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1. 发明授权

EP2063449B1 Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus 有权
标题翻译：一种用于在粒子光学装置中获取样品的扫描透射图像的方法
公开(公告)号：EP2063449B1
公开(公告)日：2011-04-13
申请号：EP08169468.9
申请日：2008-11-20
申请人： FEI COMPANY
发明人： Sourty, Erwan , Luecken, Uwe , Freitag, Bert , Yakushevska, Alevtyna
IPC分类号： H01J37/28
CPC分类号： H01J37/263 , H01J37/265 , H01J37/28 , H01J2237/2802 , H01J2237/2803 , H01J2237/2809

2. 发明公开

EP2063450A1 Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus 审中-公开
标题翻译： Verfahren zum Erhalten eines Rastertransmissionsbildes einer Probe在einer teilchenoptischen Vorrichtung
公开(公告)号：EP2063450A1
公开(公告)日：2009-05-27
申请号：EP07121186.6
申请日：2007-11-21
申请人： FEI COMPANY
发明人： Luecken, Uwe , Freitag, Bert , Sourty, Erwan , Yakushevska, Alevtyna
IPC分类号： H01J37/28
CPC分类号： H01J37/263 , H01J37/265 , H01J37/28 , H01J2237/2802 , H01J2237/2803 , H01J2237/2809
摘要： The invention discloses a method for Scanning Transmission Electron Microscopy (STEM). In STEM a sample (1) is scanned with a focused beam of electrons (2). The diameter of the cross-over R can be as low as 0.1 nm. As known to the person skilled in the art the diameter of the cross-over depends on the opening half-angle α of the beam. Therefore for optimum resolution an opening half-angle is chosen at which the diameter of the cross-over R(α) shows a minimum.
For thick samples however the resolution is, for those parts of the sample removed from the cross-over plane, limited by the convergence of the beam, resulting in a diameter D of the beam at the surface of the sample.
According to the invention the opening angle is chosen to balance the contribution of convergence and of diameter of the cross-over by choosing an opening half-angle α smaller than the opening half-angle resulting in the smallest R(α). Effectively the sample is then scanned with a beam that has a substantially constant diameter over the length of the sample material through which the electrons have to travel.
摘要翻译：本发明公开了一种扫描透射电子显微镜（STEM）的方法。在STEM中，用聚焦的电子束扫描样品（1）（2）。交叉R的直径可以低至0.1nm。如本领域技术人员所知，交叉的直径取决于梁的开口半角±。因此，为了获得最佳分辨率，选择开口半角，其中交叉R（±）的直径显示为最小值。然而，对于厚样品，对于从交叉平面移除的样品的那些部分，由束的会聚限制，导致样品表面处的束的直径D。根据本发明，通过选择比最小R（±）的开半角小的开度半角±±，选择开度角来平衡会聚和交叉直径的贡献。然后有效地将样品用在电子必须行进的样品材料的长度上具有基本恒定直径的光束进行扫描。

3. 发明公开

EP2063449A1 Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus 有权
标题翻译： Verfahren zum Erzielen eines Rastertransmissionsbildes einer Probe在einer teilchenoptischen Vorrichtung
公开(公告)号：EP2063449A1
公开(公告)日：2009-05-27
申请号：EP08169468.9
申请日：2008-11-20
申请人： FEI COMPANY
发明人： Sourty, Erwan , Luecken, Uwe , Freitag, Bert , Yakushevska, Alevtyna
IPC分类号： H01J37/28
CPC分类号： H01J37/263 , H01J37/265 , H01J37/28 , H01J2237/2802 , H01J2237/2803 , H01J2237/2809
摘要： The invention discloses a method for Scanning Transmission Electron Microscopy (STEM). In STEM a sample (1) is scanned with a focused beam of electrons (2). The diameter of the cross-over (3) can be as low as 0.1 nm. As known to the person skilled in the art the diameter of the cross-over depends on the opening half-angle α of the beam. Therefore for optimum resolution an opening half-angle is chosen at which the diameter of the cross-over R(α) shows a minimum.
For thick samples however the resolution is, for those parts of the sample removed from the cross-over plane, limited by the convergence of the beam, resulting in a diameter D of the beam at the surface of the sample.
According to the invention the opening angle is chosen to balance the contribution of convergence and of diameter of the cross-over by choosing an opening half-angle smaller than the optimum opening half-angle. Effectively the sample is then scanned with a beam that has a substantially constant diameter over the length of the sample material through which the electrons have to travel.
摘要翻译：本发明公开了一种扫描透射电子显微镜（STEM）的方法。在STEM中，用聚焦的电子束扫描样品（1）（2）。交叉（3）的直径可以低至0.1nm。如本领域技术人员所知，交叉的直径取决于梁的开口半角±。因此，为了获得最佳分辨率，选择开口半角，其中交叉R（±）的直径显示为最小值。然而，对于厚样品，对于从交叉平面移除的样品的那些部分，由束的会聚限制，导致样品表面处的束的直径D。根据本发明，通过选择小于最佳开口半角的开口半角度来选择打开角度以平衡会聚的贡献和交叉的直径。然后有效地将样品用在电子必须行进的样品材料的长度上具有基本恒定直径的光束进行扫描。

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