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    • 3. 发明公开
    • FILM FORMING METHOD AND FILM FORMING DEVICE
    • 成膜方法和成膜装置
    • EP3315212A1
    • 2018-05-02
    • EP16814368.3
    • 2016-06-21
    • NHK Spring Co., Ltd.
    • HIRANO, SatoshiKAWASAKI, Koichi
    • B05D1/06B05B7/14C23C24/04
    • Provided is a film forming method and the like by which, while implementing a cold spray method, it is possible to inject material powder at a high speed while preventing the material powder from being heated excessively. The film forming method is used for forming a film by spraying material powder to deposit on a surface of a base member while the material powder remains in a solid phase state. The film forming method includes: a mixing distance adjusting step of adjusting, in accordance with the type of the material powder, the distance between the position in which the diameter of a through passage is smallest and a mixing position in which the material powder introduced to a nozzle is mixed with gas, the through passage being formed inside the nozzle and being configured so that the diameter thereof first decreases and then increases from a base end toward a distal end; an injecting step of mixing the material powder with the gas in the mixing position, introducing the mixture to the nozzle, accelerating the mixture toward the position in which the diameter is the smallest, and injecting the material powder and the gas from the distal end of the nozzle; and a spraying step of spraying the material powder and the gas injected from the distal end onto the base member.
    • 本发明提供一种在实施冷喷涂法的同时,能够防止原料粉末过度加热的同时高速喷射原料粉末的成膜方法等。 该成膜方法用于通过喷射材料粉末以沉积在基底部件的表面上而形成膜,同时材料粉末保持固相状态。 所述成膜方法包括:混合距离调节步骤,根据所述原料粉末的种类,调节所述贯通路径的直径最小的位置与将所述原料粉末导入的混合位置之间的距离 喷嘴与气体混合,所述贯通通道形成在所述喷嘴内部,并构造成使得其直径首先减小,然后从基端朝向远端增加; 在混合位置混合原料粉末和气体的注入工序,将混合物导入喷嘴,使混合物朝向直径最小的位置加速,从原料粉末的前端喷射原料粉末和气体 喷嘴; 以及将原料粉末和从前端注入的气体喷雾到基材上的喷雾工序。