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    • 2. 发明公开
    • Article comprising aligned nanowires and process for fabricating article
    • Element mit ausgerichtetenNanodrähtenund Verfahren zu dessen Herstellung
    • EP1100106A2
    • 2001-05-16
    • EP00308873.9
    • 2000-10-09
    • LUCENT TECHNOLOGIES INC.
    • Filas, Robert WilliamJin, SunghoKochanski, Gregory PeterZhu, Wei
    • H01J1/304
    • H01J9/025B82Y10/00H01J1/304H01J2201/30469H01J2223/04Y10S977/762
    • An improved process for fabricating emitter structures from nanowires, wherein the nanowires are coated with a magnetic material to allow useful alignment of the wires in the emitter array, and techniques are utilized to provide desirable protrusion of the aligned nanowires in the final structure. In one embodiment, nanowires at least partially coated by a magnetic material are provided, the nanowires having an average length of about 0.1 µm to about 10,000 µm. The nanowires are mixed in a liquid medium, and a magnetic field is applied to align the nanowires. The liquid medium is provided with a precursor material capable of consolidation into a solid matrix, e.g., conductive particles or a metal salt, the matrix securing the nanowires in an aligned orientation. A portion of the aligned nanowires are exposed, e.g., by etching a surface portion of the matrix material, to provide desirable nanowire tip protrusion.
    • 用于从纳米线制造发射体结构的改进方法,其中纳米线被涂覆有磁性材料,以允许发射器阵列中的线的有用对准,并且利用技术在最终结构中提供对准的纳米线的期望的突出。 在一个实施方案中,提供至少部分地由磁性材料涂覆的纳米线,所述纳米线具有约0.1μm至约10,000μm的平均长度。 纳米线在液体介质中混合,施加磁场以对准纳米线。 液体介质设置有能够固结成固体基质例如导电颗粒或金属盐的前体材料,该基质将纳米线固定在一个排列的取向上。 对准的纳米线的一部分例如通过蚀刻基质材料的表面部分而暴露,以提供所需的纳米线尖端突起。
    • 3. 发明公开
    • Field emitting device comprising field-concentrating nanoconductor assembly and method for making the same
    • 通过电场装置具有纳米级纤维及其制造方法的领域,浓缩装置发出
    • EP1069587A2
    • 2001-01-17
    • EP00305567.0
    • 2000-07-03
    • LUCENT TECHNOLOGIES INC.
    • Choi, Kyung MoonJin, SunghoKochanski, Gregory PeterZhu, Wei
    • H01J1/30H01J9/02
    • H01J1/304B82Y10/00H01J9/025H01J23/04H01J2201/30469H01J2225/38Y10S977/939
    • This invention is predicated on applicants' discovery that a highly oriented nanoconductor structure alone does not guarantee efficient field emission. To the contrary, the conventional densely populated, highly oriented structures actually yield relatively poor field emission characteristics. Applicants have determined that the individual nanoconductors in conventional assemblies are so closely spaced that they shield each other from effective field concentration at the ends, thus diminishing the driving force for efficient electron emission.
      In accordance with the invention, an improved field emitting nanoconductors assembly (a "low density nanoconductor assembly") comprises an array of nanoconductors which are highly aligned but spaced from each other an average distance of at least 10% of the average height of the nanoconductors and preferably 50% of the average height. In this way, the field strength at the ends will be at least 50% of the maximal field concentration possible. Several ways of making the optimally low density assemblies are described along with several devices employing the assemblies.
