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2. 发明公开

EP2633559A2 A METHOD FOR PRODUCING A BACK-CONTACT BACK-JUNCTION SILICON SOLAR CELL 有权
标题翻译：工艺生产具有背接触和后部连接硅太阳能电池
公开(公告)号：EP2633559A2
公开(公告)日：2013-09-04
申请号：EP11773300.6
申请日：2011-10-25
申请人： Institutt For Energiteknikk
发明人： MANGERSNES, Krister , FOSS, Sean, Erik
IPC分类号： H01L31/0224
CPC分类号： H01L31/022425 , C23C14/046 , H01L31/022441 , Y02E10/50
摘要： A device including a surface layer of a selected material in a predetermined pattern on a substrate surface. A groove or ridge arranged in the substrate surface includes a bottom or top face, respectively, and at least one side face sloping relative to the bottom or top face. The surface layer is deposited on a part of the substrate including the groove or ridge by vacuum chamber sputtering the selected material from a sputtering source while moving the substrate past the sputtering source in a direction substantially perpendicular to a sputtering main lobe direction and with a normal to the substrate surface substantially in a predefined angle with the main lobe direction. By uniformly etching away surface layer material deposited on the substrate by the sputtering until freeing a substantial part of the side face, the predetermined pattern becomes defined substantially by the bottom face or the top face.
摘要翻译：一种装置，包括在表面上的基板以规定的图案中选择的材料的表面层。在基板表面设置有槽或脊包括一个底部或顶面，分别与至少一个侧面倾斜相对于底部或顶面。表面层被沉积在包括通过真空室中的槽或脊的同时移动经过溅射源基板的方向基本上垂直于溅射主瓣方向和与正常从溅射源溅射所选材料的基板的一部分于基板表面基本与主波瓣方向上的预定的角度。通过均匀地蚀刻掉，通过溅射沉积在基片上，直至释放的侧面的主要部分的表面层材料，该预定图案变得由底面或顶面基本上限定。

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