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    • 1. 发明公开
    • Imprint / soft lithography process for flat panel displays
    • Drach-oder WeichlithographieverfahrenfürFlachbildschirmanzeigen
    • EP1855148A1
    • 2007-11-14
    • EP07007979.3
    • 2007-04-19
    • Samsung Electronics Co., Ltd.
    • Chang, Jae-HyukRoh, Nam-SeokBae, Jung-Mok
    • G02F1/1333H01L27/32G03F7/00B29C59/02
    • H01L27/1288B29C59/026B82Y10/00B82Y40/00G02F1/133555G02F1/136227G02F2202/023G03F7/0002G03F7/70791G03F9/7042G03F9/7076G03F9/7088H01L27/1214
    • An imprint/soft lithography apparatus (fig.1) for manufacturing a flat panel display substrate (10) is disclosed which has a movable holder (40) on to which the substrate is placed. An alignment sensor (70) mounted under a window (44) in the holder determines the accuracy of alignment of the substrate and the imprint lithography stamp (or mould) (60) via alignment marks on the mould (66) and on the substrate (16). Registration of the mould and the substrate is performed with the parts in contact, but before hardening.
      Some or all of the patterning steps for manufacturing an active matrix flat panel display are carried out by the imprint lithographic technique. The alignment marks on the mould are coated with a film (68) to improve their reflectivity/absorption and to facilitate stamp removal after pressing. The imprinted organic film can be hardened in situ by UV light or by heating. A second hardening step may be needed for the area under the mould alignment marks, which were masked in the initial UV hardening process by the alignment mark film.
    • 公开了一种用于制造平板显示基板(10)的压印/软光刻设备(图1),其具有放置基板的可移动保持器(40)。 安装在支架中的窗口(44)下的对准传感器(70)通过模具(66)和基板上的对准标记来确定基板和压印光刻印模(或模具)(60)的对准精度 16)。 模具和基材的注射是在接触部分,但在硬化之前进行的。 用于制造有源矩阵平板显示器的一些或所有图形化步骤通过压印光刻技术进行。 模具上的对准标记涂覆有膜(68)以改善其反射/吸收并且便于压制后的印模移除。 印刷的有机膜可以通过紫外线或加热在原位硬化。 对于在对准标记膜的初始UV硬化处理中掩模的模具对准标记下面的区域可能需要第二硬化步骤。