    • 该发明是基于申请人的发现没有单独高度取向的纳米导体结构并不能保证有效的场发射。 相反,传统的人口密集,高度定向的结构实际上产生相对较差的场发射特性。 申请人已经确定开采的确在常规组件中的单独的纳米导体被如此紧密间隔thatthey在端部处从有效场集中屏蔽海誓山盟,从而减少用于有效电子发射的驱动力。 在与本发明改进的现场装配发光纳米导体(一个“低密度纳米导体组件”)雅舞蹈是高度对准,但是在的纳米导体的平均高度的至少10%的平均距离彼此间隔开的纳米导体的阵列包括 优选为50%的平均高度的。 以这种方式,在端部处的电场强度将是最大场集中可能的至少50%。 使OPTI马利低密度组件的几种方法中描述地连同若干设备用人组件。
    • 4. 发明公开
    • Article comprising enhanced nanotube emitter structure and process for fabricating article
    • Anordnung mit einemKohlenstoffnanoröhre-Feldemissionsstruktur und Herstellungsverfahren
    • EP1022764A1
    • 2000-07-26
    • EP00300388.6
    • 2000-01-19
    • LUCENT TECHNOLOGIES INC.
    • Jin, SunghoKochanski, Gregory PeterZhu, Wei
    • H01J9/02H01J1/30
    • H01J23/06B82Y10/00H01J1/304H01J9/025H01J23/04H01J2201/30469Y10S977/842
    • An improved process for fabricating nanotube field emitter structures is provided, in which the nanotubes protrude from a supporting base material to improve emission properties. The resulting emitter structure are useful in a variety of devices, including microwave vacuum tube devices and flat-panel, field-emission displays. To attain the protruding nanotube emitter structure, according to one embodiment of the invention, nanotubes and metal particles are mixed and consolidated into a compact, and the compact is then sectioned to expose a substantial number of nanotube ends. A layer of the metal is selectively etched from the sectioned surface, leaving the exposed nanotubes protruding from the surface. The extent of protrusion is at least twice the average diameter of the nanotubes, advantageously at least ten times the average diameter of the nanotubes.
    • 提供了一种用于制造纳米管场发射体结构的改进方法,其中纳米管从支撑基材突出以改善发射性质。 所得到的发射极结构可用于各种装置,包括微波真空管装置和平板,场致发射显示器。 为了获得突出的纳米管发射体结构,根据本发明的一个实施方案,将纳米管和金属颗粒混合并固结成压实体,然后将压块切片以暴露大量的纳米管末端。 从分段表面选择性地蚀刻金属层,留下暴露的纳米管从表面突出。 突起的程度是纳米管的平均直径的至少两倍,有利地是纳米管的平均直径的至少十倍。
    • 5. 发明公开
    • Method for fabricating fluorinated diamond-like carbon layers
    • Verfahren zur Herstellung von fluorierten diamantartigen Beschichtungen
    • EP0942072A2
    • 1999-09-15
    • EP99301556.9
    • 1999-03-02
    • LUCENT TECHNOLOGIES INC.
    • Chien-Shing, PaiZhu, Wei
    • C23C14/22H01L21/00C23C14/06
    • H01L21/0212C23C14/06C23C14/0605H01L21/02271H01L21/312H01L21/76813
    • Ion beam deposition, using a carbon- and fluorine-containing source or sources, is used to form a fluorinated diamond-like carbon layer in a device, the FDLC layer exhibiting a dielectric constant of 3.0 or less along with a thermal stability of at least 400°C. During the ion beam deposition, due to the unique nature of carbon chemistry, the carbon atoms combine at the substrate surface to form all possible combinations of sp 1 , sp 2 and sp 3 bonds. However, ion beam etching occurs along with deposition, such that atoms of the weaker carbon structures - carbyne and graphite - are removed preferentially. This leads to a buildup of a diamond-like, sp 3 -bonded structure with fluorine atoms, it is believed, substituted for some carbon atoms within the structure, this structure providing the desirable properties of the layer.
