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    • 6. 发明公开
    • Process for manufacturing a group comprising at least two elements, one whereof includes an encapsulated micro-integrated structure, and thereby obtained group
    • 一种用于制备的基团,其保留至少两个元件,它保留一个护套的微一体化结构,从而获得组过程
    • EP1122720A1
    • 2001-08-08
    • EP00830075.8
    • 2000-02-02
    • STMicroelectronics S.r.l.
    • Murari, BrunoVigna, BenedettoSassolini, SimoneRatti, FrancescoAlessandri, Alberto
    • G11B5/55
    • G11B5/5552
    • The manufacture process comprises: forming a first wafer (20) of semiconductor material housing integrated electronic components forming a microactuator control circuit and a signal preamplification circuit (22); forming microactuators (10), each comprising a rotor (52) and a stator (51), in a surface portion of a second wafer (28) of semiconductor material; attaching the second wafer (28) to the first wafer (20), with the surface portion of the second wafer facing the first wafer; thinning the second wafer (28); attaching the second wafer (28) to a third wafer (75) to obtain a composite wafer (78); thinning the first wafer (20); cutting the composite wafer (78) into a plurality of dice (77) connected to a protection chip (75'); removing the protection chip (75'); attaching read/write transducers (6) to the dice (77); and attaching the dice to supporting blocks (3) for hard-disk drivers (1).
    • 制造方法包括:在形成微致动器控制电路和信号前置放大电路(22),半导体材料壳体集成电子部件的第一晶片(20); 微致动器形成(10),每个包括一个转子(52)和在所述半导体材料的第二晶片(28)的表面部分的定子(51); 附着在第二晶片(28)到所述第一晶片(20)具有面向所述第一晶片的第二晶片的表面部分; 减薄所述第二晶片(28); 第二晶片(28)附接至第三晶片(75),以获得复合晶片(78); 减薄第一晶片(20); 切割所述复合晶片(78)插入连接到一个保护芯片(75“)的骰子的多个(77); 去除保护芯片(75“); 附接的读/写换能器(6)连接到骰子(77); 和骰子附着到用于硬盘驱动器支撑块(3)(1)。