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1. 发明公开

EP2930463A1 SYSTEM FOR MEASURING ORTHOGONALITY OF Y-CROSS BEAM AND X-GUIDES OF A STAGE AND METHOD FOR POSITIONING STAGE HOME USING SAME 审中-公开
标题翻译：系统用于测量定位的STUFENRECHTWINKLIGKEIT和方法步骤该平台
公开(公告)号：EP2930463A1
公开(公告)日：2015-10-14
申请号：EP15160518.5
申请日：2015-03-24
申请人： Soonhan Engineering Corp.
发明人： Seo, Jong Kyu
IPC分类号： G01B21/04 , G01B21/24
CPC分类号： G01B21/22 , G01B5/0009 , G01B21/16 , G01B21/24 , G01D5/00
摘要： Disclosed are a system for measuring the orthogonality of a stage and a method for positioning the stage home using the same. The system for measuring the orthogonality of a stage includes: a first and a second X-axial drive feedback device respectively mounted in a pair of guides respectively arranged in both sides of the stage for measuring and providing a displacement for changing the X-axial position of the stage; a Y-axial drive feedback device mounted in a crossbeam of the stage for measuring and providing a displacement for changing the Y-axial position of the stage; a first and a second X-axial absolute feedback device each mounted at a position in both ends of the crossbeam where the crossbeam intersects with the pair of guides for measuring and providing the position of each of the axes constituting the orthogonality of the stage; and a control unit for controlling the displacement of the stage and detecting a variation of the orthogonality of the stage according to a feedback received from the first and the second X-axial drive feedback device, the Y-axial drive feedback device, and the first and the second X-axial absolute feedback device (Fig. 2).
摘要翻译：本发明公开了一种用于测量阶段的正交性和用于定位使用相同的阶段家庭的方法的系统。用于测量阶段的正交性的系统，包括：第一和分别安装在一对导板在所述平台的bothsides分别设置用于测量和用于改变X轴向位置提供位移的第二X轴驱动反馈装置的阶段; 安装在载物台，用于测量和用于改变级的Y轴位置提供位移的横梁的Y轴向驱动反馈装置; 第一和第二X轴绝对反馈装置分别安装在其中的横梁与一对用于测量和提供各构成阶段的正交的轴的位置引导件的交叉的横梁的两端部的位置; 和用于控制级的位移和检测阶段雅鼎的正交性，以从第一和第二X轴驱动反馈装置，在Y轴驱动反馈装置，并且第一个接收的反馈的变化的控制单元和第二X轴绝对反馈装置（图2）。

2. 发明授权

EP2881699B1 System for compensating dynamic and thermal deformity errors of a linear motion single-plane gantry stage in real time 有权
标题翻译：用于实时补偿直线运动单平面龙门平台的动态和热畸变误差的系统
公开(公告)号：EP2881699B1
公开(公告)日：2018-04-18
申请号：EP14003962.9
申请日：2014-11-25
申请人： Soonhan Engineering Corp.
发明人： Seo, Jong Kyu , Shin, Soo Keun , Jung, Chul , Kwon, Yong Uk , Ko, Byoung Gwan , Rahul, Banik
IPC分类号： G01B5/00
CPC分类号： G05D3/12 , G01B5/0014 , G01D5/00 , G05B19/404
摘要： Disclosed are a system for compensating dynamic and thermal deformity errors of a linear motion single-plane gantry stage in real time, a stage apparatus using the system, and manufacturing, measuring and inspecting apparatuses using the system. The system includes: a first two-dimensional position measuring unit arranged in each of two linear edge beams respectively positioned in both sides of the linear motion single-plane gantry stage for measuring the position of an X-axially moving gantry beam to provide a feedback of an X-axial motion thereof; a second two-dimensional position measuring unit for measuring the position of a Y-axially moving slider moving on the X-axially moving gantry beam to provide a feedback of a Y-axial motion thereof; a thermal fixing point provided as a thermal reference for measuring a thermal expansion of the X-axially moving gantry beam; and a compensation control unit for controlling an error motion of the linear motion single-plane gantry stage in real time by measuring dynamic and thermal deformity errors based on the data received from the first and the second two-dimensional position measuring unit (FIG. 1).

3. 发明公开

EP2881699A1 System for compensating dynamic and thermal deformity errors of a linear motion single-plane gantry stage in real time 有权
标题翻译：系统为热变形和在一个平面上的直线运动的动态误差的实时补偿退绕单个平面龙门平台直线运动
公开(公告)号：EP2881699A1
公开(公告)日：2015-06-10
申请号：EP14003962.9
申请日：2014-11-25
申请人： Soonhan Engineering Corp.
发明人： Seo, Jong Kyu , Shin, Soo Keun , Jung, Chul , Kwon, Yong Uk , Ko, Byoung Gwan , Rahul, Banik
IPC分类号： G01B5/00
CPC分类号： G05D3/12 , G01B5/0014 , G01D5/00 , G05B19/404
摘要： Disclosed are a system for compensating dynamic and thermal deformity errors of a linear motion single-plane gantry stage in real time, a stage apparatus using the system, and manufacturing, measuring and inspecting apparatuses using the system. The system includes: a first two-dimensional position measuring unit arranged in each of two linear edge beams respectively positioned in both sides of the linear motion single-plane gantry stage for measuring the position of an X-axially moving gantry beam to provide a feedback of an X-axial motion thereof; a second two-dimensional position measuring unit for measuring the position of a Y-axially moving slider moving on the X-axially moving gantry beam to provide a feedback of a Y-axial motion thereof; a thermal fixing point provided as a thermal reference for measuring a thermal expansion of the X-axially moving gantry beam; and a compensation control unit for controlling an error motion of the linear motion single-plane gantry stage in real time by measuring dynamic and thermal deformity errors based on the data received from the first and the second two-dimensional position measuring unit (FIG. 1).
摘要翻译：本发明公开了用于补偿在实时的线性运动单平面龙门平台的动态和热畸形错误，载台装置使用该系统，以及制造，测量和使用该系统的系统包括检测设备的系统：第一双在每个分别在直线运动单平面龙门平台的bothsides位于两个线性边梁的设置用于测量的位置的三维位置测量单元的X轴向移动龙门梁，以提供它们的X轴运动的反馈; 一个第二两维位置测量单元，用于测量的Y轴向移动滑块移动于X轴地移动台架梁以提供其Y轴运动的反馈的位置; 作为用于测量的X轴向移动龙门梁的热膨胀的热参考提供一种热固定点; 以及用于通过基于来自所述第一和第二两维位置测量单元图接收的数据测量动态和热畸形错误控制（上实时地直线运动单平面龙门平台的误差运动补偿控制单元1。）。

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