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2. 发明公开

EP0789071A1 METHOD FOR TREATING SURFACE OF SUBSTRATE AND SURFACE TREATMENT COMPOSITION THEREFOR 失效
标题翻译： VERFAHREN ZUR BEHANDLUNG EINERSUBSTRATOBERFLÄCHEUND BEHANDLUNGSMITTELHIERFÜR
公开(公告)号：EP0789071A1
公开(公告)日：1997-08-13
申请号：EP96925074.5
申请日：1996-07-25
申请人： MITSUBISHI CHEMICAL CORPORATION
发明人： MORINAGA, Hitoshi Mitsubishi Chem. Co. Kurosaki , FUJISUE, Masaya Mitsubishi Chem. Co. Kurosaki
IPC分类号： C11D7/04 , C11D7/26 , H01L21/304 , C23F1/32 , B21B45/02
CPC分类号： H01L21/02054 , C11D3/3947 , C11D7/06 , C11D7/261 , C11D7/263 , C11D7/264 , C11D7/265 , C11D7/266 , C11D7/267 , C11D7/32 , C11D7/3227 , C11D7/3245 , C11D7/34 , C11D11/0047 , H01L21/02052
摘要： A method for treating the surface of a substrate with a surface treatment composition, wherein the surface treatment composition comprises a liquid medium containing a complexing agent as a metal deposition preventive, the complexing agent comprising at least one member selected from the following Group A complexing agents and at least one member selected from the group consisting of the following Groups B1 to B6 complexing agents:

Group A: complexing agents having an aromatic hydrocarbon ring in the molecular structure thereof and at least one of an OH group and/or an O - group bonded directly to a carbon atom constituting the ring;
Group B1: complexing agents having at least one nitrogen atom as a donor atom in the molecular structure thereof;
Group B2: complexing agents having at least one atom selected from halogen, sulfur and carbon atoms as a donor atom in the molecular structure thereof;
Group B3: complexing agents having at least one oxygen atom as a donor atom in the molecular structure thereof, but not having a carbonyl group and a carboxyl group and not having any one of nitrogen, halogen, sulfur and carbon atoms as a donor atom;
Group B4: carboxylic acid type complexing agents having at least one carboxyl group in the molecular structure thereof, but not having any one of nitrogen, halogen, sulfur and carbon atoms as a donor atom and not having a carbonyl group and a hydroxyl group;
Group B5: hydroxymono- or di-carboxylic acid type complexing agents having at most 4 hydroxyl groups in the molecular structure thereof, but not having any one of nitrogen, halogen, sulfur and carbon atoms as a donor atom and not having a carbonyl group; and
Group B6: complexing agents having at least one carbonyl group in the molecular structure thereof.
摘要翻译：一种用表面处理组合物处理基材表面的方法，其中所述表面处理组合物包含含有络合剂作为金属沉积预防剂的液体介质，所述络合剂包含选自以下A组络合剂中的至少一种和选自以下组B1至B6络合剂中的至少一种：A组：在其分子结构中具有芳族烃环的络合剂和OH基和/或O - >直接键合到构成环的碳原子上; B1组：在其分子结构中具有至少一个氮原子作为供体原子的络合剂; 组B2：在其分子结构中具有至少一个选自卤素，硫和碳原子的原子作为供体原子的络合剂; B3组：在其分子结构中具有至少一个氧原子作为供体原子但不具有羰基和羧基并且不具有氮，卤素，硫和碳原子任一个作为供体原子的络合剂; B4组：在其分子结构中具有至少一个羧基但不具有氮，卤素，硫和碳原子作为供体原子且不具有羰基和羟基的羧酸型络合剂; B5组：在其分子结构中具有至多4个羟基但不具有氮，卤素，硫和碳原子作为供体原子且不具有羰基的任何一个的羟基单 - 或二羧酸型络合剂; 和B6组：其分子结构中具有至少一个羰基的络合剂。

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