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    • 1. 发明公开
    • Semiconductor radial rays detecting with a reading condenser
    • Halbleiterdetektor von radialen Strahlungen mit einem Auslesekapazitor
    • EP0788167A3
    • 1998-03-11
    • EP97105410.1
    • 1993-03-22
    • SEIKO INSTRUMENTS INC.
    • Saito, YutakaKojima, Yoshikazu
    • H01L27/146
    • H01L27/14658H01L27/14643H01L27/14681
    • The present invention relates to a semiconductor radiation detector comprising:
      a first terminal ; a first voltage bias resistance (114) connected electrically to the first terminal; a second terminal; a second voltage bias resistance (114) connected electrically to the second terminal; a voltage bias from a power source applied to the first and second terminal; an image sensor for sensing photons and radiation in a semiconductor substrate having a first conductivity type, the image sensor coupled with the first terminal through the first voltage bias resistance (114) and coupled with the second terminal through the second voltage bias resistance (114) ; a first reading condenser for reading out a current generating from the image sensor as a first signal; a second reading condenser for reading out a current generating from the image sensor as a second signal; a fifth terminal for reading out the first signal coupled with a third terminal through the first reading condenser; and a sixth terminal for reading out the signal coupled with a fourth terminal through the second reading condenser .
    • 提供半导体径向射线检测器,其提高半导体径向射线检测器的栅极绝缘膜的击穿电压产生,并防止由于击穿电压产量的提高而引起的栅电极的电阻增加。 在本发明的半导体径向射线检测器中,用作读取电容器的栅电极1的材料不是A 1膜(铝膜),而是POLY Si膜(多晶硅膜),或者包含硅化物的硅化物或金属 熔融点如WSi(硅化钨)(严格地,其组成如WxSiy所表示的不定)或TiSi(硅化钛)(以相同的方式表示为TixSi)。 此外,通过作为布线用绝缘膜的绝缘膜4在栅电极1上设置接触孔2,并且在接触孔上设置有耦合到输出端子的A 1电极3。
    • 4. 发明公开
    • Semiconductor radial rays detecting with a reading condenser
    • Halbleiterdetektor von radialen Strahlungen mit einem Auslesekapazitor
    • EP0788167A2
    • 1997-08-06
    • EP97105410.1
    • 1993-03-22
    • SEIKO INSTRUMENTS INC.
    • Saito, YutakaKojima, Yoshikazu
    • H01L27/146
    • H01L27/14658H01L27/14643H01L27/14681
    • The present invention relates to a semiconductor radiation detector comprising:

      a first terminal ;
      a first voltage bias resistance (114) connected electrically to the first terminal;
      a second terminal;
      a second voltage bias resistance (114) connected electrically to the second terminal;
      a voltage bias from a power source applied to the first and second terminal;
      an image sensor for sensing photons and radiation in a semiconductor substrate having a first conductivity type, the image sensor coupled with the first terminal through the first voltage bias resistance (114) and coupled with the second terminal through the second voltage bias resistance (114) ;
      a first reading condenser for reading out a current generating from the image sensor as a first signal;
      a second reading condenser for reading out a current generating from the image sensor as a second signal;
      a fifth terminal for reading out the first signal coupled with a third terminal through the first reading condenser; and
      a sixth terminal for reading out the signal coupled with a fourth terminal through the second reading condenser .
    • 本发明涉及一种半导体辐射检测器,包括:第一端子; 与第一端子电连接的第一电压偏置电阻(114); 第二个终端; 与第二端子电连接的第二电压偏置电阻(114); 来自施加到所述第一和第二端子的电源的电压偏置; 用于感测具有第一导电类型的半导体衬底中的光子和辐射的图像传感器,所述图像传感器通过所述第一电压偏置电阻(114)与所述第一端子耦合并且通过所述第二电压偏置电阻(114)与所述第二端子耦合, ; 用于读出从图像传感器产生的电流作为第一信号的第一读取电容器; 第二读取电容器,用于读出从图像传感器产生的电流作为第二信号; 第五端子,用于通过第一读取电容器读出与第三端子耦合的第一信号; 以及第六端子,用于通过第二读取电容器读出与第四端子耦合的信号。