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    • 2. 发明公开
    • SURFACE INSPECTION DEVICE, SURFACE INSPECTION METHOD AND PROGRAM
    • EP3187860A4
    • 2018-04-18
    • EP15836798
    • 2015-07-21
    • KONICA MINOLTA INC
    • KOMATSU TAKAFUMIABE YOSHIHISAYAMAGUCHI WATARUTAKEBE YOSUKE
    • G01N21/95G01N21/47G01N21/88
    • G01N21/95G01N21/474G01N21/8806
    • In order to determine white blurring objectively and without irregularity, this surface inspection device is provided with an opening, multiple measurement units, an acquisition unit, and a calculation unit. The opening defines an aperture plane used for measurement purposes. The multiple measurement units each has a light emitting unit and a light receiving unit, and, seen in a perspective planar view from the imaginary normal line of the aperture plane, are arranged in mutually different directions with respect to the opening. For each measurement unit, the acquisition unit acquires a detection value relating to brightness, corresponding to the light received through the aperture plane by the light receiving unit after being emitted from a sample surface in response to being irradiated by light from the light emitting unit through the aperture plane. The calculation unit calculates an evaluation value relating to the degree of variation of the multiple detection values obtained by the acquisition unit for each of the measurement units. Further, a first angle formed between the first optical path of light travelling from the light emitting unit towards the aperture plane and the normal line of said aperture plane, a second angle formed between said normal line and a second optical path of light travelling from the aperture plane towards the light receiving unit, and a third angle formed between the first optical path and the second optical path are the same in each of the multiple measurement units.