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1. 发明公开

EP1741557A2 Actuator device, liquid-jet head and liquid-jet apparatus 有权
标题翻译：致动器装置，液体喷头和液体喷射装置
公开(公告)号：EP1741557A2
公开(公告)日：2007-01-10
申请号：EP06014159.5
申请日：2006-07-07
申请人： SEIKO EPSON CORPORATION
发明人： Takabe, Motoki , Sumi, Koji , Yokoyama, Naoto
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14419 , B41J2202/03 , B41J2202/20 , H01L41/0973 , H01L41/1876 , H01L41/318 , H01L41/319
摘要： An actuator device includes: a layer provided on a single crystal silicon (Si) substrate, and made of silicon dioxide (SiO 2 ); at least one buffer layer provided on the layer made of silicon dioxide (SiO 2 ); a base layer provided on the buffer layer, and made of lanthanum nickel oxide (LNO) having the (100) plane orientation; and a piezoelectric element. The piezoelectric element includes: a lower electrode provided on the base layer, and made of platinum (Pt) having the (100) plane orientation; a piezoelectric layer made of a ferroelectric layer whose plane orientation is the (100) orientation, the piezoelectric layer formed on the lower electrode by epitaxial growth where a crystal system of at least one kind selected from a group consisting of a tetragonal system, a monoclinic system and a rhombohedral system dominates the other crystal systems; and an upper electrode provided on the piezoelectric layer.
摘要翻译：致动器装置包括：设置在单晶硅（Si）衬底上并由二氧化硅（SiO 2）制成的层; 在由二氧化硅（SiO 2）制成的层上提供的至少一个缓冲层; 设置在缓冲层上并由具有（100）面取向的氧化镧镍（LNO）制成的基层; 和压电元件。压电元件包括：设置在基底层上并由具有（100）面取向的铂（Pt）制成的下电极; 由平面取向为（100）取向的铁电体层构成的压电体层，通过外延生长在下部电极上形成的压电体层，其中，选自四方晶系，单斜晶系系统和菱形体系主宰其他晶体系统; 以及设置在压电层上的上电极。

2. 发明公开

EP1880852A3 Piezoelectric device and liquid jet head 审中-公开
标题翻译：压电装置和液体喷射头
公开(公告)号：EP1880852A3
公开(公告)日：2008-10-15
申请号：EP07013247.7
申请日：2007-07-06
申请人： Seiko Epson Corporation
发明人： Noguchi, Motohisa , Sumi, Koji , Takabe, Motoki , Yokoyama, Naoto
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , H01L41/0973 , H01L41/1876 , H01L41/317 , H01L41/319
摘要： A piezoelectric device including: a substrate (2); a lower electrode (4) formed over the substrate; a piezoelectric layer (6) formed over the lower electrode and including lead zirconate titanate; and an upper electrode (7) formed over the piezoelectric layer, the lead zirconate titanate having a half-width of a peak of a (100) plane measured by an X-ray diffraction rocking curve method of 10 degrees or more and 25 degrees or less.

3. 发明授权

EP1741557B1 Actuator device, liquid-jet head and liquid-jet apparatus 有权
标题翻译：致动器，液体喷射头和装置
公开(公告)号：EP1741557B1
公开(公告)日：2008-11-05
申请号：EP06014159.5
申请日：2006-07-07
申请人： Seiko Epson Corporation
发明人： Takabe, Motoki , Sumi, Koji , Yokoyama, Naoto
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14419 , B41J2202/03 , B41J2202/20 , H01L41/0973 , H01L41/1876 , H01L41/318 , H01L41/319

4. 发明公开

EP1880852A2 Piezoelectric device and liquid jet head 审中-公开
标题翻译： Piezoelektrische Vorrichtung undFlüssigkeitsstrahlkopf
公开(公告)号：EP1880852A2
公开(公告)日：2008-01-23
申请号：EP07013247.7
申请日：2007-07-06
申请人： Seiko Epson Corporation
发明人： Noguchi, Motohisa , Sumi, Koji , Takabe, Motoki , Yokoyama, Naoto
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , H01L41/0973 , H01L41/1876 , H01L41/317 , H01L41/319
摘要： A piezoelectric device including: a substrate (2); a lower electrode (4) formed over the substrate; a piezoelectric layer (6) formed over the lower electrode and including lead zirconate titanate; and an upper electrode (7) formed over the piezoelectric layer, the lead zirconate titanate having a half-width of a peak of a (100) plane measured by an X-ray diffraction rocking curve method of 10 degrees or more and 25 degrees or less.
摘要翻译：一种压电装置，包括：基板（2）; 形成在所述基板上的下电极（4）形成在所述下电极上并包括锆钛酸铅的压电层（6）和形成在所述压电体层上的上电极（7），所述钛酸铅钛酸铅具有通过X射线衍射摇摆曲线法测定的（100）面的半峰宽为10度以上且25度，减。

5. 发明公开

EP1741557A3 Actuator device, liquid-jet head and liquid-jet apparatus 有权
标题翻译：致动器，液体喷射头和装置
公开(公告)号：EP1741557A3
公开(公告)日：2007-07-04
申请号：EP06014159.5
申请日：2006-07-07
申请人： SEIKO EPSON CORPORATION
发明人： Takabe, Motoki , Sumi, Koji , Yokoyama, Naoto
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14419 , B41J2202/03 , B41J2202/20 , H01L41/0973 , H01L41/1876 , H01L41/318 , H01L41/319
摘要： An actuator device includes: a layer provided on a single crystal silicon (Si) substrate, and made of silicon dioxide (SiO 2 ); at least one buffer layer provided on the layer made of silicon dioxide (SiO 2 ); a base layer provided on the buffer layer, and made of lanthanum nickel oxide (LNO) having the (100) plane orientation; and a piezoelectric element. The piezoelectric element includes: a lower electrode provided on the base layer, and made of platinum (Pt) having the (100) plane orientation; a piezoelectric layer made of a ferroelectric layer whose plane orientation is the (100) orientation, the piezoelectric layer formed on the lower electrode by epitaxial growth where a crystal system of at least one kind selected from a group consisting of a tetragonal system, a monoclinic system and a rhombohedral system dominates the other crystal systems; and an upper electrode provided on the piezoelectric layer.

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