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1. 发明授权

EP2070635B1 LASER PROCESSING METHOD 有权
公开(公告)号：EP2070635B1
公开(公告)日：2015-02-18
申请号：EP07828332.2
申请日：2007-09-25
申请人： Hamamatsu Photonics K.K.
发明人： ATSUMI, Kazuhiro , KUNO, Koji , SUZUKI, Tatsuya
IPC分类号： B23K26/00 , B23K26/38 , B23K26/04 , B23K26/40 , H01L21/301 , C03B33/02 , C03B33/09 , H01L21/02 , H01L21/78
CPC分类号： H01L21/78 , B23K26/0057 , B23K26/046 , B23K26/048 , B23K26/40 , B23K2201/40 , B23K2203/50 , C03B33/0222 , C03B33/091 , H01L21/02381 , H01L21/02675

2. 发明授权

EP1707298B1 LASER PROCESSING METHOD AND DEVICE 有权
标题翻译：激光装置和方法
公开(公告)号：EP1707298B1
公开(公告)日：2011-08-31
申请号：EP04806954.6
申请日：2004-12-13
申请人： HAMAMATSU PHOTONICS K.K.
发明人： ATSUMI, Kazuhiro , KUNO, Koji , KUSUNOKI, Masayoshi , SUZUKI, Tatsuya
IPC分类号： B23K26/04 , B23K26/38
CPC分类号： B23K26/0057 , B23K26/03 , B23K26/032 , B23K26/046 , B23K26/048 , B23K26/40 , B23K2201/40 , B23K2203/50
摘要： A laser processing method which can efficiently perform laser processing while minimizing the deviation of the converging point of a laser beam in end parts of an object to be processed is provided. This laser processing method comprises a displacement acquiring step (S06 and S07) of acquiring a displacement between a point on the line to cut and one end of the line to cut in the object while irradiating the object with a second laser beam, converged by a lens, for measuring the displacement of a main surface of the object; and a position setting step (S08 and S09) of setting an initial position for holding the lens with respect to the main surface of the object according to the acquired displacement, and holding the lens at thus set initial position. After a modified region is formed in one end part of the line to cut by irradiation with a first laser beam for processing while holding the lens at the initial position, the lens is released from being held, and then the modified region is formed while adjusting the position of the lens.

3. 发明公开

EP2070635A1 LASER PROCESSING METHOD 有权
标题翻译：激光加工方法
公开(公告)号：EP2070635A1
公开(公告)日：2009-06-17
申请号：EP07828332.2
申请日：2007-09-25
申请人： Hamamatsu Photonics K.K.
发明人： ATSUMI, Kazuhiro , KUNO, Koji , SUZUKI, Tatsuya
IPC分类号： B23K26/38 , B23K26/00 , B23K26/04 , B23K26/40 , H01L21/301
CPC分类号： H01L21/78 , B23K26/0057 , B23K26/046 , B23K26/048 , B23K26/40 , B23K2201/40 , B23K2203/50 , C03B33/0222 , C03B33/091 , H01L21/02381 , H01L21/02675
摘要： A modified region is accurately formed at a desirable position with respect to a laser light irradiation surface of an object to be processed. When an average difference γ has a value exceeding a predetermined threshold during trace recording, a particle segment Z including a line segment S where the average difference γ exceeds the predetermined threshold is defined. This determines that a particle exists on a line to cut 5 and randomly reflects measuring laser light, whereby a segment where the presence of the particle affects a control signal in a line segment to cut is detected as the particle segment Z. Correcting the control signal in the particle segment Z inhibits a converging lens from moving more than necessary because of an error included in the signal value under the influence of the presence of the particle, thus allowing the converging point of the processing laser light to accurately follow a front face 3.
摘要翻译：相对于被处理物的激光照射面，在所希望的位置正确地形成改质区域。当平均差值γ在轨迹记录期间具有超过预定阈值的值时，定义包括平均差值γ超过预定阈值的线段S的粒子段Z. 这确定在要切割的线5上存在粒子并随机地反射测量激光，由此在线段中检测到粒子的存在影响控制信号的区段被检测为粒子区段Z.校正控制信号在粒子段Z中，由于在粒子的存在的影响下信号值中包括的误差，所以抑制了会聚透镜不必要地移动，从而允许加工激光的会聚点精确地跟随前面3 。

