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    • 1. 发明公开
    • PLASMA GENERATION DEVICE AND CLEANING DEVICE IN WHICH PLASMA GENERATION DEVICE IS USED
    • 麻醉药大肠杆菌VINWENDUNG DER PLASMAERZEUGUNGSVORRICHTUNG
    • EP2934072A1
    • 2015-10-21
    • EP13865768.9
    • 2013-11-26
    • Panasonic Intellectual Property Management Co., Ltd.
    • SAKON, ShigetoshiSANEMATSU, Wataru
    • H05H1/24A45D27/46B08B3/10B08B7/00B26B19/48
    • A45D27/46B08B3/10B08B7/00H05H1/2406H05H2001/2412H05H2245/1225
    • A plasma generation device (1), provided with: a plasma generator (10), a plasma power supply unit (2), and a gas supply unit (3). The plasma generator includes a partition part (12) for dividing the liquid housing unit (15) and the gas housing unit (14) from each other. The partition part has a gas channel (13) for guiding the gas supplied from the gas supply unit and housed in the gas housing unit to the liquid housing unit. The first electrode (18) is disposed in the gas housing unit and the second electrode (19) is disposed in the liquid housing unit. The plasma power supply unit generates a potential supplied to the first and second electrodes and sets the potential of the second electrode to a lower value than that of the potential of the first electrode. The second electrode is formed from a material, a material compound, or a material mixture that causes sputtering phenomenon.
    • 一种等离子体产生装置(1),具有:等离子体发生器(10),等离子体供电单元(2)和气体供给单元(3)。 等离子体发生器包括用于将液体容纳单元(15)和气体容纳单元(14)分开的分隔部分(12)。 分隔部具有用于引导从气体供给单元供给的气体并容纳在气体容纳单元中的气体到气体容纳单元的气体通道(13)。 第一电极(18)设置在气体容纳单元中,第二电极(19)设置在液体容纳单元中。 等离子体供电单元产生提供给第一和第二电极的电位,并将第二电极的电位设定为比第一电极的电位低的值。 第二电极由材料,材料化合物或引起溅射现象的材料混合物形成。