    • 使用含碳和氟的源或离子源的离子束沉积在器件中形成氟化类金刚石碳层,FDLC层的介电常数为3.0以下,热稳定性至少为 在离子束沉积期间,由于碳化学的独特性质,碳原子在基底表面结合形成sp 1,sp 2和sp 3键的所有可能的组合。 然而,离子束蚀刻与沉积一起发生,使得较弱的碳结构的原子 - 卡宾和石墨 - 被优先除去。 这导致了具有氟原子的类金刚石,sp 3键结构的结构,据信这被取代了结构内的一些碳原子,该结构提供了该层所需的性质。
    • 8. 发明公开
    • Method for fabrication of patterned carbon nanotube films
    • Herstellungsverfahren einer gemustertenKohlenstoffnanoröhrenschicht
    • EP1096533A1
    • 2001-05-02
    • EP00306690.9
    • 2000-08-07
    • LUCENT TECHNOLOGIES INC.University of North Carolina
    • Bower, Christopher AndrewZhou, OttoZhu, Wei
    • H01J9/02C01B31/02
    • B82Y30/00B82Y40/00C01B32/16C01B2202/02H01J9/025Y10S977/742Y10S977/842Y10S977/844Y10T428/24893
    • A method for fabricating adherent, patterned carbon nanotube films is provided. According to the invention, a substrate is patterned with a carbide-forming material, a carbon-dissolving material, or a low melting point metal. Carbon nanotubes are then deposited onto the patterned substrate, but have relatively poor adhesion to either the substrate material or the patterned material. The substrate is then annealed, typically in vacuum, at a temperature dependent on the particular patterning material, e.g., a temperature at which carbide formation occurs, at which carbon dissolution occurs, or at which the low melting point metal melts. The annealing thereby provides an adherent nanotube film over the patterned areas, while the nanotubes deposited onto the non-patterned areas are easily removed, e.g., by blowing, rubbing, brushing and/or ultrasonication in a solvent such as methanol.
    • 提供了一种制造粘附的图案化碳纳米管膜的方法。 根据本发明,用碳化物形成材料,碳溶解材料或低熔点金属对基材进行图案化。 然后将碳纳米管沉积到图案化的衬底上,但对衬底材料或图案化材料的粘附性相对较差。 然后在取决于特定图形材料的温度,例如发生碳化物形成的温度,发生碳溶解或低熔点金属熔化的温度下,将基材通常在真空中退火。 因此退火在图案化区域上提供粘附的纳米管薄膜,而沉积在非图案化区域上的纳米管容易地被去除,例如通过在诸如甲醇的溶剂中吹塑,摩擦,刷涂和/或超声波处理。
    • 9. 发明公开
    • Method for fabricating fluorinated diamond-like carbon layers
    • 制备氟化类金刚石碳层的方法
    • EP0942072A3
    • 1999-10-13
    • EP99301556.9
    • 1999-03-02
    • LUCENT TECHNOLOGIES INC.
    • Chien-Shing, PaiZhu, Wei
    • C23C14/22H01L21/00C23C14/06
    • H01L21/0212C23C14/06C23C14/0605H01L21/02271H01L21/312H01L21/76813
    • Ion beam deposition, using a carbon- and fluorine-containing source or sources, is used to form a fluorinated diamond-like carbon layer in a device, the FDLC layer exhibiting a dielectric constant of 3.0 or less along with a thermal stability of at least 400°C. During the ion beam deposition, due to the unique nature of carbon chemistry, the carbon atoms combine at the substrate surface to form all possible combinations of sp 1 , sp 2 and sp 3 bonds. However, ion beam etching occurs along with deposition, such that atoms of the weaker carbon structures - carbyne and graphite - are removed preferentially. This leads to a buildup of a diamond-like, sp 3 -bonded structure with fluorine atoms, it is believed, substituted for some carbon atoms within the structure, this structure providing the desirable properties of the layer.
    • 使用含碳和含氟源(或多种源)的离子束沉积用于在器件中形成氟化类金刚石碳层,所述FDLC层表现出3.0或更低的介电常数以及至少热稳定性 400℃。 在离子束沉积期间,由于碳化学的独特性质,碳原子在基板表面结合以形成sp1,sp2和sp3键的所有可能的组合。 然而,离子束蚀刻与沉积一起发生,使得较弱碳结构的原子 - 碳炔和石墨 - 被优先移除。 这导致与氟原子形成菱形的sp3键合结构,据信,它取代了结构内的一些碳原子,该结构提供了该层的所需性质。