4. 发明公开

EP2070636A1 LASER PROCESSING METHOD 有权
标题翻译： LASERVERARBEITUNGSVERFAHREN
公开(公告)号：EP2070636A1
公开(公告)日：2009-06-17
申请号：EP07828566.5
申请日：2007-09-27
申请人： Hamamatsu Photonics K.K.
发明人： KUNO, Koji , SUZUKI, Tatsuya , ATSUMI, Kazuhiro
IPC分类号： B23K26/38 , B23K26/06 , B23K26/40 , H01L21/301
CPC分类号： B23K26/0057 , B23K26/046 , B23K26/048 , B23K26/40 , B23K2203/50 , B28D5/0011 , H01L21/02381 , H01L21/02675 , H01L21/67092 , H01L21/78
摘要： While a converging lens 108 is relatively moved along a line 50 including a line to cut 5, measuring laser light L2 is converged with the lens 108 when the lens 108 is positioned on a processing region 30 having an outer shape between an object to be processed 1 and a frame 22, and a reflected light component of the laser light L2 reflected by a front face 3 of the object 1 is detected. While keeping a substantially constant distance between the front face 3 and the lens 108 such that a converging point P of processing laser light L1 is positioned at a constant distance from the front face 3 according to the detection, the laser light L1 is converged by the lens 108, so as to form a molten processed region 13 within the object 1.
摘要翻译：当会聚透镜108沿着包括切割线5的线50相对移动时，当透镜108位于具有处于被处理物体之间的外形的处理区域30时，测量激光L2与透镜108会聚检测出由物体1的前面3反射的激光L2的反射光分量。在保持前表面3和透镜108之间保持基本上恒定的距离的同时，根据检测，处理激光L1的会聚点P位于与前表面3相距恒定的距离处，激光L1被透镜108，以便在物体1内形成熔融处理区域13。

5. 发明公开

EP2070633A1 LASER WORKING METHOD 有权
标题翻译：激光工作方法
公开(公告)号：EP2070633A1
公开(公告)日：2009-06-17
申请号：EP07807872.2
申请日：2007-09-26
申请人： Hamamatsu Photonics K.K.
发明人： ATSUMI, Kazuhiro , KUNO, Koji , SUZUKI, Tatsuya
IPC分类号： B23K26/38 , B23K26/06 , B23K26/40 , H01L21/301
CPC分类号： B23K26/046 , B23K26/0057 , B23K26/048 , B23K26/40 , B23K2203/50
摘要： A converging point of processing laser light is made to accurately follow a laser light irradiation surface of an object to be processed. An object to be processed 1 is irradiated with measuring laser light along a line to cut 5, astigmatism is added to a reflected light component of the measuring laser light reflected by a front face 3 of the object 1 irradiated with the measuring laser light, a displacement sensor signal corresponding to a converged light image of the reflected light component having the astigmatism added thereto is detected, and the displacement sensor signal is made to become a feedback reference value corresponding to the quantity of the reflected light component, so as to locate the converging point of the processing laser light at a predetermined position with respect to the front face 3. This allows the converging point of the processing laser light to follow the front face 3 of the object 1 reliably and accurately even when an area exhibiting an extremely low reflectance to the measuring laser light exists in a part of the front face 3 and lowers the quantity of the reflected light component of the measuring laser light.
摘要翻译：使加工激光的会聚点精确地跟随待处理对象的激光照射表面。对被加工物1照射沿着切断预定线5的测定用激光，对被测定用激光照射的被检体1的正面3反射的测定用激光的反射光成分附加像散，对与附加有像散的反射光成分的聚光图像对应的位移传感器信号进行检测，使位移传感器信号成为与反射光成分量对应的反馈基准值，处理用激光的聚光点相对于表面3而位于规定的位置。由此，即使在表示非常低的区域的情况下，也能够使加工用激光的聚光点可靠且准确地追随被测定物1的表面3 测量激光的反射率存在于正面3的一部分中，并且降低反射光分量的量测量激光。

6. 发明授权

EP2070633B1 LASER WORKING METHOD 有权
标题翻译：激光工作方法
公开(公告)号：EP2070633B1
公开(公告)日：2016-01-27
申请号：EP07807872.2
申请日：2007-09-26
申请人： Hamamatsu Photonics K.K.
发明人： ATSUMI, Kazuhiro , KUNO, Koji , SUZUKI, Tatsuya
IPC分类号： B23K26/38 , B23K26/06 , B23K26/40 , H01L21/301 , B23K26/00 , B23K26/04
CPC分类号： B23K26/046 , B23K26/0057 , B23K26/048 , B23K26/40 , B23K2203/50

7. 发明授权

EP2070636B1 LASER PROCESSING METHOD 有权
公开(公告)号：EP2070636B1
公开(公告)日：2015-08-05
申请号：EP07828566.5
申请日：2007-09-27
申请人： Hamamatsu Photonics K.K.
发明人： KUNO, Koji , SUZUKI, Tatsuya , ATSUMI, Kazuhiro
IPC分类号： B23K26/38 , B23K26/06 , B23K26/40 , H01L21/301 , B23K26/04 , B23K26/00 , H01L21/02 , H01L21/78
CPC分类号： B23K26/0057 , B23K26/046 , B23K26/048 , B23K26/40 , B23K2203/50 , B28D5/0011 , H01L21/02381 , H01L21/02675 , H01L21/67092 , H01L21/78

