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    • 2. 发明公开
    • INVERSE TAPER WAVEGUIDES FOR LOW-LOSS MODE CONVERTERS
    • WENENLEITER MIT逆转胶条FÜRWANDLER MIT VERLUSTARMEM MODUS
    • EP3149523A1
    • 2017-04-05
    • EP15724836.0
    • 2015-04-30
    • Huawei Technologies Co. Ltd.
    • YANG, LiPAN, HuapuXU, QianfanZHENG, DaweiSHEN, Xiao
    • G02B6/30G02B6/122G02B6/14
    • G02B6/14G02B6/1228G02B6/132G02B6/136G02B6/305
    • An apparatus comprises a substrate comprising a silicon dioxide (SiO2) material disposed on top of the substrate, a silicon waveguide comprising a first adiabatic tapering and enclosed in the silicon dioxide material, and a low-index waveguide disposed on top of the substrate and adjacent to the first adiabatic tapering. A mode converter fabrication method comprises obtaining a mode converter comprising a substrate, a silicon waveguide disposed on the substrate and comprising a sidewall and a first adiabatic tapering, and a hard mask disposed on the silicon waveguide and comprising a silicon dioxide (SiO2) layer, wherein the hard mask does not cover the sidewall, and oxidizing the silicon waveguide and the hard mask, wherein oxidizing the silicon waveguide and the hard mask encloses the silicon waveguide within the silicon dioxide layer.
    • 一种设备包括:衬底,其包括设置在衬底顶部的二氧化硅(SiO 2)材料,包括第一绝热锥形并封装在二氧化硅材料中的硅波导,以及设置在衬底顶部和相邻的低折射率波导 到第一个绝热锥形。 一种模式转换器制造方法,包括:获得模式转换器,包括基板,设置在基板上的硅波导,包括侧壁和第一绝热锥形,以及设置在硅波导上并包括二氧化硅(SiO 2)层的硬掩模, 其中所述硬掩模不覆盖所述侧壁,并且氧化所述硅波导和所述硬掩模,其中氧化所述硅波导和所述硬掩模将所述硅波导包围在所述二氧化硅层内。