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1. 发明公开

EP2434536A1 FINE-PROCESSING AGENT AND FINE-PROCESSING METHOD 审中-公开
标题翻译： MITTEL UND VERFAHREN ZUR FEINBEARBEITUNG
公开(公告)号：EP2434536A1
公开(公告)日：2012-03-28
申请号：EP09844917.6
申请日：2009-05-21
申请人： Stella Chemifa Corporation
发明人： MIYASHITA,Masayuki , KUJIME,Takanobu , NII,Keiichi
IPC分类号： H01L21/308
CPC分类号： H01L21/31111 , C09K13/08
摘要： Provided is a fine-processing agent which, when fine-processing a laminated film stacked at least with a silicon dioxide film and a silicon nitride film, can selectively fine-process the silicon dioxide film. Also provided is a fine-processing method utilizing the fine-processing agent. The fine-processing agent is characterized by including: (a) 0.01-15.0 weight % hydrogen fluoride and/or 0.1 to 40.0 weight % ammonium fluoride, (b) water, and (c) 0.001-10.00 weight % water-soluble polymer selected from among a group consisting of acrylic acid, ammonium acrylate, acrylic acid ester, acrylamide, styrenesulfonic acid, ammonium styrenesulfonate, and styrenesulfonic acid ester.
摘要翻译：本发明提供一种精细加工剂，其能够对至少层叠有二氧化硅膜和氮化硅膜的层叠膜进行精细加工时，可以选择性地微细处理二氧化硅膜。还提供了利用精细加工剂的精细加工方法。精加工剂的特征在于：（a）0.01-15.0重量％氟化氢和/或0.1-40.0重量％氟化铵，（b）水和（c）0.001-10.00重量％的水溶性聚合物由丙烯酸，丙烯酸铵，丙烯酸酯，丙烯酰胺，苯乙烯磺酸，苯乙烯磺酸铵和苯乙烯磺酸酯组成的组中。

2. 发明授权

EP2434536B1 ETCHING METHOD 有权
公开(公告)号：EP2434536B1
公开(公告)日：2019-03-13
申请号：EP09844917.6
申请日：2009-05-21
申请人： Stella Chemifa Corporation
发明人： MIYASHITA,Masayuki , KUJIME,Takanobu , NII,Keiichi
IPC分类号： H01L21/311 , C09K13/08

3. 发明公开

EP2434004A1 CLEANING LIQUID AND CLEANING METHOD 审中-公开
标题翻译： REINIGUNGSFLÜSSIGKEITUND REINIGUNGSVERFAHREN
公开(公告)号：EP2434004A1
公开(公告)日：2012-03-28
申请号：EP09844918.4
申请日：2009-05-21
申请人： Stella Chemifa Corporation
发明人： MIYASHITA,Masayuki , KUJIME,Takanobu , NII,Keiichi , YAMAMOTO,Masashi
IPC分类号： C11D7/60 , C11D7/08 , H01L21/304
CPC分类号： C11D3/042 , C11D7/08 , C11D11/0047 , H01L21/02065
摘要： Disclosed is a cleaning liquid which is capable of cleaning an object to be cleaned, to the surface of which cerium oxide adheres, by dissolving and removing cerium oxide in the form of cerium ions. A cleaning method using the cleaning liquid is also disclosed. The cleaning liquid for removing cerium oxide is characterized by containing hydrogen fluoride, at least one acid selected from the group consisting of hydrochloric acid, nitric acid, sulfuric acid, acetic acid, phosphoric acid, iodic acid and hydrobromic acid, and water. The cleaning liquid is also characterized by dissolving and removing cerium oxide in the form of cerium ions.
摘要翻译：公开了一种能够通过溶解和除去铈离子形式的氧化铈，能够将被清洁物体清洁到氧化铈表面的清洗液。还公开了一种使用清洗液的清洗方法。用于除去氧化铈的清洗液的特征在于含有氟化氢，至少一种选自盐酸，硝酸，硫酸，乙酸，磷酸，碘酸和氢溴酸的酸和水。清洗液的特征还在于以铈离子的形式溶解和除去氧化铈。

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