8. 发明授权

EP1712322B1 LASER PROCESSING METHOD AND DEVICE 有权
标题翻译：激光装置和方法
公开(公告)号：EP1712322B1
公开(公告)日：2013-03-27
申请号：EP04806952.0
申请日：2004-12-13
申请人： HAMAMATSU PHOTONICS K.K.
发明人： ATSUMI, Kazuhiro , KUNO, Koji , KUSUNOKI, Masayoshi , SUZUKI, Tatsuya
IPC分类号： B23K26/04 , B23K26/38 , B23K26/00 , B23K26/40
CPC分类号： B23K26/0057 , B23K26/046 , B23K26/048 , B23K26/40 , B23K2203/50
摘要： A laser processing method which can efficiently perform laser processing while minimizing the deviation of the converging point of a laser beam is provided. This laser processing method comprises a displacement acquiring step (S07 to S11) of irradiating an object to be processed with a rangefinding laser beam for measuring a displacement of a main surface of the object while converging the laser beam with a lens and acquiring the displacement of the main surface along a line to cut while detecting reflected light reflected by the main surface in response to the irradiation; and moves the processing objective lens and the object relative to each other along the main surface, while adjusting the gap between the processing objective lens and the surface according to the displacement acquired by the displacement acquiring step, thereby forming the modified region along the line to cut.

9. 发明公开

EP1712322A1 LASER PROCESSING METHOD AND DEVICE 有权
标题翻译： LASERBEARBEITUNGSVERFAHREN UND -VORRICHTUNG
公开(公告)号：EP1712322A1
公开(公告)日：2006-10-18
申请号：EP04806952.0
申请日：2004-12-13
申请人： HAMAMATSU PHOTONICS K.K.
发明人： ATSUMI, Kazuhiro , KUNO, Koji , KUSUNOKI, Masayoshi , SUZUKI, Tatsuya
IPC分类号： B23K26/04 , B23K26/38
CPC分类号： B23K26/0057 , B23K26/046 , B23K26/048 , B23K26/40 , B23K2203/50
摘要： A laser processing method which can efficiently perform laser processing while minimizing the deviation of the converging point of a laser beam is provided.
This laser processing method comprises a displacement acquiring step (S07 to S11) of irradiating an object to be processed with a rangefinding laser beam for measuring a displacement of a main surface of the object while converging the laser beam with a lens and acquiring the displacement of the main surface along a line to cut while detecting reflected light reflected by the main surface in response to the irradiation; and moves the processing objective lens and the object relative to each other along the main surface, while adjusting the gap between the processing objective lens and the surface according to the displacement acquired by the displacement acquiring step, thereby forming the modified region along the line to cut.
摘要翻译：提供一种可以有效地执行激光加工同时最小化激光束的会聚点的偏差的激光加工方法。该激光处理方法包括：位移获取步骤（S07至S11），用用于测量物体的主表面的位移的测距激光束照射被处理物体，同时将激光束与透镜一起收敛，并获得沿着切割线的主表面，同时响应于照射检测由主表面反射的反射光; 并且沿着主表面相对于彼此移动处理物镜和物体，同时根据通过位移获取步骤获取的位移调节处理物镜与表面之间的间隙，从而沿着线形成修改区域切。

10. 发明公开

EP1707298A1 LASER PROCESSING METHOD AND DEVICE 有权
标题翻译：激光加工方法和装置
公开(公告)号：EP1707298A1
公开(公告)日：2006-10-04
申请号：EP04806954.6
申请日：2004-12-13
申请人： HAMAMATSU PHOTONICS K.K.
发明人： ATSUMI, Kazuhiro , KUNO, Koji , KUSUNOKI, Masayoshi , SUZUKI, Tatsuya
IPC分类号： B23K26/04 , B23K26/38
CPC分类号： B23K26/0057 , B23K26/03 , B23K26/032 , B23K26/046 , B23K26/048 , B23K26/40 , B23K2201/40 , B23K2203/50
摘要： A laser processing method which can efficiently perform laser processing while minimizing the deviation of the converging point of a laser beam in end parts of an object to be processed is provided.
This laser processing method comprises a displacement acquiring step (S06 and S07) of acquiring a displacement between a point on the line to cut and one end of the line to cut in the object while irradiating the object with a second laser beam, converged by a lens, for measuring the displacement of a main surface of the object; and a position setting step (S08 and S09) of setting an initial position for holding the lens with respect to the main surface of the object according to the acquired displacement, and holding the lens at thus set initial position. After a modified region is formed in one end part of the line to cut by irradiation with a first laser beam for processing while holding the lens at the initial position, the lens is released from being held, and then the modified region is formed while adjusting the position of the lens.
摘要翻译：提供一种激光加工方法，其能够在使被加工物的端部的激光的聚光点的偏差最小化的同时高效地进行激光加工。该激光加工方法具备：位移取得步骤（S06，S07），其一边照射第2激光，一边取得被切断预定线上的点与切断预定线的一端之间的位移，透镜，用于测量物体的主表面的位移; 以及位置设定步骤（S08和S09），其根据所获得的位移来设定用于保持透镜的初始位置相对于对象的主表面，并且将透镜保持在由此设定的初始位置。在将透镜保持在初始位置的同时，通过照射第一激光束进行加工而在要切割的线的一个端部中形成改变区域之后，从透镜释放而不被保持，然后形成改性区域镜头的位置。

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