-25
申请人： TDK Corporation
发明人： KOBAYASHI, Masanori , UNNO, Ken , SASAHARA, Tetsuya , NAWAOKA, Kohei
IPC分类号： G01L9/00
摘要： [Problem] To provide a stacked electrode, an electrode-equipped strain resistance film, and a pressure sensor that are excellent in heat resistance and moisture resistance. [Solution] A stacked electrode 36 is provided on a strain resistance film 32, wherein: the strain resistance film 32 contains Cr and Al; the stacked electrode 36 has a contact layer 36a that overlaps the strain resistance film 32, a diffusion prevention layer 36b that overlaps the contact layer 36a, and a mounting layer 36c that overlaps the diffusion prevention layer 36b; and the diffusion prevention layer 36b or the mounting layer 36c covers the contact layer 36a so that an end surface 36a1 of the contact layer 36a is not exposed.

6. 发明公开

EP4116689A1 PRESSURE SENSOR 审中-实审
公开(公告)号：EP4116689A1
公开(公告)日：2023-01-11
申请号：EP21765225.4
申请日：2021-02-16
申请人： TDK Corporation
发明人： SASAHARA, Tetsuya , UNNO, Ken , KOBAYASHI, Masanori , NAWAOKA, Kohei
IPC分类号： G01L9/04
摘要： [Problem] To provide a pressure sensor that can: accurately detect pressure even in an environment in which temperature fluctuates; and prevent increase in power consumption. [Solution] A pressure sensor that has: a membrane that deforms according to pressure; and a detection circuit that includes a first resistor and a third resistor that are disposed in a first distortion area that generates distortion characteristics in a prescribed direction on the membrane and a second resistor and a fourth resistor that are disposed in a second distortion area that generates distortion in the opposite direction to the first distortion area, said detection circuit forming a bridge circuit using the first to fourth resistors. At least one among the first resistor, the second resistor, the third resistor, and the fourth resistor has: a first section that has a resistance having a positive temperature resistance coefficient; and a second section that is connected in series to the first section and has a resistance having a negative temperature resistance coefficient.

7. 发明公开

EP4113087A1 PRESSURE SENSOR 有权
公开(公告)号：EP4113087A1
公开(公告)日：2023-01-04
申请号：EP21761057.5
申请日：2021-02-16
申请人： TDK Corporation
发明人： KOBAYASHI, Masanori , UNNO, Ken , SASAHARA, Tetsuya , NAWAOKA, Kohei
IPC分类号： G01L9/00 , G01L9/04
摘要： To provide a pressure sensor that makes it possible to reduce power consumption and prevent pressure variation detection failure. [Solution] A pressure sensor comprising: a membrane that deforms in response to pressure; a pressure detection circuit that includes at least four resistive elements disposed on the membrane, the resistive elements forming a bridge circuit to detect deformation of the membrane; a piezoelectric element that is disposed on the membrane and that detects deformation of the membrane; and a switching unit that switches power supply to the pressure detection circuit on the basis of a detection signal from the piezoelectric element.

8. 发明公开

EP4030158A1 PRESSURE SENSOR 审中-实审
公开(公告)号：EP4030158A1
公开(公告)日：2022-07-20
申请号：EP20862902.2
申请日：2020-08-13
申请人： TDK Corporation
发明人： SASAHARA, Tetsuya , UNNO, Ken , KOBAYASHI, Masanori , NAWAOKA, Kohei
IPC分类号： G01L9/04
摘要： [Problem] To provide a pressure sensor that makes it possible to reduce power consumption and prevent pressure variation detection failure. [Solution] Provided is a pressure sensor comprising: a membrane that is deformed according to pressure; a first circuit that forms a bridge circuit, detects distortion, and comprises a first and third resistor disposed at first distortion positions on the membrane that exhibit prescribed distortion characteristics and a second and fourth resistor disposed at second distortion positions on the membrane that exhibit distortion characteristics in a direction different from that of the first distortion positions; and a second circuit that is capable of detecting distortion independently from the first circuit and comprises a fifth resistor disposed at a position on the membrane exhibiting a distortion characteristic in the same direction as that of the first distortion positions or second distortion positions.

9. 发明公开

EP4317930A1 STRAIN RESISTANCE FILM, PRESSURE SENSOR, AND LAYERED BODY 审中-实审
公开(公告)号：EP4317930A1
公开(公告)日：2024-02-07
申请号：EP22774904.1
申请日：2022-02-25
申请人： TDK Corporation
发明人： NAWAOKA, Kohei , UNNO, Ken , SASAHARA, Tetsuya , KOBAYASHI, Masanori
IPC分类号： G01L9/06 , H01C10/10 , H01C7/00
摘要： [Problem] To provide a distortion resistance film, etc., which includes Cr, Al, and N and in which film separation can be prevented.
[Solution] A distortion resistance film comprising an alloy material including Cr, Al, N, and Si.

10. 发明公开

EP4317926A1 STRAIN-RESISTANCE FILM AND PRESSURE SENSOR 审中-实审
公开(公告)号：EP4317926A1
公开(公告)日：2024-02-07
申请号：EP22780182.6
申请日：2022-03-17
申请人： TDK Corporation
发明人： NAWAOKA, Kohei , UNNO, Ken , SASAHARA, Tetsuya , KOBAYASHI, Masanori
IPC分类号： G01L1/22 , G01L9/04 , H01C7/00 , C23C14/06
摘要： Provided are a distortion resistance film capable of reducing a property change accompanying a composition change and a pressure sensor using the distortion resistance film. A distortion resistance film is represented by a formula Cr 100-x-y Al x N y , in which composition regions of x and y satisfy 25

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