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    • 2. 发明公开
    • FREQUENCY-VARIABLE ACOUSTIC FILM RESONATOR, FILTER AND COMMUNICATION APPARATUS USING THE SAME
    • FREQUENZVARIABLER AKUSTISCHER FILMRESONATOR,过滤器KOMMUNIKATIONSVORRICHTUNG DAMIT
    • EP2051377A1
    • 2009-04-22
    • EP07791742.5
    • 2007-08-01
    • Panasonic Corporation
    • NAKATSUKA, HiroshiYAMAKAWA, TakehikoONISHI, Keiji
    • H03H9/17H01L41/09H03H9/02H03H9/54
    • H03H9/564H03H9/132H03H9/542H03H9/585H03H9/587H03H9/605H03H2009/02204
    • An acoustic thin film resonator including: a first piezoelectric thin film 101; a pair of primary electrodes 103 and 104 for applying an electric signal, which are formed on the first piezoelectric thin film; a second piezoelectric thin film 102 that is disposed so that an oscillation generated in the first piezoelectric thin film propagates to the second piezoelectric thin film; a pair of secondary electrodes 104 and 105 for outputting an electric signal, which are formed on the second piezoelectric thin film; a load 108 that is connected between the secondary electrodes; and a control portion 109 that controls a value of the load. Thereby, an acoustic thin film resonator element is formed so that an electric signal inputted from the primary electrodes is outputted from the secondary electrodes by a piezoelectric effect, and a resonant frequency and an antiresonant frequency are made variable through the control of the value of the load. A resonant frequency and an antiresonant frequency are made variable at the same time without resonant characteristics being deteriorated.
    • 一种声学薄膜谐振器,包括:第一压电薄膜101; 一对主电极103和104,用于施加电信号,形成在第一压电薄膜上; 第二压电薄膜102被布置成使得在第一压电薄膜中产生的振荡传播到第二压电薄膜; 用于输出形成在第二压电薄膜上的电信号的一对次级电极104和105; 连接在次级电极之间的负载108; 以及控制负载值的控制部109。 由此,形成声学薄膜谐振器元件,使得从初级电极输入的电信号通过压电效应从次级电极输出,并且通过控制第二电极的值,使谐振频率和反谐振频率变为可变的 加载。 谐振频率和反谐振频率同时变化,而谐振特性不变。